8/20/2012	10:38:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	10:38:29 AM	Recipe started at 10:38 AM
8/20/2012	10:38:29 AM	Helium valve closed
8/20/2012	10:38:29 AM	H2 valve closed
8/20/2012	10:38:29 AM	BCl3 valve closed
8/20/2012	10:38:29 AM	PH3 valve closed
8/20/2012	10:38:30 AM	SiCl4 pre valve closed
8/20/2012	10:38:30 AM	SiCl4 post valve closed
8/20/2012	10:38:30 AM	Main Vac valve closed
8/20/2012	10:38:30 AM	Bypass valve closed
8/20/2012	10:38:30 AM	Bubbler valve closed
8/20/2012	10:38:30 AM	Helium MFC set to  0.000000
8/20/2012	10:38:30 AM	H2 MFC set to  0.000000
8/20/2012	10:38:30 AM	BCl3 MFC set to  0.000000
8/20/2012	10:38:30 AM	PH3 MFC set to  0.000000
8/20/2012	10:38:30 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:38:30 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:38:30 AM	Tube furnace set to 0
8/20/2012	10:38:33 AM	H2 valve closed
8/20/2012	10:38:33 AM	BCl3 valve closed
8/20/2012	10:38:33 AM	PH3 valve closed
8/20/2012	10:38:33 AM	SiCl4 pre valve closed
8/20/2012	10:38:33 AM	SiCl4 post valve closed
8/20/2012	10:38:33 AM	Main Vac valve closed
8/20/2012	10:38:33 AM	Bypass valve closed
8/20/2012	10:38:33 AM	Bubbler valve closed
8/20/2012	10:38:33 AM	Helium valve opened
8/20/2012	10:38:33 AM	Helium MFC set to  500.000000
8/20/2012	10:38:33 AM	H2 MFC set to  0.000000
8/20/2012	10:38:33 AM	BCl3 MFC set to  0.000000
8/20/2012	10:38:33 AM	PH3 MFC set to  0.000000
8/20/2012	10:38:33 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:38:33 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:38:33 AM	Tube furnace set to 0
8/20/2012	10:39:45 AM	Helium valve closed
8/20/2012	10:39:45 AM	H2 valve closed
8/20/2012	10:39:45 AM	BCl3 valve closed
8/20/2012	10:39:45 AM	PH3 valve closed
8/20/2012	10:39:45 AM	SiCl4 pre valve closed
8/20/2012	10:39:45 AM	SiCl4 post valve closed
8/20/2012	10:39:45 AM	Main Vac valve closed
8/20/2012	10:39:45 AM	Bypass valve closed
8/20/2012	10:39:45 AM	Bubbler valve closed
8/20/2012	10:39:45 AM	Helium MFC set to  0.000000
8/20/2012	10:39:45 AM	H2 MFC set to  0.000000
8/20/2012	10:39:45 AM	BCl3 MFC set to  0.000000
8/20/2012	10:39:45 AM	PH3 MFC set to  0.000000
8/20/2012	10:39:45 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:39:45 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:39:46 AM	Tube furnace set to 0
8/20/2012	10:39:47 AM	Run finished at 10:39 AM
8/20/2012	10:39:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	10:47:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	10:47:23 AM	Recipe started at 10:47 AM
8/20/2012	10:47:23 AM	Helium valve closed
8/20/2012	10:47:23 AM	H2 valve closed
8/20/2012	10:47:23 AM	BCl3 valve closed
8/20/2012	10:47:23 AM	PH3 valve closed
8/20/2012	10:47:23 AM	SiCl4 pre valve closed
8/20/2012	10:47:23 AM	SiCl4 post valve closed
8/20/2012	10:47:23 AM	Main Vac valve closed
8/20/2012	10:47:23 AM	Bubbler valve closed
8/20/2012	10:47:23 AM	Bypass valve opened
8/20/2012	10:47:23 AM	Helium MFC set to  0.000000
8/20/2012	10:47:23 AM	H2 MFC set to  0.000000
8/20/2012	10:47:23 AM	BCl3 MFC set to  0.000000
8/20/2012	10:47:23 AM	PH3 MFC set to  0.000000
8/20/2012	10:47:23 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:47:23 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:47:24 AM	Tube furnace set to 0
8/20/2012	10:48:45 AM	Helium valve closed
8/20/2012	10:48:45 AM	H2 valve closed
8/20/2012	10:48:45 AM	BCl3 valve closed
8/20/2012	10:48:45 AM	PH3 valve closed
8/20/2012	10:48:45 AM	SiCl4 pre valve closed
8/20/2012	10:48:45 AM	SiCl4 post valve closed
8/20/2012	10:48:45 AM	Main Vac valve closed
8/20/2012	10:48:45 AM	Bubbler valve closed
8/20/2012	10:48:45 AM	Bypass valve opened
8/20/2012	10:48:45 AM	Helium MFC set to  0.000000
8/20/2012	10:48:45 AM	H2 MFC set to  0.000000
8/20/2012	10:48:45 AM	BCl3 MFC set to  0.000000
8/20/2012	10:48:45 AM	PH3 MFC set to  0.000000
8/20/2012	10:48:45 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:48:45 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:48:45 AM	Tube furnace set to 0
8/20/2012	10:49:45 AM	Helium valve closed
8/20/2012	10:49:45 AM	H2 valve closed
8/20/2012	10:49:45 AM	BCl3 valve closed
8/20/2012	10:49:45 AM	PH3 valve closed
8/20/2012	10:49:45 AM	SiCl4 pre valve closed
8/20/2012	10:49:45 AM	SiCl4 post valve closed
8/20/2012	10:49:45 AM	Bypass valve closed
8/20/2012	10:49:45 AM	Bubbler valve closed
8/20/2012	10:49:45 AM	Main Vac valve opened
8/20/2012	10:49:45 AM	Helium MFC set to  0.000000
8/20/2012	10:49:45 AM	H2 MFC set to  0.000000
8/20/2012	10:49:45 AM	BCl3 MFC set to  0.000000
8/20/2012	10:49:45 AM	PH3 MFC set to  0.000000
8/20/2012	10:49:45 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:49:45 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:49:45 AM	Tube furnace set to 0
8/20/2012	10:49:46 AM	Run finished at 10:49 AM
8/20/2012	10:49:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	10:51:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	10:51:05 AM	Recipe started at 10:51 AM
8/20/2012	10:51:05 AM	Helium valve closed
8/20/2012	10:51:05 AM	H2 valve closed
8/20/2012	10:51:05 AM	BCl3 valve closed
8/20/2012	10:51:05 AM	PH3 valve closed
8/20/2012	10:51:05 AM	SiCl4 pre valve closed
8/20/2012	10:51:05 AM	SiCl4 post valve closed
8/20/2012	10:51:05 AM	Main Vac valve closed
8/20/2012	10:51:05 AM	Bypass valve closed
8/20/2012	10:51:05 AM	Bubbler valve closed
8/20/2012	10:51:05 AM	Helium MFC set to  0.000000
8/20/2012	10:51:05 AM	H2 MFC set to  0.000000
8/20/2012	10:51:05 AM	BCl3 MFC set to  0.000000
8/20/2012	10:51:05 AM	PH3 MFC set to  0.000000
8/20/2012	10:51:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:51:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:51:05 AM	Tube furnace set to 0
8/20/2012	10:51:08 AM	H2 valve closed
8/20/2012	10:51:08 AM	BCl3 valve closed
8/20/2012	10:51:08 AM	PH3 valve closed
8/20/2012	10:51:08 AM	SiCl4 pre valve closed
8/20/2012	10:51:08 AM	SiCl4 post valve closed
8/20/2012	10:51:08 AM	Main Vac valve closed
8/20/2012	10:51:08 AM	Bypass valve closed
8/20/2012	10:51:08 AM	Bubbler valve closed
8/20/2012	10:51:08 AM	Helium valve opened
8/20/2012	10:51:08 AM	Helium MFC set to  500.000000
8/20/2012	10:51:08 AM	H2 MFC set to  0.000000
8/20/2012	10:51:08 AM	BCl3 MFC set to  0.000000
8/20/2012	10:51:08 AM	PH3 MFC set to  0.000000
8/20/2012	10:51:08 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:51:08 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:51:08 AM	Tube furnace set to 0
8/20/2012	10:52:21 AM	Helium valve closed
8/20/2012	10:52:22 AM	H2 valve closed
8/20/2012	10:52:22 AM	BCl3 valve closed
8/20/2012	10:52:22 AM	PH3 valve closed
8/20/2012	10:52:22 AM	SiCl4 pre valve closed
8/20/2012	10:52:22 AM	SiCl4 post valve closed
8/20/2012	10:52:22 AM	Main Vac valve closed
8/20/2012	10:52:22 AM	Bypass valve closed
8/20/2012	10:52:22 AM	Bubbler valve closed
8/20/2012	10:52:22 AM	Helium MFC set to  0.000000
8/20/2012	10:52:22 AM	H2 MFC set to  0.000000
8/20/2012	10:52:22 AM	BCl3 MFC set to  0.000000
8/20/2012	10:52:22 AM	PH3 MFC set to  0.000000
8/20/2012	10:52:22 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:52:22 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:52:22 AM	Tube furnace set to 0
8/20/2012	10:52:23 AM	Run finished at 10:52 AM
8/20/2012	10:52:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	10:56:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	10:56:05 AM	Recipe started at 10:56 AM
8/20/2012	10:56:05 AM	Helium valve closed
8/20/2012	10:56:05 AM	H2 valve closed
8/20/2012	10:56:05 AM	BCl3 valve closed
8/20/2012	10:56:05 AM	PH3 valve closed
8/20/2012	10:56:05 AM	SiCl4 pre valve closed
8/20/2012	10:56:05 AM	SiCl4 post valve closed
8/20/2012	10:56:05 AM	Main Vac valve closed
8/20/2012	10:56:05 AM	Bubbler valve closed
8/20/2012	10:56:05 AM	Bypass valve opened
8/20/2012	10:56:05 AM	Helium MFC set to  0.000000
8/20/2012	10:56:05 AM	H2 MFC set to  0.000000
8/20/2012	10:56:05 AM	BCl3 MFC set to  0.000000
8/20/2012	10:56:05 AM	PH3 MFC set to  0.000000
8/20/2012	10:56:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:56:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:56:05 AM	Tube furnace set to 0
8/20/2012	10:57:26 AM	Helium valve closed
8/20/2012	10:57:26 AM	H2 valve closed
8/20/2012	10:57:26 AM	BCl3 valve closed
8/20/2012	10:57:26 AM	PH3 valve closed
8/20/2012	10:57:26 AM	SiCl4 pre valve closed
8/20/2012	10:57:26 AM	SiCl4 post valve closed
8/20/2012	10:57:26 AM	Main Vac valve closed
8/20/2012	10:57:26 AM	Bubbler valve closed
8/20/2012	10:57:26 AM	Bypass valve opened
8/20/2012	10:57:26 AM	Helium MFC set to  0.000000
8/20/2012	10:57:26 AM	H2 MFC set to  0.000000
8/20/2012	10:57:26 AM	BCl3 MFC set to  0.000000
8/20/2012	10:57:26 AM	PH3 MFC set to  0.000000
8/20/2012	10:57:26 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:57:26 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:57:26 AM	Tube furnace set to 0
8/20/2012	10:58:26 AM	Helium valve closed
8/20/2012	10:58:26 AM	H2 valve closed
8/20/2012	10:58:26 AM	BCl3 valve closed
8/20/2012	10:58:26 AM	PH3 valve closed
8/20/2012	10:58:26 AM	SiCl4 pre valve closed
8/20/2012	10:58:26 AM	SiCl4 post valve closed
8/20/2012	10:58:26 AM	Bypass valve closed
8/20/2012	10:58:26 AM	Bubbler valve closed
8/20/2012	10:58:26 AM	Main Vac valve opened
8/20/2012	10:58:26 AM	Helium MFC set to  0.000000
8/20/2012	10:58:26 AM	H2 MFC set to  0.000000
8/20/2012	10:58:26 AM	BCl3 MFC set to  0.000000
8/20/2012	10:58:26 AM	PH3 MFC set to  0.000000
8/20/2012	10:58:26 AM	SiCl4 MFC set to  0.000000
8/20/2012	10:58:26 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:58:26 AM	Tube furnace set to 0
8/20/2012	10:58:27 AM	Run finished at 10:58 AM
8/20/2012	10:58:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	11:25:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	11:25:51 AM	Recipe started at 11:25 AM
8/20/2012	11:25:51 AM	Helium valve closed
8/20/2012	11:25:51 AM	H2 valve closed
8/20/2012	11:25:51 AM	BCl3 valve closed
8/20/2012	11:25:51 AM	PH3 valve closed
8/20/2012	11:25:51 AM	SiCl4 pre valve closed
8/20/2012	11:25:51 AM	SiCl4 post valve closed
8/20/2012	11:25:51 AM	Main Vac valve closed
8/20/2012	11:25:51 AM	Bubbler valve closed
8/20/2012	11:25:51 AM	Bypass valve opened
8/20/2012	11:25:51 AM	Helium MFC set to  0.000000
8/20/2012	11:25:51 AM	H2 MFC set to  0.000000
8/20/2012	11:25:51 AM	BCl3 MFC set to  0.000000
8/20/2012	11:25:51 AM	PH3 MFC set to  0.000000
8/20/2012	11:25:51 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:25:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:25:51 AM	Tube furnace set to 0
8/20/2012	11:25:51 AM	Helium valve closed
8/20/2012	11:25:51 AM	H2 valve closed
8/20/2012	11:25:51 AM	BCl3 valve closed
8/20/2012	11:25:51 AM	PH3 valve closed
8/20/2012	11:25:51 AM	SiCl4 pre valve closed
8/20/2012	11:25:51 AM	SiCl4 post valve closed
8/20/2012	11:25:51 AM	Main Vac valve closed
8/20/2012	11:25:51 AM	Bubbler valve closed
8/20/2012	11:25:51 AM	Bypass valve opened
8/20/2012	11:25:51 AM	Helium MFC set to  0.000000
8/20/2012	11:25:51 AM	H2 MFC set to  0.000000
8/20/2012	11:25:51 AM	BCl3 MFC set to  0.000000
8/20/2012	11:25:51 AM	PH3 MFC set to  0.000000
8/20/2012	11:25:51 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:25:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:25:52 AM	Tube furnace set to 0
8/20/2012	11:25:53 AM	Helium valve closed
8/20/2012	11:25:53 AM	H2 valve closed
8/20/2012	11:25:53 AM	BCl3 valve closed
8/20/2012	11:25:53 AM	PH3 valve closed
8/20/2012	11:25:53 AM	SiCl4 pre valve closed
8/20/2012	11:25:53 AM	SiCl4 post valve closed
8/20/2012	11:25:53 AM	Bypass valve closed
8/20/2012	11:25:53 AM	Bubbler valve closed
8/20/2012	11:25:53 AM	Main Vac valve opened
8/20/2012	11:25:53 AM	Helium MFC set to  0.000000
8/20/2012	11:25:53 AM	H2 MFC set to  0.000000
8/20/2012	11:25:53 AM	BCl3 MFC set to  0.000000
8/20/2012	11:25:53 AM	PH3 MFC set to  0.000000
8/20/2012	11:25:53 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:25:53 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:25:53 AM	Tube furnace set to 0
8/20/2012	11:26:23 AM	H2 valve closed
8/20/2012	11:26:23 AM	BCl3 valve closed
8/20/2012	11:26:23 AM	PH3 valve closed
8/20/2012	11:26:23 AM	SiCl4 pre valve closed
8/20/2012	11:26:23 AM	SiCl4 post valve closed
8/20/2012	11:26:23 AM	Bypass valve closed
8/20/2012	11:26:23 AM	Bubbler valve closed
8/20/2012	11:26:23 AM	Helium valve opened
8/20/2012	11:26:23 AM	Main Vac valve opened
8/20/2012	11:26:23 AM	Helium MFC set to  20.000000
8/20/2012	11:26:23 AM	H2 MFC set to  0.000000
8/20/2012	11:26:23 AM	BCl3 MFC set to  0.000000
8/20/2012	11:26:23 AM	PH3 MFC set to  0.000000
8/20/2012	11:26:23 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:26:23 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:26:23 AM	Tube furnace set to 0
8/20/2012	11:26:53 AM	Helium valve closed
8/20/2012	11:26:53 AM	H2 valve closed
8/20/2012	11:26:53 AM	BCl3 valve closed
8/20/2012	11:26:53 AM	PH3 valve closed
8/20/2012	11:26:53 AM	SiCl4 pre valve closed
8/20/2012	11:26:53 AM	SiCl4 post valve closed
8/20/2012	11:26:53 AM	Bypass valve closed
8/20/2012	11:26:53 AM	Bubbler valve closed
8/20/2012	11:26:53 AM	Main Vac valve opened
8/20/2012	11:26:53 AM	Helium MFC set to  0.000000
8/20/2012	11:26:53 AM	H2 MFC set to  0.000000
8/20/2012	11:26:53 AM	BCl3 MFC set to  0.000000
8/20/2012	11:26:53 AM	PH3 MFC set to  0.000000
8/20/2012	11:26:53 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:26:53 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:26:53 AM	Tube furnace set to 0
8/20/2012	11:27:23 AM	H2 valve closed
8/20/2012	11:27:23 AM	BCl3 valve closed
8/20/2012	11:27:23 AM	PH3 valve closed
8/20/2012	11:27:23 AM	SiCl4 pre valve closed
8/20/2012	11:27:23 AM	SiCl4 post valve closed
8/20/2012	11:27:23 AM	Bypass valve closed
8/20/2012	11:27:23 AM	Bubbler valve closed
8/20/2012	11:27:23 AM	Helium valve opened
8/20/2012	11:27:23 AM	Main Vac valve opened
8/20/2012	11:27:23 AM	Helium MFC set to  20.000000
8/20/2012	11:27:23 AM	H2 MFC set to  0.000000
8/20/2012	11:27:23 AM	BCl3 MFC set to  0.000000
8/20/2012	11:27:23 AM	PH3 MFC set to  0.000000
8/20/2012	11:27:23 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:27:23 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:27:23 AM	Tube furnace set to 0
8/20/2012	11:27:53 AM	Helium valve closed
8/20/2012	11:27:53 AM	H2 valve closed
8/20/2012	11:27:54 AM	BCl3 valve closed
8/20/2012	11:27:54 AM	PH3 valve closed
8/20/2012	11:27:54 AM	SiCl4 pre valve closed
8/20/2012	11:27:54 AM	SiCl4 post valve closed
8/20/2012	11:27:54 AM	Bypass valve closed
8/20/2012	11:27:54 AM	Bubbler valve closed
8/20/2012	11:27:54 AM	Main Vac valve opened
8/20/2012	11:27:54 AM	Helium MFC set to  0.000000
8/20/2012	11:27:54 AM	H2 MFC set to  0.000000
8/20/2012	11:27:54 AM	BCl3 MFC set to  0.000000
8/20/2012	11:27:54 AM	PH3 MFC set to  0.000000
8/20/2012	11:27:54 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:27:54 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:27:54 AM	Tube furnace set to 0
8/20/2012	11:28:24 AM	H2 valve closed
8/20/2012	11:28:24 AM	BCl3 valve closed
8/20/2012	11:28:24 AM	PH3 valve closed
8/20/2012	11:28:24 AM	SiCl4 pre valve closed
8/20/2012	11:28:24 AM	SiCl4 post valve closed
8/20/2012	11:28:24 AM	Bypass valve closed
8/20/2012	11:28:24 AM	Bubbler valve closed
8/20/2012	11:28:24 AM	Helium valve opened
8/20/2012	11:28:24 AM	Main Vac valve opened
8/20/2012	11:28:24 AM	Helium MFC set to  20.000000
8/20/2012	11:28:24 AM	H2 MFC set to  0.000000
8/20/2012	11:28:24 AM	BCl3 MFC set to  0.000000
8/20/2012	11:28:24 AM	PH3 MFC set to  0.000000
8/20/2012	11:28:24 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:28:24 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:28:24 AM	Tube furnace set to 0
8/20/2012	11:28:54 AM	Helium valve closed
8/20/2012	11:28:54 AM	H2 valve closed
8/20/2012	11:28:54 AM	BCl3 valve closed
8/20/2012	11:28:54 AM	PH3 valve closed
8/20/2012	11:28:54 AM	SiCl4 pre valve closed
8/20/2012	11:28:54 AM	SiCl4 post valve closed
8/20/2012	11:28:54 AM	Bypass valve closed
8/20/2012	11:28:54 AM	Bubbler valve closed
8/20/2012	11:28:54 AM	Main Vac valve opened
8/20/2012	11:28:54 AM	Helium MFC set to  0.000000
8/20/2012	11:28:54 AM	H2 MFC set to  0.000000
8/20/2012	11:28:54 AM	BCl3 MFC set to  0.000000
8/20/2012	11:28:54 AM	PH3 MFC set to  0.000000
8/20/2012	11:28:54 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:28:54 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:28:54 AM	Tube furnace set to 0
8/20/2012	11:29:24 AM	H2 valve closed
8/20/2012	11:29:24 AM	BCl3 valve closed
8/20/2012	11:29:24 AM	PH3 valve closed
8/20/2012	11:29:24 AM	SiCl4 pre valve closed
8/20/2012	11:29:24 AM	SiCl4 post valve closed
8/20/2012	11:29:24 AM	Bypass valve closed
8/20/2012	11:29:24 AM	Bubbler valve closed
8/20/2012	11:29:24 AM	Helium valve opened
8/20/2012	11:29:24 AM	Main Vac valve opened
8/20/2012	11:29:24 AM	Helium MFC set to  20.000000
8/20/2012	11:29:24 AM	H2 MFC set to  0.000000
8/20/2012	11:29:24 AM	BCl3 MFC set to  0.000000
8/20/2012	11:29:24 AM	PH3 MFC set to  0.000000
8/20/2012	11:29:24 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:29:24 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:29:24 AM	Tube furnace set to 0
8/20/2012	11:29:54 AM	Helium valve closed
8/20/2012	11:29:54 AM	H2 valve closed
8/20/2012	11:29:54 AM	BCl3 valve closed
8/20/2012	11:29:54 AM	PH3 valve closed
8/20/2012	11:29:54 AM	SiCl4 pre valve closed
8/20/2012	11:29:54 AM	SiCl4 post valve closed
8/20/2012	11:29:54 AM	Bypass valve closed
8/20/2012	11:29:54 AM	Bubbler valve closed
8/20/2012	11:29:54 AM	Main Vac valve opened
8/20/2012	11:29:54 AM	Helium MFC set to  0.000000
8/20/2012	11:29:54 AM	H2 MFC set to  0.000000
8/20/2012	11:29:54 AM	BCl3 MFC set to  0.000000
8/20/2012	11:29:54 AM	PH3 MFC set to  0.000000
8/20/2012	11:29:54 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:29:54 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:29:55 AM	Tube furnace set to 0
8/20/2012	11:30:25 AM	H2 valve closed
8/20/2012	11:30:25 AM	BCl3 valve closed
8/20/2012	11:30:25 AM	PH3 valve closed
8/20/2012	11:30:25 AM	SiCl4 pre valve closed
8/20/2012	11:30:25 AM	SiCl4 post valve closed
8/20/2012	11:30:25 AM	Bypass valve closed
8/20/2012	11:30:25 AM	Bubbler valve closed
8/20/2012	11:30:25 AM	Helium valve opened
8/20/2012	11:30:25 AM	Main Vac valve opened
8/20/2012	11:30:25 AM	Helium MFC set to  20.000000
8/20/2012	11:30:25 AM	H2 MFC set to  0.000000
8/20/2012	11:30:25 AM	BCl3 MFC set to  0.000000
8/20/2012	11:30:25 AM	PH3 MFC set to  0.000000
8/20/2012	11:30:25 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:30:25 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:30:25 AM	Tube furnace set to 0
8/20/2012	11:30:55 AM	Helium valve closed
8/20/2012	11:30:55 AM	H2 valve closed
8/20/2012	11:30:55 AM	BCl3 valve closed
8/20/2012	11:30:55 AM	PH3 valve closed
8/20/2012	11:30:55 AM	SiCl4 pre valve closed
8/20/2012	11:30:55 AM	SiCl4 post valve closed
8/20/2012	11:30:55 AM	Bypass valve closed
8/20/2012	11:30:55 AM	Bubbler valve closed
8/20/2012	11:30:55 AM	Main Vac valve opened
8/20/2012	11:30:55 AM	Helium MFC set to  0.000000
8/20/2012	11:30:55 AM	H2 MFC set to  0.000000
8/20/2012	11:30:55 AM	BCl3 MFC set to  0.000000
8/20/2012	11:30:55 AM	PH3 MFC set to  0.000000
8/20/2012	11:30:55 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:30:55 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:30:55 AM	Tube furnace set to 0
8/20/2012	11:31:25 AM	H2 valve closed
8/20/2012	11:31:25 AM	BCl3 valve closed
8/20/2012	11:31:25 AM	PH3 valve closed
8/20/2012	11:31:25 AM	SiCl4 pre valve closed
8/20/2012	11:31:25 AM	SiCl4 post valve closed
8/20/2012	11:31:25 AM	Bypass valve closed
8/20/2012	11:31:25 AM	Bubbler valve closed
8/20/2012	11:31:25 AM	Helium valve opened
8/20/2012	11:31:25 AM	Main Vac valve opened
8/20/2012	11:31:25 AM	Helium MFC set to  20.000000
8/20/2012	11:31:25 AM	H2 MFC set to  0.000000
8/20/2012	11:31:25 AM	BCl3 MFC set to  0.000000
8/20/2012	11:31:25 AM	PH3 MFC set to  0.000000
8/20/2012	11:31:25 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:31:25 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:31:25 AM	Tube furnace set to 0
8/20/2012	11:31:55 AM	Helium valve closed
8/20/2012	11:31:55 AM	H2 valve closed
8/20/2012	11:31:55 AM	BCl3 valve closed
8/20/2012	11:31:55 AM	PH3 valve closed
8/20/2012	11:31:55 AM	SiCl4 pre valve closed
8/20/2012	11:31:55 AM	SiCl4 post valve closed
8/20/2012	11:31:55 AM	Bypass valve closed
8/20/2012	11:31:55 AM	Bubbler valve closed
8/20/2012	11:31:55 AM	Main Vac valve opened
8/20/2012	11:31:55 AM	Helium MFC set to  0.000000
8/20/2012	11:31:55 AM	H2 MFC set to  0.000000
8/20/2012	11:31:55 AM	BCl3 MFC set to  0.000000
8/20/2012	11:31:55 AM	PH3 MFC set to  0.000000
8/20/2012	11:31:55 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:31:55 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:31:56 AM	Tube furnace set to 0
8/20/2012	11:32:26 AM	H2 valve closed
8/20/2012	11:32:26 AM	BCl3 valve closed
8/20/2012	11:32:26 AM	PH3 valve closed
8/20/2012	11:32:26 AM	SiCl4 pre valve closed
8/20/2012	11:32:26 AM	SiCl4 post valve closed
8/20/2012	11:32:26 AM	Bypass valve closed
8/20/2012	11:32:26 AM	Bubbler valve closed
8/20/2012	11:32:26 AM	Helium valve opened
8/20/2012	11:32:26 AM	Main Vac valve opened
8/20/2012	11:32:26 AM	Helium MFC set to  20.000000
8/20/2012	11:32:26 AM	H2 MFC set to  0.000000
8/20/2012	11:32:26 AM	BCl3 MFC set to  0.000000
8/20/2012	11:32:26 AM	PH3 MFC set to  0.000000
8/20/2012	11:32:26 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:32:26 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:32:26 AM	Tube furnace set to 0
8/20/2012	11:32:56 AM	Helium valve closed
8/20/2012	11:32:56 AM	H2 valve closed
8/20/2012	11:32:56 AM	BCl3 valve closed
8/20/2012	11:32:56 AM	PH3 valve closed
8/20/2012	11:32:56 AM	SiCl4 pre valve closed
8/20/2012	11:32:56 AM	SiCl4 post valve closed
8/20/2012	11:32:56 AM	Bypass valve closed
8/20/2012	11:32:56 AM	Bubbler valve closed
8/20/2012	11:32:56 AM	Main Vac valve opened
8/20/2012	11:32:56 AM	Helium MFC set to  0.000000
8/20/2012	11:32:56 AM	H2 MFC set to  0.000000
8/20/2012	11:32:56 AM	BCl3 MFC set to  0.000000
8/20/2012	11:32:56 AM	PH3 MFC set to  0.000000
8/20/2012	11:32:56 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:32:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:32:56 AM	Tube furnace set to 0
8/20/2012	11:33:26 AM	H2 valve closed
8/20/2012	11:33:26 AM	BCl3 valve closed
8/20/2012	11:33:26 AM	PH3 valve closed
8/20/2012	11:33:26 AM	SiCl4 pre valve closed
8/20/2012	11:33:26 AM	SiCl4 post valve closed
8/20/2012	11:33:26 AM	Bypass valve closed
8/20/2012	11:33:26 AM	Bubbler valve closed
8/20/2012	11:33:26 AM	Helium valve opened
8/20/2012	11:33:26 AM	Main Vac valve opened
8/20/2012	11:33:26 AM	Helium MFC set to  20.000000
8/20/2012	11:33:26 AM	H2 MFC set to  0.000000
8/20/2012	11:33:26 AM	BCl3 MFC set to  0.000000
8/20/2012	11:33:26 AM	PH3 MFC set to  0.000000
8/20/2012	11:33:26 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:33:26 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:33:26 AM	Tube furnace set to 0
8/20/2012	11:33:56 AM	Helium valve closed
8/20/2012	11:33:56 AM	H2 valve closed
8/20/2012	11:33:56 AM	BCl3 valve closed
8/20/2012	11:33:56 AM	PH3 valve closed
8/20/2012	11:33:56 AM	SiCl4 pre valve closed
8/20/2012	11:33:56 AM	SiCl4 post valve closed
8/20/2012	11:33:56 AM	Bypass valve closed
8/20/2012	11:33:56 AM	Bubbler valve closed
8/20/2012	11:33:56 AM	Main Vac valve opened
8/20/2012	11:33:56 AM	Helium MFC set to  0.000000
8/20/2012	11:33:56 AM	H2 MFC set to  0.000000
8/20/2012	11:33:56 AM	BCl3 MFC set to  0.000000
8/20/2012	11:33:56 AM	PH3 MFC set to  0.000000
8/20/2012	11:33:56 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:33:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:33:57 AM	Tube furnace set to 0
8/20/2012	11:34:27 AM	H2 valve closed
8/20/2012	11:34:27 AM	BCl3 valve closed
8/20/2012	11:34:27 AM	PH3 valve closed
8/20/2012	11:34:27 AM	SiCl4 pre valve closed
8/20/2012	11:34:27 AM	SiCl4 post valve closed
8/20/2012	11:34:27 AM	Bypass valve closed
8/20/2012	11:34:27 AM	Bubbler valve closed
8/20/2012	11:34:27 AM	Helium valve opened
8/20/2012	11:34:27 AM	Main Vac valve opened
8/20/2012	11:34:27 AM	Helium MFC set to  20.000000
8/20/2012	11:34:27 AM	H2 MFC set to  0.000000
8/20/2012	11:34:27 AM	BCl3 MFC set to  0.000000
8/20/2012	11:34:27 AM	PH3 MFC set to  0.000000
8/20/2012	11:34:27 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:34:27 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:34:27 AM	Tube furnace set to 0
8/20/2012	11:34:57 AM	Helium valve closed
8/20/2012	11:34:57 AM	H2 valve closed
8/20/2012	11:34:57 AM	BCl3 valve closed
8/20/2012	11:34:57 AM	PH3 valve closed
8/20/2012	11:34:57 AM	SiCl4 pre valve closed
8/20/2012	11:34:57 AM	SiCl4 post valve closed
8/20/2012	11:34:57 AM	Bypass valve closed
8/20/2012	11:34:57 AM	Bubbler valve closed
8/20/2012	11:34:57 AM	Main Vac valve opened
8/20/2012	11:34:57 AM	Helium MFC set to  0.000000
8/20/2012	11:34:57 AM	H2 MFC set to  0.000000
8/20/2012	11:34:57 AM	BCl3 MFC set to  0.000000
8/20/2012	11:34:57 AM	PH3 MFC set to  0.000000
8/20/2012	11:34:57 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:34:57 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:34:57 AM	Tube furnace set to 0
8/20/2012	11:35:27 AM	H2 valve closed
8/20/2012	11:35:27 AM	BCl3 valve closed
8/20/2012	11:35:27 AM	PH3 valve closed
8/20/2012	11:35:27 AM	SiCl4 pre valve closed
8/20/2012	11:35:27 AM	SiCl4 post valve closed
8/20/2012	11:35:27 AM	Bypass valve closed
8/20/2012	11:35:27 AM	Bubbler valve closed
8/20/2012	11:35:27 AM	Helium valve opened
8/20/2012	11:35:27 AM	Main Vac valve opened
8/20/2012	11:35:27 AM	Helium MFC set to  20.000000
8/20/2012	11:35:27 AM	H2 MFC set to  0.000000
8/20/2012	11:35:27 AM	BCl3 MFC set to  0.000000
8/20/2012	11:35:27 AM	PH3 MFC set to  0.000000
8/20/2012	11:35:27 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:35:27 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:35:27 AM	Tube furnace set to 0
8/20/2012	11:35:57 AM	Helium valve closed
8/20/2012	11:35:57 AM	H2 valve closed
8/20/2012	11:35:57 AM	BCl3 valve closed
8/20/2012	11:35:57 AM	PH3 valve closed
8/20/2012	11:35:57 AM	SiCl4 pre valve closed
8/20/2012	11:35:57 AM	SiCl4 post valve closed
8/20/2012	11:35:57 AM	Bypass valve closed
8/20/2012	11:35:57 AM	Bubbler valve closed
8/20/2012	11:35:57 AM	Main Vac valve opened
8/20/2012	11:35:57 AM	Helium MFC set to  0.000000
8/20/2012	11:35:57 AM	H2 MFC set to  0.000000
8/20/2012	11:35:57 AM	BCl3 MFC set to  0.000000
8/20/2012	11:35:57 AM	PH3 MFC set to  0.000000
8/20/2012	11:35:57 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:35:57 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:35:57 AM	Tube furnace set to 0
8/20/2012	11:35:58 AM	Run finished at 11:35 AM
8/20/2012	11:35:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	11:36:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	11:36:55 AM	Recipe started at 11:36 AM
8/20/2012	11:36:55 AM	Helium valve closed
8/20/2012	11:36:55 AM	H2 valve closed
8/20/2012	11:36:55 AM	BCl3 valve closed
8/20/2012	11:36:55 AM	PH3 valve closed
8/20/2012	11:36:55 AM	SiCl4 pre valve closed
8/20/2012	11:36:55 AM	SiCl4 post valve closed
8/20/2012	11:36:55 AM	Main Vac valve closed
8/20/2012	11:36:55 AM	Bubbler valve closed
8/20/2012	11:36:55 AM	Bypass valve opened
8/20/2012	11:36:55 AM	Helium MFC set to  0.000000
8/20/2012	11:36:55 AM	H2 MFC set to  0.000000
8/20/2012	11:36:55 AM	BCl3 MFC set to  0.000000
8/20/2012	11:36:55 AM	PH3 MFC set to  0.000000
8/20/2012	11:36:55 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:36:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:36:56 AM	Tube furnace set to 0
8/20/2012	11:36:56 AM	Helium valve closed
8/20/2012	11:36:56 AM	H2 valve closed
8/20/2012	11:36:56 AM	BCl3 valve closed
8/20/2012	11:36:56 AM	PH3 valve closed
8/20/2012	11:36:56 AM	SiCl4 pre valve closed
8/20/2012	11:36:56 AM	SiCl4 post valve closed
8/20/2012	11:36:56 AM	Main Vac valve closed
8/20/2012	11:36:56 AM	Bubbler valve closed
8/20/2012	11:36:56 AM	Bypass valve opened
8/20/2012	11:36:56 AM	Helium MFC set to  0.000000
8/20/2012	11:36:56 AM	H2 MFC set to  0.000000
8/20/2012	11:36:56 AM	BCl3 MFC set to  0.000000
8/20/2012	11:36:56 AM	PH3 MFC set to  0.000000
8/20/2012	11:36:56 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:36:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:36:56 AM	Tube furnace set to 0
8/20/2012	11:37:03 AM	Helium valve closed
8/20/2012	11:37:03 AM	H2 valve closed
8/20/2012	11:37:03 AM	BCl3 valve closed
8/20/2012	11:37:03 AM	PH3 valve closed
8/20/2012	11:37:03 AM	SiCl4 pre valve closed
8/20/2012	11:37:03 AM	SiCl4 post valve closed
8/20/2012	11:37:03 AM	Bypass valve closed
8/20/2012	11:37:03 AM	Bubbler valve closed
8/20/2012	11:37:03 AM	Main Vac valve opened
8/20/2012	11:37:03 AM	Helium MFC set to  0.000000
8/20/2012	11:37:03 AM	H2 MFC set to  0.000000
8/20/2012	11:37:03 AM	BCl3 MFC set to  0.000000
8/20/2012	11:37:03 AM	PH3 MFC set to  0.000000
8/20/2012	11:37:03 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:37:03 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:37:03 AM	Tube furnace set to 0
8/20/2012	11:37:33 AM	H2 valve closed
8/20/2012	11:37:33 AM	BCl3 valve closed
8/20/2012	11:37:33 AM	PH3 valve closed
8/20/2012	11:37:33 AM	SiCl4 pre valve closed
8/20/2012	11:37:33 AM	SiCl4 post valve closed
8/20/2012	11:37:33 AM	Bypass valve closed
8/20/2012	11:37:33 AM	Bubbler valve closed
8/20/2012	11:37:33 AM	Helium valve opened
8/20/2012	11:37:33 AM	Main Vac valve opened
8/20/2012	11:37:33 AM	Helium MFC set to  20.000000
8/20/2012	11:37:33 AM	H2 MFC set to  0.000000
8/20/2012	11:37:33 AM	BCl3 MFC set to  0.000000
8/20/2012	11:37:33 AM	PH3 MFC set to  0.000000
8/20/2012	11:37:33 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:37:33 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:37:33 AM	Tube furnace set to 0
8/20/2012	11:38:03 AM	Helium valve closed
8/20/2012	11:38:03 AM	H2 valve closed
8/20/2012	11:38:03 AM	BCl3 valve closed
8/20/2012	11:38:03 AM	PH3 valve closed
8/20/2012	11:38:03 AM	SiCl4 pre valve closed
8/20/2012	11:38:03 AM	SiCl4 post valve closed
8/20/2012	11:38:03 AM	Bypass valve closed
8/20/2012	11:38:03 AM	Bubbler valve closed
8/20/2012	11:38:03 AM	Main Vac valve opened
8/20/2012	11:38:03 AM	Helium MFC set to  0.000000
8/20/2012	11:38:03 AM	H2 MFC set to  0.000000
8/20/2012	11:38:03 AM	BCl3 MFC set to  0.000000
8/20/2012	11:38:03 AM	PH3 MFC set to  0.000000
8/20/2012	11:38:03 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:38:03 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:38:03 AM	Tube furnace set to 0
8/20/2012	11:38:33 AM	H2 valve closed
8/20/2012	11:38:33 AM	BCl3 valve closed
8/20/2012	11:38:33 AM	PH3 valve closed
8/20/2012	11:38:33 AM	SiCl4 pre valve closed
8/20/2012	11:38:33 AM	SiCl4 post valve closed
8/20/2012	11:38:33 AM	Bypass valve closed
8/20/2012	11:38:33 AM	Bubbler valve closed
8/20/2012	11:38:33 AM	Helium valve opened
8/20/2012	11:38:33 AM	Main Vac valve opened
8/20/2012	11:38:33 AM	Helium MFC set to  20.000000
8/20/2012	11:38:33 AM	H2 MFC set to  0.000000
8/20/2012	11:38:33 AM	BCl3 MFC set to  0.000000
8/20/2012	11:38:33 AM	PH3 MFC set to  0.000000
8/20/2012	11:38:33 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:38:33 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:38:34 AM	Tube furnace set to 0
8/20/2012	11:39:04 AM	Helium valve closed
8/20/2012	11:39:04 AM	H2 valve closed
8/20/2012	11:39:04 AM	BCl3 valve closed
8/20/2012	11:39:04 AM	PH3 valve closed
8/20/2012	11:39:04 AM	SiCl4 pre valve closed
8/20/2012	11:39:04 AM	SiCl4 post valve closed
8/20/2012	11:39:04 AM	Bypass valve closed
8/20/2012	11:39:04 AM	Bubbler valve closed
8/20/2012	11:39:04 AM	Main Vac valve opened
8/20/2012	11:39:04 AM	Helium MFC set to  0.000000
8/20/2012	11:39:04 AM	H2 MFC set to  0.000000
8/20/2012	11:39:04 AM	BCl3 MFC set to  0.000000
8/20/2012	11:39:04 AM	PH3 MFC set to  0.000000
8/20/2012	11:39:04 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:39:04 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:39:04 AM	Tube furnace set to 0
8/20/2012	11:39:34 AM	H2 valve closed
8/20/2012	11:39:34 AM	BCl3 valve closed
8/20/2012	11:39:34 AM	PH3 valve closed
8/20/2012	11:39:34 AM	SiCl4 pre valve closed
8/20/2012	11:39:34 AM	SiCl4 post valve closed
8/20/2012	11:39:34 AM	Bypass valve closed
8/20/2012	11:39:34 AM	Bubbler valve closed
8/20/2012	11:39:34 AM	Helium valve opened
8/20/2012	11:39:34 AM	Main Vac valve opened
8/20/2012	11:39:34 AM	Helium MFC set to  20.000000
8/20/2012	11:39:34 AM	H2 MFC set to  0.000000
8/20/2012	11:39:34 AM	BCl3 MFC set to  0.000000
8/20/2012	11:39:34 AM	PH3 MFC set to  0.000000
8/20/2012	11:39:34 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:39:34 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:39:34 AM	Tube furnace set to 0
8/20/2012	11:40:04 AM	Helium valve closed
8/20/2012	11:40:04 AM	H2 valve closed
8/20/2012	11:40:04 AM	BCl3 valve closed
8/20/2012	11:40:04 AM	PH3 valve closed
8/20/2012	11:40:04 AM	SiCl4 pre valve closed
8/20/2012	11:40:04 AM	SiCl4 post valve closed
8/20/2012	11:40:04 AM	Bypass valve closed
8/20/2012	11:40:04 AM	Bubbler valve closed
8/20/2012	11:40:04 AM	Main Vac valve opened
8/20/2012	11:40:04 AM	Helium MFC set to  0.000000
8/20/2012	11:40:04 AM	H2 MFC set to  0.000000
8/20/2012	11:40:04 AM	BCl3 MFC set to  0.000000
8/20/2012	11:40:04 AM	PH3 MFC set to  0.000000
8/20/2012	11:40:04 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:40:04 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:40:04 AM	Tube furnace set to 0
8/20/2012	11:40:34 AM	H2 valve closed
8/20/2012	11:40:34 AM	BCl3 valve closed
8/20/2012	11:40:34 AM	PH3 valve closed
8/20/2012	11:40:34 AM	SiCl4 pre valve closed
8/20/2012	11:40:34 AM	SiCl4 post valve closed
8/20/2012	11:40:34 AM	Bypass valve closed
8/20/2012	11:40:34 AM	Bubbler valve closed
8/20/2012	11:40:34 AM	Helium valve opened
8/20/2012	11:40:34 AM	Main Vac valve opened
8/20/2012	11:40:34 AM	Helium MFC set to  20.000000
8/20/2012	11:40:34 AM	H2 MFC set to  0.000000
8/20/2012	11:40:34 AM	BCl3 MFC set to  0.000000
8/20/2012	11:40:34 AM	PH3 MFC set to  0.000000
8/20/2012	11:40:34 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:40:34 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:40:35 AM	Tube furnace set to 0
8/20/2012	11:41:05 AM	Helium valve closed
8/20/2012	11:41:05 AM	H2 valve closed
8/20/2012	11:41:05 AM	BCl3 valve closed
8/20/2012	11:41:05 AM	PH3 valve closed
8/20/2012	11:41:05 AM	SiCl4 pre valve closed
8/20/2012	11:41:05 AM	SiCl4 post valve closed
8/20/2012	11:41:05 AM	Bypass valve closed
8/20/2012	11:41:05 AM	Bubbler valve closed
8/20/2012	11:41:05 AM	Main Vac valve opened
8/20/2012	11:41:05 AM	Helium MFC set to  0.000000
8/20/2012	11:41:05 AM	H2 MFC set to  0.000000
8/20/2012	11:41:05 AM	BCl3 MFC set to  0.000000
8/20/2012	11:41:05 AM	PH3 MFC set to  0.000000
8/20/2012	11:41:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:41:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:41:05 AM	Tube furnace set to 0
8/20/2012	11:41:35 AM	H2 valve closed
8/20/2012	11:41:35 AM	BCl3 valve closed
8/20/2012	11:41:35 AM	PH3 valve closed
8/20/2012	11:41:35 AM	SiCl4 pre valve closed
8/20/2012	11:41:35 AM	SiCl4 post valve closed
8/20/2012	11:41:35 AM	Bypass valve closed
8/20/2012	11:41:35 AM	Bubbler valve closed
8/20/2012	11:41:35 AM	Helium valve opened
8/20/2012	11:41:35 AM	Main Vac valve opened
8/20/2012	11:41:35 AM	Helium MFC set to  20.000000
8/20/2012	11:41:35 AM	H2 MFC set to  0.000000
8/20/2012	11:41:35 AM	BCl3 MFC set to  0.000000
8/20/2012	11:41:35 AM	PH3 MFC set to  0.000000
8/20/2012	11:41:35 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:41:35 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:41:35 AM	Tube furnace set to 0
8/20/2012	11:42:05 AM	Helium valve closed
8/20/2012	11:42:05 AM	H2 valve closed
8/20/2012	11:42:05 AM	BCl3 valve closed
8/20/2012	11:42:05 AM	PH3 valve closed
8/20/2012	11:42:05 AM	SiCl4 pre valve closed
8/20/2012	11:42:05 AM	SiCl4 post valve closed
8/20/2012	11:42:05 AM	Bypass valve closed
8/20/2012	11:42:05 AM	Bubbler valve closed
8/20/2012	11:42:05 AM	Main Vac valve opened
8/20/2012	11:42:05 AM	Helium MFC set to  0.000000
8/20/2012	11:42:05 AM	H2 MFC set to  0.000000
8/20/2012	11:42:05 AM	BCl3 MFC set to  0.000000
8/20/2012	11:42:05 AM	PH3 MFC set to  0.000000
8/20/2012	11:42:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:42:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:42:05 AM	Tube furnace set to 0
8/20/2012	11:42:35 AM	H2 valve closed
8/20/2012	11:42:35 AM	BCl3 valve closed
8/20/2012	11:42:35 AM	PH3 valve closed
8/20/2012	11:42:35 AM	SiCl4 pre valve closed
8/20/2012	11:42:35 AM	SiCl4 post valve closed
8/20/2012	11:42:35 AM	Bypass valve closed
8/20/2012	11:42:35 AM	Bubbler valve closed
8/20/2012	11:42:35 AM	Helium valve opened
8/20/2012	11:42:35 AM	Main Vac valve opened
8/20/2012	11:42:35 AM	Helium MFC set to  20.000000
8/20/2012	11:42:35 AM	H2 MFC set to  0.000000
8/20/2012	11:42:35 AM	BCl3 MFC set to  0.000000
8/20/2012	11:42:35 AM	PH3 MFC set to  0.000000
8/20/2012	11:42:35 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:42:35 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:42:35 AM	Tube furnace set to 0
8/20/2012	11:43:05 AM	Helium valve closed
8/20/2012	11:43:05 AM	H2 valve closed
8/20/2012	11:43:05 AM	BCl3 valve closed
8/20/2012	11:43:05 AM	PH3 valve closed
8/20/2012	11:43:06 AM	SiCl4 pre valve closed
8/20/2012	11:43:06 AM	SiCl4 post valve closed
8/20/2012	11:43:06 AM	Bypass valve closed
8/20/2012	11:43:06 AM	Bubbler valve closed
8/20/2012	11:43:06 AM	Main Vac valve opened
8/20/2012	11:43:06 AM	Helium MFC set to  0.000000
8/20/2012	11:43:06 AM	H2 MFC set to  0.000000
8/20/2012	11:43:06 AM	BCl3 MFC set to  0.000000
8/20/2012	11:43:06 AM	PH3 MFC set to  0.000000
8/20/2012	11:43:06 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:43:06 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:43:06 AM	Tube furnace set to 0
8/20/2012	11:43:36 AM	H2 valve closed
8/20/2012	11:43:36 AM	BCl3 valve closed
8/20/2012	11:43:36 AM	PH3 valve closed
8/20/2012	11:43:36 AM	SiCl4 pre valve closed
8/20/2012	11:43:36 AM	SiCl4 post valve closed
8/20/2012	11:43:36 AM	Bypass valve closed
8/20/2012	11:43:36 AM	Bubbler valve closed
8/20/2012	11:43:36 AM	Helium valve opened
8/20/2012	11:43:36 AM	Main Vac valve opened
8/20/2012	11:43:36 AM	Helium MFC set to  20.000000
8/20/2012	11:43:36 AM	H2 MFC set to  0.000000
8/20/2012	11:43:36 AM	BCl3 MFC set to  0.000000
8/20/2012	11:43:36 AM	PH3 MFC set to  0.000000
8/20/2012	11:43:36 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:43:36 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:43:36 AM	Tube furnace set to 0
8/20/2012	11:44:06 AM	Helium valve closed
8/20/2012	11:44:06 AM	H2 valve closed
8/20/2012	11:44:06 AM	BCl3 valve closed
8/20/2012	11:44:06 AM	PH3 valve closed
8/20/2012	11:44:06 AM	SiCl4 pre valve closed
8/20/2012	11:44:06 AM	SiCl4 post valve closed
8/20/2012	11:44:06 AM	Bypass valve closed
8/20/2012	11:44:06 AM	Bubbler valve closed
8/20/2012	11:44:06 AM	Main Vac valve opened
8/20/2012	11:44:06 AM	Helium MFC set to  0.000000
8/20/2012	11:44:06 AM	H2 MFC set to  0.000000
8/20/2012	11:44:06 AM	BCl3 MFC set to  0.000000
8/20/2012	11:44:06 AM	PH3 MFC set to  0.000000
8/20/2012	11:44:06 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:44:06 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:44:06 AM	Tube furnace set to 0
8/20/2012	11:44:36 AM	H2 valve closed
8/20/2012	11:44:36 AM	BCl3 valve closed
8/20/2012	11:44:36 AM	PH3 valve closed
8/20/2012	11:44:36 AM	SiCl4 pre valve closed
8/20/2012	11:44:36 AM	SiCl4 post valve closed
8/20/2012	11:44:36 AM	Bypass valve closed
8/20/2012	11:44:36 AM	Bubbler valve closed
8/20/2012	11:44:36 AM	Helium valve opened
8/20/2012	11:44:36 AM	Main Vac valve opened
8/20/2012	11:44:36 AM	Helium MFC set to  20.000000
8/20/2012	11:44:36 AM	H2 MFC set to  0.000000
8/20/2012	11:44:36 AM	BCl3 MFC set to  0.000000
8/20/2012	11:44:36 AM	PH3 MFC set to  0.000000
8/20/2012	11:44:36 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:44:36 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:44:37 AM	Tube furnace set to 0
8/20/2012	11:45:07 AM	Helium valve closed
8/20/2012	11:45:07 AM	H2 valve closed
8/20/2012	11:45:07 AM	BCl3 valve closed
8/20/2012	11:45:07 AM	PH3 valve closed
8/20/2012	11:45:07 AM	SiCl4 pre valve closed
8/20/2012	11:45:07 AM	SiCl4 post valve closed
8/20/2012	11:45:07 AM	Bypass valve closed
8/20/2012	11:45:07 AM	Bubbler valve closed
8/20/2012	11:45:07 AM	Main Vac valve opened
8/20/2012	11:45:07 AM	Helium MFC set to  0.000000
8/20/2012	11:45:07 AM	H2 MFC set to  0.000000
8/20/2012	11:45:07 AM	BCl3 MFC set to  0.000000
8/20/2012	11:45:07 AM	PH3 MFC set to  0.000000
8/20/2012	11:45:07 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:45:07 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:45:07 AM	Tube furnace set to 0
8/20/2012	11:45:37 AM	H2 valve closed
8/20/2012	11:45:37 AM	BCl3 valve closed
8/20/2012	11:45:37 AM	PH3 valve closed
8/20/2012	11:45:37 AM	SiCl4 pre valve closed
8/20/2012	11:45:37 AM	SiCl4 post valve closed
8/20/2012	11:45:37 AM	Bypass valve closed
8/20/2012	11:45:37 AM	Bubbler valve closed
8/20/2012	11:45:37 AM	Helium valve opened
8/20/2012	11:45:37 AM	Main Vac valve opened
8/20/2012	11:45:37 AM	Helium MFC set to  20.000000
8/20/2012	11:45:37 AM	H2 MFC set to  0.000000
8/20/2012	11:45:37 AM	BCl3 MFC set to  0.000000
8/20/2012	11:45:37 AM	PH3 MFC set to  0.000000
8/20/2012	11:45:37 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:45:37 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:45:37 AM	Tube furnace set to 0
8/20/2012	11:46:07 AM	Helium valve closed
8/20/2012	11:46:07 AM	H2 valve closed
8/20/2012	11:46:07 AM	BCl3 valve closed
8/20/2012	11:46:07 AM	PH3 valve closed
8/20/2012	11:46:07 AM	SiCl4 pre valve closed
8/20/2012	11:46:07 AM	SiCl4 post valve closed
8/20/2012	11:46:07 AM	Bypass valve closed
8/20/2012	11:46:07 AM	Bubbler valve closed
8/20/2012	11:46:07 AM	Main Vac valve opened
8/20/2012	11:46:07 AM	Helium MFC set to  0.000000
8/20/2012	11:46:07 AM	H2 MFC set to  0.000000
8/20/2012	11:46:07 AM	BCl3 MFC set to  0.000000
8/20/2012	11:46:07 AM	PH3 MFC set to  0.000000
8/20/2012	11:46:07 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:46:07 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:46:07 AM	Tube furnace set to 0
8/20/2012	11:46:37 AM	H2 valve closed
8/20/2012	11:46:37 AM	BCl3 valve closed
8/20/2012	11:46:37 AM	PH3 valve closed
8/20/2012	11:46:37 AM	SiCl4 pre valve closed
8/20/2012	11:46:37 AM	SiCl4 post valve closed
8/20/2012	11:46:37 AM	Bypass valve closed
8/20/2012	11:46:37 AM	Bubbler valve closed
8/20/2012	11:46:37 AM	Helium valve opened
8/20/2012	11:46:37 AM	Main Vac valve opened
8/20/2012	11:46:37 AM	Helium MFC set to  20.000000
8/20/2012	11:46:37 AM	H2 MFC set to  0.000000
8/20/2012	11:46:37 AM	BCl3 MFC set to  0.000000
8/20/2012	11:46:37 AM	PH3 MFC set to  0.000000
8/20/2012	11:46:37 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:46:37 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:46:37 AM	Tube furnace set to 0
8/20/2012	11:47:07 AM	Helium valve closed
8/20/2012	11:47:07 AM	H2 valve closed
8/20/2012	11:47:07 AM	BCl3 valve closed
8/20/2012	11:47:07 AM	PH3 valve closed
8/20/2012	11:47:07 AM	SiCl4 pre valve closed
8/20/2012	11:47:07 AM	SiCl4 post valve closed
8/20/2012	11:47:08 AM	Bypass valve closed
8/20/2012	11:47:08 AM	Bubbler valve closed
8/20/2012	11:47:08 AM	Main Vac valve opened
8/20/2012	11:47:08 AM	Helium MFC set to  0.000000
8/20/2012	11:47:08 AM	H2 MFC set to  0.000000
8/20/2012	11:47:08 AM	BCl3 MFC set to  0.000000
8/20/2012	11:47:08 AM	PH3 MFC set to  0.000000
8/20/2012	11:47:08 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:47:08 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:47:08 AM	Tube furnace set to 0
8/20/2012	11:47:09 AM	Run finished at 11:47 AM
8/20/2012	11:47:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	11:47:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	11:48:01 AM	Recipe started at 11:47 AM
8/20/2012	11:48:01 AM	Helium valve closed
8/20/2012	11:48:01 AM	H2 valve closed
8/20/2012	11:48:01 AM	BCl3 valve closed
8/20/2012	11:48:01 AM	PH3 valve closed
8/20/2012	11:48:01 AM	SiCl4 pre valve closed
8/20/2012	11:48:01 AM	SiCl4 post valve closed
8/20/2012	11:48:01 AM	Main Vac valve closed
8/20/2012	11:48:01 AM	Bubbler valve closed
8/20/2012	11:48:01 AM	Bypass valve opened
8/20/2012	11:48:01 AM	Helium MFC set to  0.000000
8/20/2012	11:48:01 AM	H2 MFC set to  0.000000
8/20/2012	11:48:01 AM	BCl3 MFC set to  0.000000
8/20/2012	11:48:01 AM	PH3 MFC set to  0.000000
8/20/2012	11:48:01 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:48:01 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:48:01 AM	Tube furnace set to 0
8/20/2012	11:48:02 AM	Helium valve closed
8/20/2012	11:48:02 AM	H2 valve closed
8/20/2012	11:48:02 AM	BCl3 valve closed
8/20/2012	11:48:02 AM	PH3 valve closed
8/20/2012	11:48:02 AM	SiCl4 pre valve closed
8/20/2012	11:48:02 AM	SiCl4 post valve closed
8/20/2012	11:48:02 AM	Main Vac valve closed
8/20/2012	11:48:02 AM	Bubbler valve closed
8/20/2012	11:48:02 AM	Bypass valve opened
8/20/2012	11:48:02 AM	Helium MFC set to  0.000000
8/20/2012	11:48:02 AM	H2 MFC set to  0.000000
8/20/2012	11:48:02 AM	BCl3 MFC set to  0.000000
8/20/2012	11:48:02 AM	PH3 MFC set to  0.000000
8/20/2012	11:48:02 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:48:02 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:48:02 AM	Tube furnace set to 0
8/20/2012	11:48:02 AM	Helium valve closed
8/20/2012	11:48:02 AM	H2 valve closed
8/20/2012	11:48:02 AM	BCl3 valve closed
8/20/2012	11:48:02 AM	PH3 valve closed
8/20/2012	11:48:02 AM	SiCl4 pre valve closed
8/20/2012	11:48:02 AM	SiCl4 post valve closed
8/20/2012	11:48:02 AM	Bypass valve closed
8/20/2012	11:48:03 AM	Bubbler valve closed
8/20/2012	11:48:03 AM	Main Vac valve opened
8/20/2012	11:48:03 AM	Helium MFC set to  0.000000
8/20/2012	11:48:03 AM	H2 MFC set to  0.000000
8/20/2012	11:48:03 AM	BCl3 MFC set to  0.000000
8/20/2012	11:48:03 AM	PH3 MFC set to  0.000000
8/20/2012	11:48:03 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:48:03 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:48:03 AM	Tube furnace set to 0
8/20/2012	11:48:33 AM	H2 valve closed
8/20/2012	11:48:33 AM	BCl3 valve closed
8/20/2012	11:48:33 AM	PH3 valve closed
8/20/2012	11:48:33 AM	SiCl4 pre valve closed
8/20/2012	11:48:33 AM	SiCl4 post valve closed
8/20/2012	11:48:33 AM	Bypass valve closed
8/20/2012	11:48:33 AM	Bubbler valve closed
8/20/2012	11:48:33 AM	Helium valve opened
8/20/2012	11:48:33 AM	Main Vac valve opened
8/20/2012	11:48:33 AM	Helium MFC set to  20.000000
8/20/2012	11:48:33 AM	H2 MFC set to  0.000000
8/20/2012	11:48:33 AM	BCl3 MFC set to  0.000000
8/20/2012	11:48:33 AM	PH3 MFC set to  0.000000
8/20/2012	11:48:33 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:48:33 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:48:33 AM	Tube furnace set to 0
8/20/2012	11:49:03 AM	Helium valve closed
8/20/2012	11:49:03 AM	H2 valve closed
8/20/2012	11:49:03 AM	BCl3 valve closed
8/20/2012	11:49:03 AM	PH3 valve closed
8/20/2012	11:49:03 AM	SiCl4 pre valve closed
8/20/2012	11:49:03 AM	SiCl4 post valve closed
8/20/2012	11:49:03 AM	Bypass valve closed
8/20/2012	11:49:03 AM	Bubbler valve closed
8/20/2012	11:49:03 AM	Main Vac valve opened
8/20/2012	11:49:03 AM	Helium MFC set to  0.000000
8/20/2012	11:49:03 AM	H2 MFC set to  0.000000
8/20/2012	11:49:03 AM	BCl3 MFC set to  0.000000
8/20/2012	11:49:03 AM	PH3 MFC set to  0.000000
8/20/2012	11:49:03 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:49:03 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:49:03 AM	Tube furnace set to 0
8/20/2012	11:49:33 AM	H2 valve closed
8/20/2012	11:49:33 AM	BCl3 valve closed
8/20/2012	11:49:33 AM	PH3 valve closed
8/20/2012	11:49:33 AM	SiCl4 pre valve closed
8/20/2012	11:49:33 AM	SiCl4 post valve closed
8/20/2012	11:49:33 AM	Bypass valve closed
8/20/2012	11:49:33 AM	Bubbler valve closed
8/20/2012	11:49:33 AM	Helium valve opened
8/20/2012	11:49:33 AM	Main Vac valve opened
8/20/2012	11:49:33 AM	Helium MFC set to  20.000000
8/20/2012	11:49:33 AM	H2 MFC set to  0.000000
8/20/2012	11:49:33 AM	BCl3 MFC set to  0.000000
8/20/2012	11:49:33 AM	PH3 MFC set to  0.000000
8/20/2012	11:49:33 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:49:33 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:49:33 AM	Tube furnace set to 0
8/20/2012	11:50:03 AM	Helium valve closed
8/20/2012	11:50:03 AM	H2 valve closed
8/20/2012	11:50:03 AM	BCl3 valve closed
8/20/2012	11:50:03 AM	PH3 valve closed
8/20/2012	11:50:03 AM	SiCl4 pre valve closed
8/20/2012	11:50:03 AM	SiCl4 post valve closed
8/20/2012	11:50:03 AM	Bypass valve closed
8/20/2012	11:50:03 AM	Bubbler valve closed
8/20/2012	11:50:03 AM	Main Vac valve opened
8/20/2012	11:50:03 AM	Helium MFC set to  0.000000
8/20/2012	11:50:03 AM	H2 MFC set to  0.000000
8/20/2012	11:50:03 AM	BCl3 MFC set to  0.000000
8/20/2012	11:50:03 AM	PH3 MFC set to  0.000000
8/20/2012	11:50:03 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:50:03 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:50:04 AM	Tube furnace set to 0
8/20/2012	11:50:34 AM	H2 valve closed
8/20/2012	11:50:34 AM	BCl3 valve closed
8/20/2012	11:50:34 AM	PH3 valve closed
8/20/2012	11:50:34 AM	SiCl4 pre valve closed
8/20/2012	11:50:34 AM	SiCl4 post valve closed
8/20/2012	11:50:34 AM	Bypass valve closed
8/20/2012	11:50:34 AM	Bubbler valve closed
8/20/2012	11:50:34 AM	Helium valve opened
8/20/2012	11:50:34 AM	Main Vac valve opened
8/20/2012	11:50:34 AM	Helium MFC set to  20.000000
8/20/2012	11:50:34 AM	H2 MFC set to  0.000000
8/20/2012	11:50:34 AM	BCl3 MFC set to  0.000000
8/20/2012	11:50:34 AM	PH3 MFC set to  0.000000
8/20/2012	11:50:34 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:50:34 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:50:34 AM	Tube furnace set to 0
8/20/2012	11:51:04 AM	Helium valve closed
8/20/2012	11:51:04 AM	H2 valve closed
8/20/2012	11:51:04 AM	BCl3 valve closed
8/20/2012	11:51:04 AM	PH3 valve closed
8/20/2012	11:51:04 AM	SiCl4 pre valve closed
8/20/2012	11:51:04 AM	SiCl4 post valve closed
8/20/2012	11:51:04 AM	Bypass valve closed
8/20/2012	11:51:04 AM	Bubbler valve closed
8/20/2012	11:51:04 AM	Main Vac valve opened
8/20/2012	11:51:04 AM	Helium MFC set to  0.000000
8/20/2012	11:51:04 AM	H2 MFC set to  0.000000
8/20/2012	11:51:04 AM	BCl3 MFC set to  0.000000
8/20/2012	11:51:04 AM	PH3 MFC set to  0.000000
8/20/2012	11:51:04 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:51:04 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:51:04 AM	Tube furnace set to 0
8/20/2012	11:51:34 AM	H2 valve closed
8/20/2012	11:51:34 AM	BCl3 valve closed
8/20/2012	11:51:34 AM	PH3 valve closed
8/20/2012	11:51:34 AM	SiCl4 pre valve closed
8/20/2012	11:51:34 AM	SiCl4 post valve closed
8/20/2012	11:51:34 AM	Bypass valve closed
8/20/2012	11:51:34 AM	Bubbler valve closed
8/20/2012	11:51:34 AM	Helium valve opened
8/20/2012	11:51:34 AM	Main Vac valve opened
8/20/2012	11:51:34 AM	Helium MFC set to  20.000000
8/20/2012	11:51:34 AM	H2 MFC set to  0.000000
8/20/2012	11:51:34 AM	BCl3 MFC set to  0.000000
8/20/2012	11:51:34 AM	PH3 MFC set to  0.000000
8/20/2012	11:51:34 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:51:34 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:51:34 AM	Tube furnace set to 0
8/20/2012	11:52:04 AM	Helium valve closed
8/20/2012	11:52:04 AM	H2 valve closed
8/20/2012	11:52:04 AM	BCl3 valve closed
8/20/2012	11:52:04 AM	PH3 valve closed
8/20/2012	11:52:04 AM	SiCl4 pre valve closed
8/20/2012	11:52:04 AM	SiCl4 post valve closed
8/20/2012	11:52:04 AM	Bypass valve closed
8/20/2012	11:52:04 AM	Bubbler valve closed
8/20/2012	11:52:04 AM	Main Vac valve opened
8/20/2012	11:52:04 AM	Helium MFC set to  0.000000
8/20/2012	11:52:04 AM	H2 MFC set to  0.000000
8/20/2012	11:52:04 AM	BCl3 MFC set to  0.000000
8/20/2012	11:52:04 AM	PH3 MFC set to  0.000000
8/20/2012	11:52:04 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:52:04 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:52:05 AM	Tube furnace set to 0
8/20/2012	11:52:35 AM	H2 valve closed
8/20/2012	11:52:35 AM	BCl3 valve closed
8/20/2012	11:52:35 AM	PH3 valve closed
8/20/2012	11:52:35 AM	SiCl4 pre valve closed
8/20/2012	11:52:35 AM	SiCl4 post valve closed
8/20/2012	11:52:35 AM	Bypass valve closed
8/20/2012	11:52:35 AM	Bubbler valve closed
8/20/2012	11:52:35 AM	Helium valve opened
8/20/2012	11:52:35 AM	Main Vac valve opened
8/20/2012	11:52:35 AM	Helium MFC set to  20.000000
8/20/2012	11:52:35 AM	H2 MFC set to  0.000000
8/20/2012	11:52:35 AM	BCl3 MFC set to  0.000000
8/20/2012	11:52:35 AM	PH3 MFC set to  0.000000
8/20/2012	11:52:35 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:52:35 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:52:35 AM	Tube furnace set to 0
8/20/2012	11:53:05 AM	Helium valve closed
8/20/2012	11:53:05 AM	H2 valve closed
8/20/2012	11:53:05 AM	BCl3 valve closed
8/20/2012	11:53:05 AM	PH3 valve closed
8/20/2012	11:53:05 AM	SiCl4 pre valve closed
8/20/2012	11:53:05 AM	SiCl4 post valve closed
8/20/2012	11:53:05 AM	Bypass valve closed
8/20/2012	11:53:05 AM	Bubbler valve closed
8/20/2012	11:53:05 AM	Main Vac valve opened
8/20/2012	11:53:05 AM	Helium MFC set to  0.000000
8/20/2012	11:53:05 AM	H2 MFC set to  0.000000
8/20/2012	11:53:05 AM	BCl3 MFC set to  0.000000
8/20/2012	11:53:05 AM	PH3 MFC set to  0.000000
8/20/2012	11:53:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:53:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:53:05 AM	Tube furnace set to 0
8/20/2012	11:53:35 AM	H2 valve closed
8/20/2012	11:53:35 AM	BCl3 valve closed
8/20/2012	11:53:35 AM	PH3 valve closed
8/20/2012	11:53:35 AM	SiCl4 pre valve closed
8/20/2012	11:53:35 AM	SiCl4 post valve closed
8/20/2012	11:53:35 AM	Bypass valve closed
8/20/2012	11:53:35 AM	Bubbler valve closed
8/20/2012	11:53:35 AM	Helium valve opened
8/20/2012	11:53:35 AM	Main Vac valve opened
8/20/2012	11:53:35 AM	Helium MFC set to  20.000000
8/20/2012	11:53:35 AM	H2 MFC set to  0.000000
8/20/2012	11:53:35 AM	BCl3 MFC set to  0.000000
8/20/2012	11:53:35 AM	PH3 MFC set to  0.000000
8/20/2012	11:53:35 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:53:35 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:53:35 AM	Tube furnace set to 0
8/20/2012	11:54:05 AM	Helium valve closed
8/20/2012	11:54:05 AM	H2 valve closed
8/20/2012	11:54:05 AM	BCl3 valve closed
8/20/2012	11:54:05 AM	PH3 valve closed
8/20/2012	11:54:05 AM	SiCl4 pre valve closed
8/20/2012	11:54:05 AM	SiCl4 post valve closed
8/20/2012	11:54:05 AM	Bypass valve closed
8/20/2012	11:54:05 AM	Bubbler valve closed
8/20/2012	11:54:05 AM	Main Vac valve opened
8/20/2012	11:54:05 AM	Helium MFC set to  0.000000
8/20/2012	11:54:05 AM	H2 MFC set to  0.000000
8/20/2012	11:54:05 AM	BCl3 MFC set to  0.000000
8/20/2012	11:54:05 AM	PH3 MFC set to  0.000000
8/20/2012	11:54:05 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:54:05 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:54:06 AM	Tube furnace set to 0
8/20/2012	11:54:36 AM	H2 valve closed
8/20/2012	11:54:36 AM	BCl3 valve closed
8/20/2012	11:54:36 AM	PH3 valve closed
8/20/2012	11:54:36 AM	SiCl4 pre valve closed
8/20/2012	11:54:36 AM	SiCl4 post valve closed
8/20/2012	11:54:36 AM	Bypass valve closed
8/20/2012	11:54:36 AM	Bubbler valve closed
8/20/2012	11:54:36 AM	Helium valve opened
8/20/2012	11:54:36 AM	Main Vac valve opened
8/20/2012	11:54:36 AM	Helium MFC set to  20.000000
8/20/2012	11:54:36 AM	H2 MFC set to  0.000000
8/20/2012	11:54:36 AM	BCl3 MFC set to  0.000000
8/20/2012	11:54:36 AM	PH3 MFC set to  0.000000
8/20/2012	11:54:36 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:54:36 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:54:36 AM	Tube furnace set to 0
8/20/2012	11:55:06 AM	Helium valve closed
8/20/2012	11:55:06 AM	H2 valve closed
8/20/2012	11:55:06 AM	BCl3 valve closed
8/20/2012	11:55:06 AM	PH3 valve closed
8/20/2012	11:55:06 AM	SiCl4 pre valve closed
8/20/2012	11:55:06 AM	SiCl4 post valve closed
8/20/2012	11:55:06 AM	Bypass valve closed
8/20/2012	11:55:06 AM	Bubbler valve closed
8/20/2012	11:55:06 AM	Main Vac valve opened
8/20/2012	11:55:06 AM	Helium MFC set to  0.000000
8/20/2012	11:55:06 AM	H2 MFC set to  0.000000
8/20/2012	11:55:06 AM	BCl3 MFC set to  0.000000
8/20/2012	11:55:06 AM	PH3 MFC set to  0.000000
8/20/2012	11:55:06 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:55:06 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:55:06 AM	Tube furnace set to 0
8/20/2012	11:55:36 AM	H2 valve closed
8/20/2012	11:55:36 AM	BCl3 valve closed
8/20/2012	11:55:36 AM	PH3 valve closed
8/20/2012	11:55:36 AM	SiCl4 pre valve closed
8/20/2012	11:55:36 AM	SiCl4 post valve closed
8/20/2012	11:55:36 AM	Bypass valve closed
8/20/2012	11:55:36 AM	Bubbler valve closed
8/20/2012	11:55:36 AM	Helium valve opened
8/20/2012	11:55:36 AM	Main Vac valve opened
8/20/2012	11:55:36 AM	Helium MFC set to  20.000000
8/20/2012	11:55:36 AM	H2 MFC set to  0.000000
8/20/2012	11:55:36 AM	BCl3 MFC set to  0.000000
8/20/2012	11:55:36 AM	PH3 MFC set to  0.000000
8/20/2012	11:55:36 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:55:36 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:55:36 AM	Tube furnace set to 0
8/20/2012	11:56:06 AM	Helium valve closed
8/20/2012	11:56:06 AM	H2 valve closed
8/20/2012	11:56:06 AM	BCl3 valve closed
8/20/2012	11:56:06 AM	PH3 valve closed
8/20/2012	11:56:06 AM	SiCl4 pre valve closed
8/20/2012	11:56:06 AM	SiCl4 post valve closed
8/20/2012	11:56:06 AM	Bypass valve closed
8/20/2012	11:56:06 AM	Bubbler valve closed
8/20/2012	11:56:06 AM	Main Vac valve opened
8/20/2012	11:56:06 AM	Helium MFC set to  0.000000
8/20/2012	11:56:06 AM	H2 MFC set to  0.000000
8/20/2012	11:56:06 AM	BCl3 MFC set to  0.000000
8/20/2012	11:56:06 AM	PH3 MFC set to  0.000000
8/20/2012	11:56:06 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:56:06 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:56:06 AM	Tube furnace set to 0
8/20/2012	11:56:36 AM	H2 valve closed
8/20/2012	11:56:36 AM	BCl3 valve closed
8/20/2012	11:56:36 AM	PH3 valve closed
8/20/2012	11:56:36 AM	SiCl4 pre valve closed
8/20/2012	11:56:37 AM	SiCl4 post valve closed
8/20/2012	11:56:37 AM	Bypass valve closed
8/20/2012	11:56:37 AM	Bubbler valve closed
8/20/2012	11:56:37 AM	Helium valve opened
8/20/2012	11:56:37 AM	Main Vac valve opened
8/20/2012	11:56:37 AM	Helium MFC set to  20.000000
8/20/2012	11:56:37 AM	H2 MFC set to  0.000000
8/20/2012	11:56:37 AM	BCl3 MFC set to  0.000000
8/20/2012	11:56:37 AM	PH3 MFC set to  0.000000
8/20/2012	11:56:37 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:56:37 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:56:37 AM	Tube furnace set to 0
8/20/2012	11:57:07 AM	Helium valve closed
8/20/2012	11:57:07 AM	H2 valve closed
8/20/2012	11:57:07 AM	BCl3 valve closed
8/20/2012	11:57:07 AM	PH3 valve closed
8/20/2012	11:57:07 AM	SiCl4 pre valve closed
8/20/2012	11:57:07 AM	SiCl4 post valve closed
8/20/2012	11:57:07 AM	Bypass valve closed
8/20/2012	11:57:07 AM	Bubbler valve closed
8/20/2012	11:57:07 AM	Main Vac valve opened
8/20/2012	11:57:07 AM	Helium MFC set to  0.000000
8/20/2012	11:57:07 AM	H2 MFC set to  0.000000
8/20/2012	11:57:07 AM	BCl3 MFC set to  0.000000
8/20/2012	11:57:07 AM	PH3 MFC set to  0.000000
8/20/2012	11:57:07 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:57:07 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:57:07 AM	Tube furnace set to 0
8/20/2012	11:57:37 AM	H2 valve closed
8/20/2012	11:57:37 AM	BCl3 valve closed
8/20/2012	11:57:37 AM	PH3 valve closed
8/20/2012	11:57:37 AM	SiCl4 pre valve closed
8/20/2012	11:57:37 AM	SiCl4 post valve closed
8/20/2012	11:57:37 AM	Bypass valve closed
8/20/2012	11:57:37 AM	Bubbler valve closed
8/20/2012	11:57:37 AM	Helium valve opened
8/20/2012	11:57:37 AM	Main Vac valve opened
8/20/2012	11:57:37 AM	Helium MFC set to  20.000000
8/20/2012	11:57:37 AM	H2 MFC set to  0.000000
8/20/2012	11:57:37 AM	BCl3 MFC set to  0.000000
8/20/2012	11:57:37 AM	PH3 MFC set to  0.000000
8/20/2012	11:57:37 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:57:37 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:57:37 AM	Tube furnace set to 0
8/20/2012	11:58:07 AM	Helium valve closed
8/20/2012	11:58:07 AM	H2 valve closed
8/20/2012	11:58:07 AM	BCl3 valve closed
8/20/2012	11:58:07 AM	PH3 valve closed
8/20/2012	11:58:07 AM	SiCl4 pre valve closed
8/20/2012	11:58:07 AM	SiCl4 post valve closed
8/20/2012	11:58:07 AM	Bypass valve closed
8/20/2012	11:58:07 AM	Bubbler valve closed
8/20/2012	11:58:07 AM	Main Vac valve opened
8/20/2012	11:58:07 AM	Helium MFC set to  0.000000
8/20/2012	11:58:07 AM	H2 MFC set to  0.000000
8/20/2012	11:58:07 AM	BCl3 MFC set to  0.000000
8/20/2012	11:58:07 AM	PH3 MFC set to  0.000000
8/20/2012	11:58:07 AM	SiCl4 MFC set to  0.000000
8/20/2012	11:58:07 AM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:58:07 AM	Tube furnace set to 0
8/20/2012	11:58:08 AM	Run finished at 11:58 AM
8/20/2012	11:58:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	12:06:18 PM	Main Vac valve closed
8/20/2012	12:06:30 PM	Main Vac valve opened
8/20/2012	12:08:05 PM	Recipe started at 12:08 PM
8/20/2012	12:08:05 PM	Helium valve closed
8/20/2012	12:08:05 PM	H2 valve closed
8/20/2012	12:08:05 PM	BCl3 valve closed
8/20/2012	12:08:05 PM	PH3 valve closed
8/20/2012	12:08:05 PM	SiCl4 pre valve closed
8/20/2012	12:08:05 PM	SiCl4 post valve closed
8/20/2012	12:08:05 PM	Main Vac valve closed
8/20/2012	12:08:05 PM	Bypass valve closed
8/20/2012	12:08:05 PM	Bubbler valve closed
8/20/2012	12:08:05 PM	Helium MFC set to  0.000000
8/20/2012	12:08:05 PM	H2 MFC set to  0.000000
8/20/2012	12:08:05 PM	BCl3 MFC set to  0.000000
8/20/2012	12:08:05 PM	PH3 MFC set to  0.000000
8/20/2012	12:08:05 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:08:05 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:08:05 PM	Tube furnace set to 0
8/20/2012	12:08:08 PM	Helium valve closed
8/20/2012	12:08:08 PM	BCl3 valve closed
8/20/2012	12:08:08 PM	PH3 valve closed
8/20/2012	12:08:08 PM	SiCl4 pre valve closed
8/20/2012	12:08:08 PM	SiCl4 post valve closed
8/20/2012	12:08:08 PM	Main Vac valve closed
8/20/2012	12:08:08 PM	Bypass valve closed
8/20/2012	12:08:08 PM	Bubbler valve closed
8/20/2012	12:08:08 PM	H2 valve opened
8/20/2012	12:08:08 PM	Helium MFC set to  0.000000
8/20/2012	12:08:08 PM	H2 MFC set to  500.000000
8/20/2012	12:08:08 PM	BCl3 MFC set to  0.000000
8/20/2012	12:08:08 PM	PH3 MFC set to  0.000000
8/20/2012	12:08:08 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:08:08 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:08:08 PM	Tube furnace set to 0
8/20/2012	12:09:24 PM	Helium valve closed
8/20/2012	12:09:24 PM	BCl3 valve closed
8/20/2012	12:09:24 PM	PH3 valve closed
8/20/2012	12:09:24 PM	SiCl4 pre valve closed
8/20/2012	12:09:24 PM	SiCl4 post valve closed
8/20/2012	12:09:24 PM	Main Vac valve closed
8/20/2012	12:09:24 PM	Bypass valve closed
8/20/2012	12:09:24 PM	H2 valve opened
8/20/2012	12:09:24 PM	Bubbler valve opened
8/20/2012	12:09:24 PM	Helium MFC set to  0.000000
8/20/2012	12:09:24 PM	H2 MFC set to  500.000000
8/20/2012	12:09:24 PM	BCl3 MFC set to  0.000000
8/20/2012	12:09:24 PM	PH3 MFC set to  0.000000
8/20/2012	12:09:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:09:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:09:25 PM	Tube furnace set to 0
8/20/2012	12:09:26 PM	Helium valve closed
8/20/2012	12:09:26 PM	BCl3 valve closed
8/20/2012	12:09:26 PM	PH3 valve closed
8/20/2012	12:09:26 PM	SiCl4 pre valve closed
8/20/2012	12:09:26 PM	SiCl4 post valve closed
8/20/2012	12:09:26 PM	Main Vac valve closed
8/20/2012	12:09:26 PM	Bypass valve closed
8/20/2012	12:09:26 PM	H2 valve opened
8/20/2012	12:09:26 PM	Bubbler valve opened
8/20/2012	12:09:26 PM	Helium MFC set to  0.000000
8/20/2012	12:09:26 PM	H2 MFC set to  500.000000
8/20/2012	12:09:26 PM	BCl3 MFC set to  0.000000
8/20/2012	12:09:26 PM	PH3 MFC set to  0.000000
8/20/2012	12:09:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:09:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:09:26 PM	Tube furnace set to 1000
8/20/2012	12:29:26 PM	Helium valve closed
8/20/2012	12:29:26 PM	PH3 valve closed
8/20/2012	12:29:26 PM	Main Vac valve closed
8/20/2012	12:29:26 PM	Bypass valve closed
8/20/2012	12:29:26 PM	H2 valve opened
8/20/2012	12:29:26 PM	BCl3 valve opened
8/20/2012	12:29:26 PM	SiCl4 pre valve opened
8/20/2012	12:29:26 PM	SiCl4 post valve opened
8/20/2012	12:29:26 PM	Bubbler valve opened
8/20/2012	12:29:26 PM	Helium MFC set to  0.000000
8/20/2012	12:29:26 PM	H2 MFC set to  450.000000
8/20/2012	12:29:26 PM	BCl3 MFC set to  1.300000
8/20/2012	12:29:26 PM	PH3 MFC set to  0.000000
8/20/2012	12:29:26 PM	SiCl4 MFC set to  50.000000
8/20/2012	12:29:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:29:26 PM	Tube furnace set to 1000
8/20/2012	12:46:26 PM	Helium valve closed
8/20/2012	12:46:26 PM	BCl3 valve closed
8/20/2012	12:46:26 PM	PH3 valve closed
8/20/2012	12:46:26 PM	SiCl4 pre valve closed
8/20/2012	12:46:26 PM	SiCl4 post valve closed
8/20/2012	12:46:26 PM	Main Vac valve closed
8/20/2012	12:46:26 PM	Bypass valve closed
8/20/2012	12:46:26 PM	H2 valve opened
8/20/2012	12:46:26 PM	Bubbler valve opened
8/20/2012	12:46:26 PM	Helium MFC set to  0.000000
8/20/2012	12:46:26 PM	H2 MFC set to  500.000000
8/20/2012	12:46:26 PM	BCl3 MFC set to  0.000000
8/20/2012	12:46:26 PM	PH3 MFC set to  0.000000
8/20/2012	12:46:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:46:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:46:26 PM	Tube furnace set to 750
8/20/2012	12:51:26 PM	H2 valve closed
8/20/2012	12:51:26 PM	BCl3 valve closed
8/20/2012	12:51:26 PM	PH3 valve closed
8/20/2012	12:51:26 PM	SiCl4 pre valve closed
8/20/2012	12:51:26 PM	SiCl4 post valve closed
8/20/2012	12:51:26 PM	Main Vac valve closed
8/20/2012	12:51:26 PM	Bypass valve closed
8/20/2012	12:51:26 PM	Helium valve opened
8/20/2012	12:51:26 PM	Bubbler valve opened
8/20/2012	12:51:26 PM	Helium MFC set to  500.000000
8/20/2012	12:51:26 PM	H2 MFC set to  0.000000
8/20/2012	12:51:26 PM	BCl3 MFC set to  0.000000
8/20/2012	12:51:26 PM	PH3 MFC set to  0.000000
8/20/2012	12:51:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	12:51:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	12:51:27 PM	Tube furnace set to 0
8/20/2012	1:11:27 PM	Helium valve closed
8/20/2012	1:11:27 PM	H2 valve closed
8/20/2012	1:11:27 PM	BCl3 valve closed
8/20/2012	1:11:27 PM	PH3 valve closed
8/20/2012	1:11:27 PM	SiCl4 pre valve closed
8/20/2012	1:11:27 PM	SiCl4 post valve closed
8/20/2012	1:11:27 PM	Main Vac valve closed
8/20/2012	1:11:27 PM	Bypass valve closed
8/20/2012	1:11:27 PM	Bubbler valve closed
8/20/2012	1:11:27 PM	Helium MFC set to  0.000000
8/20/2012	1:11:27 PM	H2 MFC set to  0.000000
8/20/2012	1:11:27 PM	BCl3 MFC set to  0.000000
8/20/2012	1:11:27 PM	PH3 MFC set to  0.000000
8/20/2012	1:11:27 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:11:27 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:11:27 PM	Tube furnace set to 0
8/20/2012	1:11:28 PM	Run finished at 1:11 PM
8/20/2012	1:13:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	1:13:43 PM	Recipe started at 1:13 PM
8/20/2012	1:13:43 PM	Helium valve closed
8/20/2012	1:13:43 PM	H2 valve closed
8/20/2012	1:13:43 PM	BCl3 valve closed
8/20/2012	1:13:43 PM	PH3 valve closed
8/20/2012	1:13:43 PM	SiCl4 pre valve closed
8/20/2012	1:13:43 PM	SiCl4 post valve closed
8/20/2012	1:13:43 PM	Main Vac valve closed
8/20/2012	1:13:43 PM	Bypass valve closed
8/20/2012	1:13:43 PM	Bubbler valve closed
8/20/2012	1:13:43 PM	Helium MFC set to  0.000000
8/20/2012	1:13:43 PM	H2 MFC set to  0.000000
8/20/2012	1:13:43 PM	BCl3 MFC set to  0.000000
8/20/2012	1:13:43 PM	PH3 MFC set to  0.000000
8/20/2012	1:13:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:13:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:13:43 PM	Tube furnace set to 0
8/20/2012	1:13:47 PM	H2 valve closed
8/20/2012	1:13:47 PM	BCl3 valve closed
8/20/2012	1:13:47 PM	PH3 valve closed
8/20/2012	1:13:47 PM	SiCl4 pre valve closed
8/20/2012	1:13:47 PM	SiCl4 post valve closed
8/20/2012	1:13:47 PM	Main Vac valve closed
8/20/2012	1:13:47 PM	Bypass valve closed
8/20/2012	1:13:47 PM	Bubbler valve closed
8/20/2012	1:13:47 PM	Helium valve opened
8/20/2012	1:13:47 PM	Helium MFC set to  500.000000
8/20/2012	1:13:47 PM	H2 MFC set to  0.000000
8/20/2012	1:13:47 PM	BCl3 MFC set to  0.000000
8/20/2012	1:13:47 PM	PH3 MFC set to  0.000000
8/20/2012	1:13:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:13:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:13:47 PM	Tube furnace set to 0
8/20/2012	1:13:47 PM	Helium valve closed
8/20/2012	1:13:47 PM	H2 valve closed
8/20/2012	1:13:47 PM	BCl3 valve closed
8/20/2012	1:13:47 PM	PH3 valve closed
8/20/2012	1:13:47 PM	SiCl4 pre valve closed
8/20/2012	1:13:47 PM	SiCl4 post valve closed
8/20/2012	1:13:47 PM	Main Vac valve closed
8/20/2012	1:13:47 PM	Bypass valve closed
8/20/2012	1:13:47 PM	Bubbler valve closed
8/20/2012	1:13:47 PM	Helium MFC set to  0.000000
8/20/2012	1:13:47 PM	H2 MFC set to  0.000000
8/20/2012	1:13:47 PM	BCl3 MFC set to  0.000000
8/20/2012	1:13:47 PM	PH3 MFC set to  0.000000
8/20/2012	1:13:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:13:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:13:47 PM	Tube furnace set to 0
8/20/2012	1:13:48 PM	Run finished at 1:13 PM
8/20/2012	1:13:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	1:16:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	1:16:56 PM	Recipe started at 1:16 PM
8/20/2012	1:16:56 PM	Helium valve closed
8/20/2012	1:16:56 PM	H2 valve closed
8/20/2012	1:16:56 PM	BCl3 valve closed
8/20/2012	1:16:56 PM	PH3 valve closed
8/20/2012	1:16:56 PM	SiCl4 pre valve closed
8/20/2012	1:16:56 PM	SiCl4 post valve closed
8/20/2012	1:16:56 PM	Main Vac valve closed
8/20/2012	1:16:56 PM	Bubbler valve closed
8/20/2012	1:16:56 PM	Bypass valve opened
8/20/2012	1:16:56 PM	Helium MFC set to  0.000000
8/20/2012	1:16:56 PM	H2 MFC set to  0.000000
8/20/2012	1:16:56 PM	BCl3 MFC set to  0.000000
8/20/2012	1:16:56 PM	PH3 MFC set to  0.000000
8/20/2012	1:16:56 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:16:56 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:16:56 PM	Tube furnace set to 0
8/20/2012	1:18:15 PM	Helium valve closed
8/20/2012	1:18:15 PM	H2 valve closed
8/20/2012	1:18:15 PM	BCl3 valve closed
8/20/2012	1:18:15 PM	PH3 valve closed
8/20/2012	1:18:15 PM	SiCl4 pre valve closed
8/20/2012	1:18:15 PM	SiCl4 post valve closed
8/20/2012	1:18:15 PM	Main Vac valve closed
8/20/2012	1:18:15 PM	Bubbler valve closed
8/20/2012	1:18:15 PM	Bypass valve opened
8/20/2012	1:18:15 PM	Helium MFC set to  0.000000
8/20/2012	1:18:15 PM	H2 MFC set to  0.000000
8/20/2012	1:18:15 PM	BCl3 MFC set to  0.000000
8/20/2012	1:18:15 PM	PH3 MFC set to  0.000000
8/20/2012	1:18:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:18:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:18:15 PM	Tube furnace set to 0
8/20/2012	1:19:15 PM	Helium valve closed
8/20/2012	1:19:15 PM	H2 valve closed
8/20/2012	1:19:15 PM	BCl3 valve closed
8/20/2012	1:19:15 PM	PH3 valve closed
8/20/2012	1:19:15 PM	SiCl4 pre valve closed
8/20/2012	1:19:15 PM	SiCl4 post valve closed
8/20/2012	1:19:15 PM	Bypass valve closed
8/20/2012	1:19:15 PM	Bubbler valve closed
8/20/2012	1:19:15 PM	Main Vac valve opened
8/20/2012	1:19:15 PM	Helium MFC set to  0.000000
8/20/2012	1:19:15 PM	H2 MFC set to  0.000000
8/20/2012	1:19:15 PM	BCl3 MFC set to  0.000000
8/20/2012	1:19:15 PM	PH3 MFC set to  0.000000
8/20/2012	1:19:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	1:19:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	1:19:15 PM	Tube furnace set to 0
8/20/2012	1:19:16 PM	Run finished at 1:19 PM
8/20/2012	1:19:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	1:57:13 PM	H2 MFC set to  100.000000
8/20/2012	1:57:15 PM	H2 valve opened
8/20/2012	1:57:28 PM	H2 valve closed
8/20/2012	1:57:32 PM	H2 MFC set to  0.000000
8/20/2012	2:00:04 PM	H2 valve opened
8/20/2012	2:00:07 PM	H2 MFC set to  50.000000
8/20/2012	2:00:28 PM	H2 MFC set to  100.000000
8/20/2012	2:00:39 PM	H2 valve closed
8/20/2012	2:00:42 PM	H2 MFC set to  0.000000
8/20/2012	2:00:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	2:00:44 PM	Recipe started at 2:00 PM
8/20/2012	2:00:44 PM	Helium valve closed
8/20/2012	2:00:44 PM	H2 valve closed
8/20/2012	2:00:44 PM	BCl3 valve closed
8/20/2012	2:00:45 PM	PH3 valve closed
8/20/2012	2:00:45 PM	SiCl4 pre valve closed
8/20/2012	2:00:45 PM	SiCl4 post valve closed
8/20/2012	2:00:45 PM	Main Vac valve closed
8/20/2012	2:00:45 PM	Bypass valve closed
8/20/2012	2:00:45 PM	Bubbler valve closed
8/20/2012	2:00:45 PM	Helium MFC set to  0.000000
8/20/2012	2:00:45 PM	H2 MFC set to  0.000000
8/20/2012	2:00:45 PM	BCl3 MFC set to  0.000000
8/20/2012	2:00:45 PM	PH3 MFC set to  0.000000
8/20/2012	2:00:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:00:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:00:45 PM	Tube furnace set to 0
8/20/2012	2:00:48 PM	H2 valve closed
8/20/2012	2:00:48 PM	BCl3 valve closed
8/20/2012	2:00:48 PM	PH3 valve closed
8/20/2012	2:00:48 PM	SiCl4 pre valve closed
8/20/2012	2:00:48 PM	SiCl4 post valve closed
8/20/2012	2:00:48 PM	Main Vac valve closed
8/20/2012	2:00:48 PM	Bypass valve closed
8/20/2012	2:00:48 PM	Bubbler valve closed
8/20/2012	2:00:48 PM	Helium valve opened
8/20/2012	2:00:48 PM	Helium MFC set to  500.000000
8/20/2012	2:00:48 PM	H2 MFC set to  0.000000
8/20/2012	2:00:48 PM	BCl3 MFC set to  0.000000
8/20/2012	2:00:48 PM	PH3 MFC set to  0.000000
8/20/2012	2:00:48 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:00:48 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:00:48 PM	Tube furnace set to 0
8/20/2012	2:00:50 PM	Run aborted at 2:00 PM
8/20/2012	2:00:50 PM	Helium valve closed
8/20/2012	2:00:50 PM	H2 valve closed
8/20/2012	2:00:50 PM	BCl3 valve closed
8/20/2012	2:00:50 PM	PH3 valve closed
8/20/2012	2:00:50 PM	SiCl4 pre valve closed
8/20/2012	2:00:50 PM	SiCl4 post valve closed
8/20/2012	2:00:50 PM	Bypass valve closed
8/20/2012	2:00:50 PM	Main Vac valve closed
8/20/2012	2:00:50 PM	Bubbler valve closed
8/20/2012	2:00:50 PM	Helium MFC set to  0.000000
8/20/2012	2:00:50 PM	H2 MFC set to  0.000000
8/20/2012	2:00:50 PM	BCl3 MFC set to  0.000000
8/20/2012	2:00:50 PM	PH3 MFC set to  0.000000
8/20/2012	2:00:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:00:50 PM	Tube furnace set to 0
8/20/2012	2:00:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	2:00:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	2:00:53 PM	Recipe started at 2:00 PM
8/20/2012	2:00:53 PM	Helium valve closed
8/20/2012	2:00:53 PM	H2 valve closed
8/20/2012	2:00:53 PM	BCl3 valve closed
8/20/2012	2:00:53 PM	PH3 valve closed
8/20/2012	2:00:53 PM	SiCl4 pre valve closed
8/20/2012	2:00:53 PM	SiCl4 post valve closed
8/20/2012	2:00:53 PM	Main Vac valve closed
8/20/2012	2:00:53 PM	Bubbler valve closed
8/20/2012	2:00:53 PM	Bypass valve opened
8/20/2012	2:00:53 PM	Helium MFC set to  0.000000
8/20/2012	2:00:53 PM	H2 MFC set to  0.000000
8/20/2012	2:00:53 PM	BCl3 MFC set to  0.000000
8/20/2012	2:00:53 PM	PH3 MFC set to  0.000000
8/20/2012	2:00:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:00:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:00:53 PM	Tube furnace set to 0
8/20/2012	2:01:28 PM	Helium valve closed
8/20/2012	2:01:28 PM	H2 valve closed
8/20/2012	2:01:28 PM	BCl3 valve closed
8/20/2012	2:01:28 PM	PH3 valve closed
8/20/2012	2:01:28 PM	SiCl4 pre valve closed
8/20/2012	2:01:28 PM	SiCl4 post valve closed
8/20/2012	2:01:28 PM	Main Vac valve closed
8/20/2012	2:01:28 PM	Bubbler valve closed
8/20/2012	2:01:28 PM	Bypass valve opened
8/20/2012	2:01:28 PM	Helium MFC set to  0.000000
8/20/2012	2:01:28 PM	H2 MFC set to  0.000000
8/20/2012	2:01:28 PM	BCl3 MFC set to  0.000000
8/20/2012	2:01:28 PM	PH3 MFC set to  0.000000
8/20/2012	2:01:28 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:01:28 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:01:28 PM	Tube furnace set to 0
8/20/2012	2:02:28 PM	Helium valve closed
8/20/2012	2:02:28 PM	H2 valve closed
8/20/2012	2:02:28 PM	BCl3 valve closed
8/20/2012	2:02:28 PM	PH3 valve closed
8/20/2012	2:02:28 PM	SiCl4 pre valve closed
8/20/2012	2:02:28 PM	SiCl4 post valve closed
8/20/2012	2:02:28 PM	Bypass valve closed
8/20/2012	2:02:28 PM	Bubbler valve closed
8/20/2012	2:02:28 PM	Main Vac valve opened
8/20/2012	2:02:28 PM	Helium MFC set to  0.000000
8/20/2012	2:02:28 PM	H2 MFC set to  0.000000
8/20/2012	2:02:28 PM	BCl3 MFC set to  0.000000
8/20/2012	2:02:28 PM	PH3 MFC set to  0.000000
8/20/2012	2:02:28 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:02:28 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:02:28 PM	Tube furnace set to 0
8/20/2012	2:02:29 PM	Run finished at 2:02 PM
8/20/2012	2:02:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	2:06:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	2:06:26 PM	Recipe started at 2:06 PM
8/20/2012	2:06:26 PM	Helium valve closed
8/20/2012	2:06:26 PM	H2 valve closed
8/20/2012	2:06:26 PM	BCl3 valve closed
8/20/2012	2:06:26 PM	PH3 valve closed
8/20/2012	2:06:26 PM	SiCl4 pre valve closed
8/20/2012	2:06:26 PM	SiCl4 post valve closed
8/20/2012	2:06:26 PM	Main Vac valve closed
8/20/2012	2:06:26 PM	Bubbler valve closed
8/20/2012	2:06:26 PM	Bypass valve opened
8/20/2012	2:06:26 PM	Helium MFC set to  0.000000
8/20/2012	2:06:26 PM	H2 MFC set to  0.000000
8/20/2012	2:06:26 PM	BCl3 MFC set to  0.000000
8/20/2012	2:06:26 PM	PH3 MFC set to  0.000000
8/20/2012	2:06:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:06:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:06:26 PM	Tube furnace set to 0
8/20/2012	2:06:26 PM	Helium valve closed
8/20/2012	2:06:26 PM	H2 valve closed
8/20/2012	2:06:26 PM	BCl3 valve closed
8/20/2012	2:06:26 PM	PH3 valve closed
8/20/2012	2:06:26 PM	SiCl4 pre valve closed
8/20/2012	2:06:26 PM	SiCl4 post valve closed
8/20/2012	2:06:26 PM	Main Vac valve closed
8/20/2012	2:06:26 PM	Bubbler valve closed
8/20/2012	2:06:26 PM	Bypass valve opened
8/20/2012	2:06:26 PM	Helium MFC set to  0.000000
8/20/2012	2:06:26 PM	H2 MFC set to  0.000000
8/20/2012	2:06:26 PM	BCl3 MFC set to  0.000000
8/20/2012	2:06:26 PM	PH3 MFC set to  0.000000
8/20/2012	2:06:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:06:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:06:26 PM	Tube furnace set to 0
8/20/2012	2:06:39 PM	Helium valve closed
8/20/2012	2:06:39 PM	H2 valve closed
8/20/2012	2:06:39 PM	BCl3 valve closed
8/20/2012	2:06:39 PM	PH3 valve closed
8/20/2012	2:06:39 PM	SiCl4 pre valve closed
8/20/2012	2:06:39 PM	SiCl4 post valve closed
8/20/2012	2:06:39 PM	Bypass valve closed
8/20/2012	2:06:39 PM	Bubbler valve closed
8/20/2012	2:06:39 PM	Main Vac valve opened
8/20/2012	2:06:39 PM	Helium MFC set to  0.000000
8/20/2012	2:06:39 PM	H2 MFC set to  0.000000
8/20/2012	2:06:39 PM	BCl3 MFC set to  0.000000
8/20/2012	2:06:39 PM	PH3 MFC set to  0.000000
8/20/2012	2:06:39 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:06:39 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:06:39 PM	Tube furnace set to 0
8/20/2012	2:06:43 PM	H2 valve closed
8/20/2012	2:06:43 PM	BCl3 valve closed
8/20/2012	2:06:43 PM	PH3 valve closed
8/20/2012	2:06:43 PM	SiCl4 pre valve closed
8/20/2012	2:06:43 PM	SiCl4 post valve closed
8/20/2012	2:06:43 PM	Bypass valve closed
8/20/2012	2:06:43 PM	Bubbler valve closed
8/20/2012	2:06:43 PM	Helium valve opened
8/20/2012	2:06:43 PM	Main Vac valve opened
8/20/2012	2:06:43 PM	Helium MFC set to  20.000000
8/20/2012	2:06:43 PM	H2 MFC set to  0.000000
8/20/2012	2:06:43 PM	BCl3 MFC set to  0.000000
8/20/2012	2:06:43 PM	PH3 MFC set to  0.000000
8/20/2012	2:06:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:06:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:06:43 PM	Tube furnace set to 0
8/20/2012	2:07:13 PM	Helium valve closed
8/20/2012	2:07:13 PM	H2 valve closed
8/20/2012	2:07:13 PM	BCl3 valve closed
8/20/2012	2:07:13 PM	PH3 valve closed
8/20/2012	2:07:13 PM	SiCl4 pre valve closed
8/20/2012	2:07:13 PM	SiCl4 post valve closed
8/20/2012	2:07:13 PM	Bypass valve closed
8/20/2012	2:07:13 PM	Bubbler valve closed
8/20/2012	2:07:13 PM	Main Vac valve opened
8/20/2012	2:07:13 PM	Helium MFC set to  0.000000
8/20/2012	2:07:13 PM	H2 MFC set to  0.000000
8/20/2012	2:07:13 PM	BCl3 MFC set to  0.000000
8/20/2012	2:07:13 PM	PH3 MFC set to  0.000000
8/20/2012	2:07:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:07:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:07:13 PM	Tube furnace set to 0
8/20/2012	2:07:43 PM	H2 valve closed
8/20/2012	2:07:43 PM	BCl3 valve closed
8/20/2012	2:07:43 PM	PH3 valve closed
8/20/2012	2:07:43 PM	SiCl4 pre valve closed
8/20/2012	2:07:43 PM	SiCl4 post valve closed
8/20/2012	2:07:43 PM	Bypass valve closed
8/20/2012	2:07:43 PM	Bubbler valve closed
8/20/2012	2:07:43 PM	Helium valve opened
8/20/2012	2:07:43 PM	Main Vac valve opened
8/20/2012	2:07:43 PM	Helium MFC set to  20.000000
8/20/2012	2:07:43 PM	H2 MFC set to  0.000000
8/20/2012	2:07:43 PM	BCl3 MFC set to  0.000000
8/20/2012	2:07:43 PM	PH3 MFC set to  0.000000
8/20/2012	2:07:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:07:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:07:43 PM	Tube furnace set to 0
8/20/2012	2:08:13 PM	Helium valve closed
8/20/2012	2:08:13 PM	H2 valve closed
8/20/2012	2:08:13 PM	BCl3 valve closed
8/20/2012	2:08:13 PM	PH3 valve closed
8/20/2012	2:08:13 PM	SiCl4 pre valve closed
8/20/2012	2:08:13 PM	SiCl4 post valve closed
8/20/2012	2:08:13 PM	Bypass valve closed
8/20/2012	2:08:13 PM	Bubbler valve closed
8/20/2012	2:08:13 PM	Main Vac valve opened
8/20/2012	2:08:13 PM	Helium MFC set to  0.000000
8/20/2012	2:08:13 PM	H2 MFC set to  0.000000
8/20/2012	2:08:13 PM	BCl3 MFC set to  0.000000
8/20/2012	2:08:13 PM	PH3 MFC set to  0.000000
8/20/2012	2:08:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:08:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:08:13 PM	Tube furnace set to 0
8/20/2012	2:08:43 PM	H2 valve closed
8/20/2012	2:08:43 PM	BCl3 valve closed
8/20/2012	2:08:43 PM	PH3 valve closed
8/20/2012	2:08:43 PM	SiCl4 pre valve closed
8/20/2012	2:08:43 PM	SiCl4 post valve closed
8/20/2012	2:08:43 PM	Bypass valve closed
8/20/2012	2:08:43 PM	Bubbler valve closed
8/20/2012	2:08:43 PM	Helium valve opened
8/20/2012	2:08:44 PM	Main Vac valve opened
8/20/2012	2:08:44 PM	Helium MFC set to  20.000000
8/20/2012	2:08:44 PM	H2 MFC set to  0.000000
8/20/2012	2:08:44 PM	BCl3 MFC set to  0.000000
8/20/2012	2:08:44 PM	PH3 MFC set to  0.000000
8/20/2012	2:08:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:08:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:08:44 PM	Tube furnace set to 0
8/20/2012	2:09:14 PM	Helium valve closed
8/20/2012	2:09:14 PM	H2 valve closed
8/20/2012	2:09:14 PM	BCl3 valve closed
8/20/2012	2:09:14 PM	PH3 valve closed
8/20/2012	2:09:14 PM	SiCl4 pre valve closed
8/20/2012	2:09:14 PM	SiCl4 post valve closed
8/20/2012	2:09:14 PM	Bypass valve closed
8/20/2012	2:09:14 PM	Bubbler valve closed
8/20/2012	2:09:14 PM	Main Vac valve opened
8/20/2012	2:09:14 PM	Helium MFC set to  0.000000
8/20/2012	2:09:14 PM	H2 MFC set to  0.000000
8/20/2012	2:09:14 PM	BCl3 MFC set to  0.000000
8/20/2012	2:09:14 PM	PH3 MFC set to  0.000000
8/20/2012	2:09:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:09:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:09:14 PM	Tube furnace set to 0
8/20/2012	2:09:44 PM	H2 valve closed
8/20/2012	2:09:44 PM	BCl3 valve closed
8/20/2012	2:09:44 PM	PH3 valve closed
8/20/2012	2:09:44 PM	SiCl4 pre valve closed
8/20/2012	2:09:44 PM	SiCl4 post valve closed
8/20/2012	2:09:44 PM	Bypass valve closed
8/20/2012	2:09:44 PM	Bubbler valve closed
8/20/2012	2:09:44 PM	Helium valve opened
8/20/2012	2:09:44 PM	Main Vac valve opened
8/20/2012	2:09:44 PM	Helium MFC set to  20.000000
8/20/2012	2:09:44 PM	H2 MFC set to  0.000000
8/20/2012	2:09:44 PM	BCl3 MFC set to  0.000000
8/20/2012	2:09:44 PM	PH3 MFC set to  0.000000
8/20/2012	2:09:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:09:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:09:44 PM	Tube furnace set to 0
8/20/2012	2:10:14 PM	Helium valve closed
8/20/2012	2:10:14 PM	H2 valve closed
8/20/2012	2:10:14 PM	BCl3 valve closed
8/20/2012	2:10:14 PM	PH3 valve closed
8/20/2012	2:10:14 PM	SiCl4 pre valve closed
8/20/2012	2:10:14 PM	SiCl4 post valve closed
8/20/2012	2:10:14 PM	Bypass valve closed
8/20/2012	2:10:14 PM	Bubbler valve closed
8/20/2012	2:10:14 PM	Main Vac valve opened
8/20/2012	2:10:14 PM	Helium MFC set to  0.000000
8/20/2012	2:10:14 PM	H2 MFC set to  0.000000
8/20/2012	2:10:14 PM	BCl3 MFC set to  0.000000
8/20/2012	2:10:14 PM	PH3 MFC set to  0.000000
8/20/2012	2:10:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:10:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:10:14 PM	Tube furnace set to 0
8/20/2012	2:10:44 PM	H2 valve closed
8/20/2012	2:10:44 PM	BCl3 valve closed
8/20/2012	2:10:44 PM	PH3 valve closed
8/20/2012	2:10:44 PM	SiCl4 pre valve closed
8/20/2012	2:10:44 PM	SiCl4 post valve closed
8/20/2012	2:10:44 PM	Bypass valve closed
8/20/2012	2:10:44 PM	Bubbler valve closed
8/20/2012	2:10:44 PM	Helium valve opened
8/20/2012	2:10:44 PM	Main Vac valve opened
8/20/2012	2:10:44 PM	Helium MFC set to  20.000000
8/20/2012	2:10:44 PM	H2 MFC set to  0.000000
8/20/2012	2:10:44 PM	BCl3 MFC set to  0.000000
8/20/2012	2:10:44 PM	PH3 MFC set to  0.000000
8/20/2012	2:10:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:10:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:10:45 PM	Tube furnace set to 0
8/20/2012	2:11:15 PM	Helium valve closed
8/20/2012	2:11:15 PM	H2 valve closed
8/20/2012	2:11:15 PM	BCl3 valve closed
8/20/2012	2:11:15 PM	PH3 valve closed
8/20/2012	2:11:15 PM	SiCl4 pre valve closed
8/20/2012	2:11:15 PM	SiCl4 post valve closed
8/20/2012	2:11:15 PM	Bypass valve closed
8/20/2012	2:11:15 PM	Bubbler valve closed
8/20/2012	2:11:15 PM	Main Vac valve opened
8/20/2012	2:11:15 PM	Helium MFC set to  0.000000
8/20/2012	2:11:15 PM	H2 MFC set to  0.000000
8/20/2012	2:11:15 PM	BCl3 MFC set to  0.000000
8/20/2012	2:11:15 PM	PH3 MFC set to  0.000000
8/20/2012	2:11:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:11:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:11:15 PM	Tube furnace set to 0
8/20/2012	2:11:45 PM	H2 valve closed
8/20/2012	2:11:45 PM	BCl3 valve closed
8/20/2012	2:11:45 PM	PH3 valve closed
8/20/2012	2:11:45 PM	SiCl4 pre valve closed
8/20/2012	2:11:45 PM	SiCl4 post valve closed
8/20/2012	2:11:45 PM	Bypass valve closed
8/20/2012	2:11:45 PM	Bubbler valve closed
8/20/2012	2:11:45 PM	Helium valve opened
8/20/2012	2:11:45 PM	Main Vac valve opened
8/20/2012	2:11:45 PM	Helium MFC set to  20.000000
8/20/2012	2:11:45 PM	H2 MFC set to  0.000000
8/20/2012	2:11:45 PM	BCl3 MFC set to  0.000000
8/20/2012	2:11:45 PM	PH3 MFC set to  0.000000
8/20/2012	2:11:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:11:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:11:45 PM	Tube furnace set to 0
8/20/2012	2:12:15 PM	Helium valve closed
8/20/2012	2:12:15 PM	H2 valve closed
8/20/2012	2:12:15 PM	BCl3 valve closed
8/20/2012	2:12:15 PM	PH3 valve closed
8/20/2012	2:12:15 PM	SiCl4 pre valve closed
8/20/2012	2:12:15 PM	SiCl4 post valve closed
8/20/2012	2:12:15 PM	Bypass valve closed
8/20/2012	2:12:15 PM	Bubbler valve closed
8/20/2012	2:12:15 PM	Main Vac valve opened
8/20/2012	2:12:15 PM	Helium MFC set to  0.000000
8/20/2012	2:12:15 PM	H2 MFC set to  0.000000
8/20/2012	2:12:15 PM	BCl3 MFC set to  0.000000
8/20/2012	2:12:15 PM	PH3 MFC set to  0.000000
8/20/2012	2:12:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:12:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:12:15 PM	Tube furnace set to 0
8/20/2012	2:12:45 PM	H2 valve closed
8/20/2012	2:12:45 PM	BCl3 valve closed
8/20/2012	2:12:45 PM	PH3 valve closed
8/20/2012	2:12:45 PM	SiCl4 pre valve closed
8/20/2012	2:12:45 PM	SiCl4 post valve closed
8/20/2012	2:12:45 PM	Bypass valve closed
8/20/2012	2:12:45 PM	Bubbler valve closed
8/20/2012	2:12:45 PM	Helium valve opened
8/20/2012	2:12:45 PM	Main Vac valve opened
8/20/2012	2:12:45 PM	Helium MFC set to  20.000000
8/20/2012	2:12:45 PM	H2 MFC set to  0.000000
8/20/2012	2:12:45 PM	BCl3 MFC set to  0.000000
8/20/2012	2:12:45 PM	PH3 MFC set to  0.000000
8/20/2012	2:12:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:12:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:12:46 PM	Tube furnace set to 0
8/20/2012	2:13:16 PM	Helium valve closed
8/20/2012	2:13:16 PM	H2 valve closed
8/20/2012	2:13:16 PM	BCl3 valve closed
8/20/2012	2:13:16 PM	PH3 valve closed
8/20/2012	2:13:16 PM	SiCl4 pre valve closed
8/20/2012	2:13:16 PM	SiCl4 post valve closed
8/20/2012	2:13:16 PM	Bypass valve closed
8/20/2012	2:13:16 PM	Bubbler valve closed
8/20/2012	2:13:16 PM	Main Vac valve opened
8/20/2012	2:13:16 PM	Helium MFC set to  0.000000
8/20/2012	2:13:16 PM	H2 MFC set to  0.000000
8/20/2012	2:13:16 PM	BCl3 MFC set to  0.000000
8/20/2012	2:13:16 PM	PH3 MFC set to  0.000000
8/20/2012	2:13:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:13:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:13:16 PM	Tube furnace set to 0
8/20/2012	2:13:46 PM	H2 valve closed
8/20/2012	2:13:46 PM	BCl3 valve closed
8/20/2012	2:13:46 PM	PH3 valve closed
8/20/2012	2:13:46 PM	SiCl4 pre valve closed
8/20/2012	2:13:46 PM	SiCl4 post valve closed
8/20/2012	2:13:46 PM	Bypass valve closed
8/20/2012	2:13:46 PM	Bubbler valve closed
8/20/2012	2:13:46 PM	Helium valve opened
8/20/2012	2:13:46 PM	Main Vac valve opened
8/20/2012	2:13:46 PM	Helium MFC set to  20.000000
8/20/2012	2:13:46 PM	H2 MFC set to  0.000000
8/20/2012	2:13:46 PM	BCl3 MFC set to  0.000000
8/20/2012	2:13:46 PM	PH3 MFC set to  0.000000
8/20/2012	2:13:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:13:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:13:46 PM	Tube furnace set to 0
8/20/2012	2:14:16 PM	Helium valve closed
8/20/2012	2:14:16 PM	H2 valve closed
8/20/2012	2:14:16 PM	BCl3 valve closed
8/20/2012	2:14:16 PM	PH3 valve closed
8/20/2012	2:14:16 PM	SiCl4 pre valve closed
8/20/2012	2:14:16 PM	SiCl4 post valve closed
8/20/2012	2:14:16 PM	Bypass valve closed
8/20/2012	2:14:16 PM	Bubbler valve closed
8/20/2012	2:14:16 PM	Main Vac valve opened
8/20/2012	2:14:16 PM	Helium MFC set to  0.000000
8/20/2012	2:14:16 PM	H2 MFC set to  0.000000
8/20/2012	2:14:16 PM	BCl3 MFC set to  0.000000
8/20/2012	2:14:16 PM	PH3 MFC set to  0.000000
8/20/2012	2:14:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:14:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:14:16 PM	Tube furnace set to 0
8/20/2012	2:14:46 PM	H2 valve closed
8/20/2012	2:14:46 PM	BCl3 valve closed
8/20/2012	2:14:46 PM	PH3 valve closed
8/20/2012	2:14:46 PM	SiCl4 pre valve closed
8/20/2012	2:14:46 PM	SiCl4 post valve closed
8/20/2012	2:14:46 PM	Bypass valve closed
8/20/2012	2:14:46 PM	Bubbler valve closed
8/20/2012	2:14:46 PM	Helium valve opened
8/20/2012	2:14:46 PM	Main Vac valve opened
8/20/2012	2:14:46 PM	Helium MFC set to  20.000000
8/20/2012	2:14:46 PM	H2 MFC set to  0.000000
8/20/2012	2:14:46 PM	BCl3 MFC set to  0.000000
8/20/2012	2:14:46 PM	PH3 MFC set to  0.000000
8/20/2012	2:14:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:14:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:14:46 PM	Tube furnace set to 0
8/20/2012	2:15:17 PM	Helium valve closed
8/20/2012	2:15:17 PM	H2 valve closed
8/20/2012	2:15:17 PM	BCl3 valve closed
8/20/2012	2:15:17 PM	PH3 valve closed
8/20/2012	2:15:17 PM	SiCl4 pre valve closed
8/20/2012	2:15:17 PM	SiCl4 post valve closed
8/20/2012	2:15:17 PM	Bypass valve closed
8/20/2012	2:15:17 PM	Bubbler valve closed
8/20/2012	2:15:17 PM	Main Vac valve opened
8/20/2012	2:15:17 PM	Helium MFC set to  0.000000
8/20/2012	2:15:17 PM	H2 MFC set to  0.000000
8/20/2012	2:15:17 PM	BCl3 MFC set to  0.000000
8/20/2012	2:15:17 PM	PH3 MFC set to  0.000000
8/20/2012	2:15:17 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:15:17 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:15:17 PM	Tube furnace set to 0
8/20/2012	2:15:47 PM	H2 valve closed
8/20/2012	2:15:47 PM	BCl3 valve closed
8/20/2012	2:15:47 PM	PH3 valve closed
8/20/2012	2:15:47 PM	SiCl4 pre valve closed
8/20/2012	2:15:47 PM	SiCl4 post valve closed
8/20/2012	2:15:47 PM	Bypass valve closed
8/20/2012	2:15:47 PM	Bubbler valve closed
8/20/2012	2:15:47 PM	Helium valve opened
8/20/2012	2:15:47 PM	Main Vac valve opened
8/20/2012	2:15:47 PM	Helium MFC set to  20.000000
8/20/2012	2:15:47 PM	H2 MFC set to  0.000000
8/20/2012	2:15:47 PM	BCl3 MFC set to  0.000000
8/20/2012	2:15:47 PM	PH3 MFC set to  0.000000
8/20/2012	2:15:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:15:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:15:47 PM	Tube furnace set to 0
8/20/2012	2:16:17 PM	Helium valve closed
8/20/2012	2:16:17 PM	H2 valve closed
8/20/2012	2:16:17 PM	BCl3 valve closed
8/20/2012	2:16:17 PM	PH3 valve closed
8/20/2012	2:16:17 PM	SiCl4 pre valve closed
8/20/2012	2:16:17 PM	SiCl4 post valve closed
8/20/2012	2:16:17 PM	Bypass valve closed
8/20/2012	2:16:17 PM	Bubbler valve closed
8/20/2012	2:16:17 PM	Main Vac valve opened
8/20/2012	2:16:17 PM	Helium MFC set to  0.000000
8/20/2012	2:16:17 PM	H2 MFC set to  0.000000
8/20/2012	2:16:17 PM	BCl3 MFC set to  0.000000
8/20/2012	2:16:17 PM	PH3 MFC set to  0.000000
8/20/2012	2:16:17 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:16:17 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:16:17 PM	Tube furnace set to 0
8/20/2012	2:16:18 PM	Run finished at 2:16 PM
8/20/2012	2:16:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	2:22:28 PM	Recipe started at 2:22 PM
8/20/2012	2:22:28 PM	Helium valve closed
8/20/2012	2:22:28 PM	H2 valve closed
8/20/2012	2:22:28 PM	BCl3 valve closed
8/20/2012	2:22:28 PM	PH3 valve closed
8/20/2012	2:22:28 PM	SiCl4 pre valve closed
8/20/2012	2:22:28 PM	SiCl4 post valve closed
8/20/2012	2:22:28 PM	Main Vac valve closed
8/20/2012	2:22:28 PM	Bypass valve closed
8/20/2012	2:22:28 PM	Bubbler valve closed
8/20/2012	2:22:28 PM	Helium MFC set to  0.000000
8/20/2012	2:22:28 PM	H2 MFC set to  0.000000
8/20/2012	2:22:28 PM	BCl3 MFC set to  0.000000
8/20/2012	2:22:28 PM	PH3 MFC set to  0.000000
8/20/2012	2:22:28 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:22:28 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:22:28 PM	Tube furnace set to 0
8/20/2012	2:22:31 PM	Helium valve closed
8/20/2012	2:22:31 PM	BCl3 valve closed
8/20/2012	2:22:31 PM	PH3 valve closed
8/20/2012	2:22:31 PM	SiCl4 pre valve closed
8/20/2012	2:22:31 PM	SiCl4 post valve closed
8/20/2012	2:22:31 PM	Main Vac valve closed
8/20/2012	2:22:31 PM	Bypass valve closed
8/20/2012	2:22:31 PM	Bubbler valve closed
8/20/2012	2:22:31 PM	H2 valve opened
8/20/2012	2:22:31 PM	Helium MFC set to  0.000000
8/20/2012	2:22:31 PM	H2 MFC set to  500.000000
8/20/2012	2:22:31 PM	BCl3 MFC set to  0.000000
8/20/2012	2:22:31 PM	PH3 MFC set to  0.000000
8/20/2012	2:22:31 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:22:31 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:22:31 PM	Tube furnace set to 0
8/20/2012	2:31:50 PM	Run aborted at 2:31 PM
8/20/2012	2:31:50 PM	Helium valve closed
8/20/2012	2:31:50 PM	H2 valve closed
8/20/2012	2:31:50 PM	BCl3 valve closed
8/20/2012	2:31:50 PM	PH3 valve closed
8/20/2012	2:31:50 PM	SiCl4 pre valve closed
8/20/2012	2:31:50 PM	SiCl4 post valve closed
8/20/2012	2:31:50 PM	Bypass valve closed
8/20/2012	2:31:50 PM	Main Vac valve closed
8/20/2012	2:31:50 PM	Bubbler valve closed
8/20/2012	2:31:50 PM	Helium MFC set to  0.000000
8/20/2012	2:31:50 PM	H2 MFC set to  0.000000
8/20/2012	2:31:50 PM	BCl3 MFC set to  0.000000
8/20/2012	2:31:50 PM	PH3 MFC set to  0.000000
8/20/2012	2:31:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:31:50 PM	Tube furnace set to 0
8/20/2012	2:32:18 PM	Recipe started at 2:32 PM
8/20/2012	2:32:18 PM	Helium valve closed
8/20/2012	2:32:18 PM	H2 valve closed
8/20/2012	2:32:18 PM	BCl3 valve closed
8/20/2012	2:32:18 PM	PH3 valve closed
8/20/2012	2:32:18 PM	SiCl4 pre valve closed
8/20/2012	2:32:18 PM	SiCl4 post valve closed
8/20/2012	2:32:18 PM	Main Vac valve closed
8/20/2012	2:32:18 PM	Bypass valve closed
8/20/2012	2:32:18 PM	Bubbler valve closed
8/20/2012	2:32:18 PM	Helium MFC set to  0.000000
8/20/2012	2:32:18 PM	H2 MFC set to  0.000000
8/20/2012	2:32:18 PM	BCl3 MFC set to  0.000000
8/20/2012	2:32:18 PM	PH3 MFC set to  0.000000
8/20/2012	2:32:18 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:32:18 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:32:19 PM	Tube furnace set to 0
8/20/2012	2:32:22 PM	Helium valve closed
8/20/2012	2:32:22 PM	BCl3 valve closed
8/20/2012	2:32:22 PM	PH3 valve closed
8/20/2012	2:32:22 PM	SiCl4 pre valve closed
8/20/2012	2:32:22 PM	SiCl4 post valve closed
8/20/2012	2:32:22 PM	Main Vac valve closed
8/20/2012	2:32:22 PM	Bypass valve closed
8/20/2012	2:32:22 PM	Bubbler valve closed
8/20/2012	2:32:22 PM	H2 valve opened
8/20/2012	2:32:22 PM	Helium MFC set to  0.000000
8/20/2012	2:32:22 PM	H2 MFC set to  500.000000
8/20/2012	2:32:22 PM	BCl3 MFC set to  0.000000
8/20/2012	2:32:22 PM	PH3 MFC set to  0.000000
8/20/2012	2:32:22 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:32:22 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:32:22 PM	Tube furnace set to 0
8/20/2012	2:32:32 PM	Helium valve closed
8/20/2012	2:32:32 PM	BCl3 valve closed
8/20/2012	2:32:32 PM	PH3 valve closed
8/20/2012	2:32:32 PM	SiCl4 pre valve closed
8/20/2012	2:32:32 PM	SiCl4 post valve closed
8/20/2012	2:32:32 PM	Main Vac valve closed
8/20/2012	2:32:32 PM	Bypass valve closed
8/20/2012	2:32:32 PM	H2 valve opened
8/20/2012	2:32:32 PM	Bubbler valve opened
8/20/2012	2:32:32 PM	Helium MFC set to  0.000000
8/20/2012	2:32:32 PM	H2 MFC set to  500.000000
8/20/2012	2:32:32 PM	BCl3 MFC set to  0.000000
8/20/2012	2:32:32 PM	PH3 MFC set to  0.000000
8/20/2012	2:32:32 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:32:32 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:32:33 PM	Tube furnace set to 0
8/20/2012	2:32:34 PM	Helium valve closed
8/20/2012	2:32:34 PM	BCl3 valve closed
8/20/2012	2:32:34 PM	PH3 valve closed
8/20/2012	2:32:34 PM	SiCl4 pre valve closed
8/20/2012	2:32:34 PM	SiCl4 post valve closed
8/20/2012	2:32:34 PM	Main Vac valve closed
8/20/2012	2:32:34 PM	Bypass valve closed
8/20/2012	2:32:34 PM	H2 valve opened
8/20/2012	2:32:34 PM	Bubbler valve opened
8/20/2012	2:32:34 PM	Helium MFC set to  0.000000
8/20/2012	2:32:34 PM	H2 MFC set to  500.000000
8/20/2012	2:32:34 PM	BCl3 MFC set to  0.000000
8/20/2012	2:32:34 PM	PH3 MFC set to  0.000000
8/20/2012	2:32:34 PM	SiCl4 MFC set to  0.000000
8/20/2012	2:32:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:32:34 PM	Tube furnace set to 1000
8/20/2012	2:52:34 PM	Helium valve closed
8/20/2012	2:52:34 PM	PH3 valve closed
8/20/2012	2:52:34 PM	Main Vac valve closed
8/20/2012	2:52:34 PM	Bypass valve closed
8/20/2012	2:52:34 PM	H2 valve opened
8/20/2012	2:52:34 PM	BCl3 valve opened
8/20/2012	2:52:34 PM	SiCl4 pre valve opened
8/20/2012	2:52:34 PM	SiCl4 post valve opened
8/20/2012	2:52:34 PM	Bubbler valve opened
8/20/2012	2:52:34 PM	Helium MFC set to  0.000000
8/20/2012	2:52:34 PM	H2 MFC set to  450.000000
8/20/2012	2:52:34 PM	BCl3 MFC set to  1.300000
8/20/2012	2:52:34 PM	PH3 MFC set to  0.000000
8/20/2012	2:52:34 PM	SiCl4 MFC set to  50.000000
8/20/2012	2:52:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	2:52:34 PM	Tube furnace set to 1000
8/20/2012	3:09:34 PM	Helium valve closed
8/20/2012	3:09:34 PM	BCl3 valve closed
8/20/2012	3:09:34 PM	PH3 valve closed
8/20/2012	3:09:34 PM	SiCl4 pre valve closed
8/20/2012	3:09:34 PM	SiCl4 post valve closed
8/20/2012	3:09:34 PM	Main Vac valve closed
8/20/2012	3:09:34 PM	Bypass valve closed
8/20/2012	3:09:34 PM	H2 valve opened
8/20/2012	3:09:34 PM	Bubbler valve opened
8/20/2012	3:09:34 PM	Helium MFC set to  0.000000
8/20/2012	3:09:34 PM	H2 MFC set to  500.000000
8/20/2012	3:09:34 PM	BCl3 MFC set to  0.000000
8/20/2012	3:09:34 PM	PH3 MFC set to  0.000000
8/20/2012	3:09:34 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:09:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:09:34 PM	Tube furnace set to 750
8/20/2012	3:14:34 PM	H2 valve closed
8/20/2012	3:14:34 PM	BCl3 valve closed
8/20/2012	3:14:34 PM	PH3 valve closed
8/20/2012	3:14:34 PM	SiCl4 pre valve closed
8/20/2012	3:14:34 PM	SiCl4 post valve closed
8/20/2012	3:14:34 PM	Main Vac valve closed
8/20/2012	3:14:34 PM	Bypass valve closed
8/20/2012	3:14:34 PM	Helium valve opened
8/20/2012	3:14:34 PM	Bubbler valve opened
8/20/2012	3:14:34 PM	Helium MFC set to  500.000000
8/20/2012	3:14:34 PM	H2 MFC set to  0.000000
8/20/2012	3:14:34 PM	BCl3 MFC set to  0.000000
8/20/2012	3:14:34 PM	PH3 MFC set to  0.000000
8/20/2012	3:14:34 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:14:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:14:34 PM	Tube furnace set to 0
8/20/2012	3:34:34 PM	Helium valve closed
8/20/2012	3:34:34 PM	H2 valve closed
8/20/2012	3:34:34 PM	BCl3 valve closed
8/20/2012	3:34:34 PM	PH3 valve closed
8/20/2012	3:34:34 PM	SiCl4 pre valve closed
8/20/2012	3:34:34 PM	SiCl4 post valve closed
8/20/2012	3:34:34 PM	Main Vac valve closed
8/20/2012	3:34:34 PM	Bypass valve closed
8/20/2012	3:34:34 PM	Bubbler valve closed
8/20/2012	3:34:34 PM	Helium MFC set to  0.000000
8/20/2012	3:34:34 PM	H2 MFC set to  0.000000
8/20/2012	3:34:34 PM	BCl3 MFC set to  0.000000
8/20/2012	3:34:34 PM	PH3 MFC set to  0.000000
8/20/2012	3:34:34 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:34:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:34:35 PM	Tube furnace set to 0
8/20/2012	3:34:36 PM	Run finished at 3:34 PM
8/20/2012	3:45:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	3:45:12 PM	Recipe started at 3:45 PM
8/20/2012	3:45:12 PM	Helium valve closed
8/20/2012	3:45:12 PM	H2 valve closed
8/20/2012	3:45:12 PM	BCl3 valve closed
8/20/2012	3:45:12 PM	PH3 valve closed
8/20/2012	3:45:12 PM	SiCl4 pre valve closed
8/20/2012	3:45:12 PM	SiCl4 post valve closed
8/20/2012	3:45:12 PM	Main Vac valve closed
8/20/2012	3:45:12 PM	Bypass valve closed
8/20/2012	3:45:12 PM	Bubbler valve closed
8/20/2012	3:45:12 PM	Helium MFC set to  0.000000
8/20/2012	3:45:12 PM	H2 MFC set to  0.000000
8/20/2012	3:45:12 PM	BCl3 MFC set to  0.000000
8/20/2012	3:45:12 PM	PH3 MFC set to  0.000000
8/20/2012	3:45:12 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:45:12 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:45:12 PM	Tube furnace set to 0
8/20/2012	3:45:15 PM	H2 valve closed
8/20/2012	3:45:15 PM	BCl3 valve closed
8/20/2012	3:45:15 PM	PH3 valve closed
8/20/2012	3:45:15 PM	SiCl4 pre valve closed
8/20/2012	3:45:15 PM	SiCl4 post valve closed
8/20/2012	3:45:15 PM	Main Vac valve closed
8/20/2012	3:45:15 PM	Bypass valve closed
8/20/2012	3:45:15 PM	Bubbler valve closed
8/20/2012	3:45:15 PM	Helium valve opened
8/20/2012	3:45:15 PM	Helium MFC set to  500.000000
8/20/2012	3:45:15 PM	H2 MFC set to  0.000000
8/20/2012	3:45:15 PM	BCl3 MFC set to  0.000000
8/20/2012	3:45:15 PM	PH3 MFC set to  0.000000
8/20/2012	3:45:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:45:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:45:16 PM	Tube furnace set to 0
8/20/2012	3:45:16 PM	Helium valve closed
8/20/2012	3:45:16 PM	H2 valve closed
8/20/2012	3:45:16 PM	BCl3 valve closed
8/20/2012	3:45:16 PM	PH3 valve closed
8/20/2012	3:45:16 PM	SiCl4 pre valve closed
8/20/2012	3:45:16 PM	SiCl4 post valve closed
8/20/2012	3:45:16 PM	Main Vac valve closed
8/20/2012	3:45:16 PM	Bypass valve closed
8/20/2012	3:45:16 PM	Bubbler valve closed
8/20/2012	3:45:16 PM	Helium MFC set to  0.000000
8/20/2012	3:45:16 PM	H2 MFC set to  0.000000
8/20/2012	3:45:16 PM	BCl3 MFC set to  0.000000
8/20/2012	3:45:16 PM	PH3 MFC set to  0.000000
8/20/2012	3:45:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:45:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:45:16 PM	Tube furnace set to 0
8/20/2012	3:45:17 PM	Run finished at 3:45 PM
8/20/2012	3:45:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	3:49:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	3:49:35 PM	Recipe started at 3:49 PM
8/20/2012	3:49:35 PM	Helium valve closed
8/20/2012	3:49:35 PM	H2 valve closed
8/20/2012	3:49:35 PM	BCl3 valve closed
8/20/2012	3:49:35 PM	PH3 valve closed
8/20/2012	3:49:35 PM	SiCl4 pre valve closed
8/20/2012	3:49:35 PM	SiCl4 post valve closed
8/20/2012	3:49:35 PM	Main Vac valve closed
8/20/2012	3:49:35 PM	Bubbler valve closed
8/20/2012	3:49:35 PM	Bypass valve opened
8/20/2012	3:49:35 PM	Helium MFC set to  0.000000
8/20/2012	3:49:35 PM	H2 MFC set to  0.000000
8/20/2012	3:49:35 PM	BCl3 MFC set to  0.000000
8/20/2012	3:49:35 PM	PH3 MFC set to  0.000000
8/20/2012	3:49:35 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:49:35 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:49:35 PM	Tube furnace set to 0
8/20/2012	3:50:51 PM	Helium valve closed
8/20/2012	3:50:51 PM	H2 valve closed
8/20/2012	3:50:51 PM	BCl3 valve closed
8/20/2012	3:50:51 PM	PH3 valve closed
8/20/2012	3:50:51 PM	SiCl4 pre valve closed
8/20/2012	3:50:51 PM	SiCl4 post valve closed
8/20/2012	3:50:51 PM	Main Vac valve closed
8/20/2012	3:50:51 PM	Bubbler valve closed
8/20/2012	3:50:51 PM	Bypass valve opened
8/20/2012	3:50:51 PM	Helium MFC set to  0.000000
8/20/2012	3:50:51 PM	H2 MFC set to  0.000000
8/20/2012	3:50:51 PM	BCl3 MFC set to  0.000000
8/20/2012	3:50:51 PM	PH3 MFC set to  0.000000
8/20/2012	3:50:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:50:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:50:51 PM	Tube furnace set to 0
8/20/2012	3:51:05 PM	Helium valve closed
8/20/2012	3:51:05 PM	H2 valve closed
8/20/2012	3:51:05 PM	BCl3 valve closed
8/20/2012	3:51:05 PM	PH3 valve closed
8/20/2012	3:51:05 PM	SiCl4 pre valve closed
8/20/2012	3:51:05 PM	SiCl4 post valve closed
8/20/2012	3:51:05 PM	Bypass valve closed
8/20/2012	3:51:05 PM	Bubbler valve closed
8/20/2012	3:51:05 PM	Main Vac valve opened
8/20/2012	3:51:05 PM	Helium MFC set to  0.000000
8/20/2012	3:51:05 PM	H2 MFC set to  0.000000
8/20/2012	3:51:05 PM	BCl3 MFC set to  0.000000
8/20/2012	3:51:05 PM	PH3 MFC set to  0.000000
8/20/2012	3:51:05 PM	SiCl4 MFC set to  0.000000
8/20/2012	3:51:05 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	3:51:05 PM	Tube furnace set to 0
8/20/2012	3:51:06 PM	Run finished at 3:51 PM
8/20/2012	3:51:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	4:14:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	4:15:08 PM	Recipe started at 4:15 PM
8/20/2012	4:15:08 PM	Helium valve closed
8/20/2012	4:15:08 PM	H2 valve closed
8/20/2012	4:15:08 PM	BCl3 valve closed
8/20/2012	4:15:08 PM	PH3 valve closed
8/20/2012	4:15:08 PM	SiCl4 pre valve closed
8/20/2012	4:15:08 PM	SiCl4 post valve closed
8/20/2012	4:15:08 PM	Main Vac valve closed
8/20/2012	4:15:08 PM	Bubbler valve closed
8/20/2012	4:15:08 PM	Bypass valve opened
8/20/2012	4:15:08 PM	Helium MFC set to  0.000000
8/20/2012	4:15:08 PM	H2 MFC set to  0.000000
8/20/2012	4:15:08 PM	BCl3 MFC set to  0.000000
8/20/2012	4:15:08 PM	PH3 MFC set to  0.000000
8/20/2012	4:15:08 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:15:08 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:15:08 PM	Tube furnace set to 0
8/20/2012	4:15:08 PM	Helium valve closed
8/20/2012	4:15:08 PM	H2 valve closed
8/20/2012	4:15:08 PM	BCl3 valve closed
8/20/2012	4:15:08 PM	PH3 valve closed
8/20/2012	4:15:08 PM	SiCl4 pre valve closed
8/20/2012	4:15:08 PM	SiCl4 post valve closed
8/20/2012	4:15:08 PM	Main Vac valve closed
8/20/2012	4:15:08 PM	Bubbler valve closed
8/20/2012	4:15:08 PM	Bypass valve opened
8/20/2012	4:15:08 PM	Helium MFC set to  0.000000
8/20/2012	4:15:08 PM	H2 MFC set to  0.000000
8/20/2012	4:15:08 PM	BCl3 MFC set to  0.000000
8/20/2012	4:15:08 PM	PH3 MFC set to  0.000000
8/20/2012	4:15:08 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:15:08 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:15:08 PM	Tube furnace set to 0
8/20/2012	4:15:09 PM	Helium valve closed
8/20/2012	4:15:09 PM	H2 valve closed
8/20/2012	4:15:09 PM	BCl3 valve closed
8/20/2012	4:15:09 PM	PH3 valve closed
8/20/2012	4:15:09 PM	SiCl4 pre valve closed
8/20/2012	4:15:09 PM	SiCl4 post valve closed
8/20/2012	4:15:09 PM	Bypass valve closed
8/20/2012	4:15:09 PM	Bubbler valve closed
8/20/2012	4:15:09 PM	Main Vac valve opened
8/20/2012	4:15:09 PM	Helium MFC set to  0.000000
8/20/2012	4:15:09 PM	H2 MFC set to  0.000000
8/20/2012	4:15:09 PM	BCl3 MFC set to  0.000000
8/20/2012	4:15:09 PM	PH3 MFC set to  0.000000
8/20/2012	4:15:09 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:15:09 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:15:09 PM	Tube furnace set to 0
8/20/2012	4:15:11 PM	H2 valve closed
8/20/2012	4:15:11 PM	BCl3 valve closed
8/20/2012	4:15:11 PM	PH3 valve closed
8/20/2012	4:15:11 PM	SiCl4 pre valve closed
8/20/2012	4:15:11 PM	SiCl4 post valve closed
8/20/2012	4:15:11 PM	Bypass valve closed
8/20/2012	4:15:11 PM	Bubbler valve closed
8/20/2012	4:15:11 PM	Helium valve opened
8/20/2012	4:15:11 PM	Main Vac valve opened
8/20/2012	4:15:11 PM	Helium MFC set to  20.000000
8/20/2012	4:15:11 PM	H2 MFC set to  0.000000
8/20/2012	4:15:11 PM	BCl3 MFC set to  0.000000
8/20/2012	4:15:11 PM	PH3 MFC set to  0.000000
8/20/2012	4:15:11 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:15:11 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:15:11 PM	Tube furnace set to 0
8/20/2012	4:15:41 PM	Helium valve closed
8/20/2012	4:15:41 PM	H2 valve closed
8/20/2012	4:15:41 PM	BCl3 valve closed
8/20/2012	4:15:41 PM	PH3 valve closed
8/20/2012	4:15:41 PM	SiCl4 pre valve closed
8/20/2012	4:15:41 PM	SiCl4 post valve closed
8/20/2012	4:15:41 PM	Bypass valve closed
8/20/2012	4:15:41 PM	Bubbler valve closed
8/20/2012	4:15:41 PM	Main Vac valve opened
8/20/2012	4:15:41 PM	Helium MFC set to  0.000000
8/20/2012	4:15:41 PM	H2 MFC set to  0.000000
8/20/2012	4:15:41 PM	BCl3 MFC set to  0.000000
8/20/2012	4:15:41 PM	PH3 MFC set to  0.000000
8/20/2012	4:15:41 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:15:41 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:15:42 PM	Tube furnace set to 0
8/20/2012	4:16:12 PM	H2 valve closed
8/20/2012	4:16:12 PM	BCl3 valve closed
8/20/2012	4:16:12 PM	PH3 valve closed
8/20/2012	4:16:12 PM	SiCl4 pre valve closed
8/20/2012	4:16:12 PM	SiCl4 post valve closed
8/20/2012	4:16:12 PM	Bypass valve closed
8/20/2012	4:16:12 PM	Bubbler valve closed
8/20/2012	4:16:12 PM	Helium valve opened
8/20/2012	4:16:12 PM	Main Vac valve opened
8/20/2012	4:16:12 PM	Helium MFC set to  20.000000
8/20/2012	4:16:12 PM	H2 MFC set to  0.000000
8/20/2012	4:16:12 PM	BCl3 MFC set to  0.000000
8/20/2012	4:16:12 PM	PH3 MFC set to  0.000000
8/20/2012	4:16:12 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:16:12 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:16:12 PM	Tube furnace set to 0
8/20/2012	4:16:42 PM	Helium valve closed
8/20/2012	4:16:42 PM	H2 valve closed
8/20/2012	4:16:42 PM	BCl3 valve closed
8/20/2012	4:16:42 PM	PH3 valve closed
8/20/2012	4:16:42 PM	SiCl4 pre valve closed
8/20/2012	4:16:42 PM	SiCl4 post valve closed
8/20/2012	4:16:42 PM	Bypass valve closed
8/20/2012	4:16:42 PM	Bubbler valve closed
8/20/2012	4:16:42 PM	Main Vac valve opened
8/20/2012	4:16:42 PM	Helium MFC set to  0.000000
8/20/2012	4:16:42 PM	H2 MFC set to  0.000000
8/20/2012	4:16:42 PM	BCl3 MFC set to  0.000000
8/20/2012	4:16:42 PM	PH3 MFC set to  0.000000
8/20/2012	4:16:42 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:16:42 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:16:42 PM	Tube furnace set to 0
8/20/2012	4:17:12 PM	H2 valve closed
8/20/2012	4:17:12 PM	BCl3 valve closed
8/20/2012	4:17:12 PM	PH3 valve closed
8/20/2012	4:17:12 PM	SiCl4 pre valve closed
8/20/2012	4:17:12 PM	SiCl4 post valve closed
8/20/2012	4:17:12 PM	Bypass valve closed
8/20/2012	4:17:12 PM	Bubbler valve closed
8/20/2012	4:17:12 PM	Helium valve opened
8/20/2012	4:17:12 PM	Main Vac valve opened
8/20/2012	4:17:12 PM	Helium MFC set to  20.000000
8/20/2012	4:17:12 PM	H2 MFC set to  0.000000
8/20/2012	4:17:12 PM	BCl3 MFC set to  0.000000
8/20/2012	4:17:12 PM	PH3 MFC set to  0.000000
8/20/2012	4:17:12 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:17:12 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:17:12 PM	Tube furnace set to 0
8/20/2012	4:17:42 PM	Helium valve closed
8/20/2012	4:17:42 PM	H2 valve closed
8/20/2012	4:17:42 PM	BCl3 valve closed
8/20/2012	4:17:42 PM	PH3 valve closed
8/20/2012	4:17:42 PM	SiCl4 pre valve closed
8/20/2012	4:17:42 PM	SiCl4 post valve closed
8/20/2012	4:17:42 PM	Bypass valve closed
8/20/2012	4:17:42 PM	Bubbler valve closed
8/20/2012	4:17:42 PM	Main Vac valve opened
8/20/2012	4:17:42 PM	Helium MFC set to  0.000000
8/20/2012	4:17:42 PM	H2 MFC set to  0.000000
8/20/2012	4:17:42 PM	BCl3 MFC set to  0.000000
8/20/2012	4:17:42 PM	PH3 MFC set to  0.000000
8/20/2012	4:17:42 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:17:42 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:17:43 PM	Tube furnace set to 0
8/20/2012	4:18:13 PM	H2 valve closed
8/20/2012	4:18:13 PM	BCl3 valve closed
8/20/2012	4:18:13 PM	PH3 valve closed
8/20/2012	4:18:13 PM	SiCl4 pre valve closed
8/20/2012	4:18:13 PM	SiCl4 post valve closed
8/20/2012	4:18:13 PM	Bypass valve closed
8/20/2012	4:18:13 PM	Bubbler valve closed
8/20/2012	4:18:13 PM	Helium valve opened
8/20/2012	4:18:13 PM	Main Vac valve opened
8/20/2012	4:18:13 PM	Helium MFC set to  20.000000
8/20/2012	4:18:13 PM	H2 MFC set to  0.000000
8/20/2012	4:18:13 PM	BCl3 MFC set to  0.000000
8/20/2012	4:18:13 PM	PH3 MFC set to  0.000000
8/20/2012	4:18:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:18:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:18:13 PM	Tube furnace set to 0
8/20/2012	4:18:43 PM	Helium valve closed
8/20/2012	4:18:43 PM	H2 valve closed
8/20/2012	4:18:43 PM	BCl3 valve closed
8/20/2012	4:18:43 PM	PH3 valve closed
8/20/2012	4:18:43 PM	SiCl4 pre valve closed
8/20/2012	4:18:43 PM	SiCl4 post valve closed
8/20/2012	4:18:43 PM	Bypass valve closed
8/20/2012	4:18:43 PM	Bubbler valve closed
8/20/2012	4:18:43 PM	Main Vac valve opened
8/20/2012	4:18:43 PM	Helium MFC set to  0.000000
8/20/2012	4:18:43 PM	H2 MFC set to  0.000000
8/20/2012	4:18:43 PM	BCl3 MFC set to  0.000000
8/20/2012	4:18:43 PM	PH3 MFC set to  0.000000
8/20/2012	4:18:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:18:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:18:43 PM	Tube furnace set to 0
8/20/2012	4:19:13 PM	H2 valve closed
8/20/2012	4:19:13 PM	BCl3 valve closed
8/20/2012	4:19:13 PM	PH3 valve closed
8/20/2012	4:19:13 PM	SiCl4 pre valve closed
8/20/2012	4:19:13 PM	SiCl4 post valve closed
8/20/2012	4:19:13 PM	Bypass valve closed
8/20/2012	4:19:13 PM	Bubbler valve closed
8/20/2012	4:19:13 PM	Helium valve opened
8/20/2012	4:19:13 PM	Main Vac valve opened
8/20/2012	4:19:13 PM	Helium MFC set to  20.000000
8/20/2012	4:19:13 PM	H2 MFC set to  0.000000
8/20/2012	4:19:13 PM	BCl3 MFC set to  0.000000
8/20/2012	4:19:13 PM	PH3 MFC set to  0.000000
8/20/2012	4:19:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:19:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:19:13 PM	Tube furnace set to 0
8/20/2012	4:19:43 PM	Helium valve closed
8/20/2012	4:19:43 PM	H2 valve closed
8/20/2012	4:19:43 PM	BCl3 valve closed
8/20/2012	4:19:43 PM	PH3 valve closed
8/20/2012	4:19:43 PM	SiCl4 pre valve closed
8/20/2012	4:19:43 PM	SiCl4 post valve closed
8/20/2012	4:19:43 PM	Bypass valve closed
8/20/2012	4:19:43 PM	Bubbler valve closed
8/20/2012	4:19:43 PM	Main Vac valve opened
8/20/2012	4:19:43 PM	Helium MFC set to  0.000000
8/20/2012	4:19:43 PM	H2 MFC set to  0.000000
8/20/2012	4:19:43 PM	BCl3 MFC set to  0.000000
8/20/2012	4:19:43 PM	PH3 MFC set to  0.000000
8/20/2012	4:19:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:19:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:19:43 PM	Tube furnace set to 0
8/20/2012	4:20:14 PM	H2 valve closed
8/20/2012	4:20:14 PM	BCl3 valve closed
8/20/2012	4:20:14 PM	PH3 valve closed
8/20/2012	4:20:14 PM	SiCl4 pre valve closed
8/20/2012	4:20:14 PM	SiCl4 post valve closed
8/20/2012	4:20:14 PM	Bypass valve closed
8/20/2012	4:20:14 PM	Bubbler valve closed
8/20/2012	4:20:14 PM	Helium valve opened
8/20/2012	4:20:14 PM	Main Vac valve opened
8/20/2012	4:20:14 PM	Helium MFC set to  20.000000
8/20/2012	4:20:14 PM	H2 MFC set to  0.000000
8/20/2012	4:20:14 PM	BCl3 MFC set to  0.000000
8/20/2012	4:20:14 PM	PH3 MFC set to  0.000000
8/20/2012	4:20:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:20:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:20:14 PM	Tube furnace set to 0
8/20/2012	4:20:44 PM	Helium valve closed
8/20/2012	4:20:44 PM	H2 valve closed
8/20/2012	4:20:44 PM	BCl3 valve closed
8/20/2012	4:20:44 PM	PH3 valve closed
8/20/2012	4:20:44 PM	SiCl4 pre valve closed
8/20/2012	4:20:44 PM	SiCl4 post valve closed
8/20/2012	4:20:44 PM	Bypass valve closed
8/20/2012	4:20:44 PM	Bubbler valve closed
8/20/2012	4:20:44 PM	Main Vac valve opened
8/20/2012	4:20:44 PM	Helium MFC set to  0.000000
8/20/2012	4:20:44 PM	H2 MFC set to  0.000000
8/20/2012	4:20:44 PM	BCl3 MFC set to  0.000000
8/20/2012	4:20:44 PM	PH3 MFC set to  0.000000
8/20/2012	4:20:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:20:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:20:44 PM	Tube furnace set to 0
8/20/2012	4:21:14 PM	H2 valve closed
8/20/2012	4:21:14 PM	BCl3 valve closed
8/20/2012	4:21:14 PM	PH3 valve closed
8/20/2012	4:21:14 PM	SiCl4 pre valve closed
8/20/2012	4:21:14 PM	SiCl4 post valve closed
8/20/2012	4:21:14 PM	Bypass valve closed
8/20/2012	4:21:14 PM	Bubbler valve closed
8/20/2012	4:21:14 PM	Helium valve opened
8/20/2012	4:21:14 PM	Main Vac valve opened
8/20/2012	4:21:14 PM	Helium MFC set to  20.000000
8/20/2012	4:21:14 PM	H2 MFC set to  0.000000
8/20/2012	4:21:14 PM	BCl3 MFC set to  0.000000
8/20/2012	4:21:14 PM	PH3 MFC set to  0.000000
8/20/2012	4:21:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:21:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:21:14 PM	Tube furnace set to 0
8/20/2012	4:21:44 PM	Helium valve closed
8/20/2012	4:21:44 PM	H2 valve closed
8/20/2012	4:21:44 PM	BCl3 valve closed
8/20/2012	4:21:44 PM	PH3 valve closed
8/20/2012	4:21:44 PM	SiCl4 pre valve closed
8/20/2012	4:21:44 PM	SiCl4 post valve closed
8/20/2012	4:21:44 PM	Bypass valve closed
8/20/2012	4:21:44 PM	Bubbler valve closed
8/20/2012	4:21:44 PM	Main Vac valve opened
8/20/2012	4:21:44 PM	Helium MFC set to  0.000000
8/20/2012	4:21:44 PM	H2 MFC set to  0.000000
8/20/2012	4:21:44 PM	BCl3 MFC set to  0.000000
8/20/2012	4:21:44 PM	PH3 MFC set to  0.000000
8/20/2012	4:21:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:21:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:21:44 PM	Tube furnace set to 0
8/20/2012	4:22:14 PM	H2 valve closed
8/20/2012	4:22:14 PM	BCl3 valve closed
8/20/2012	4:22:14 PM	PH3 valve closed
8/20/2012	4:22:14 PM	SiCl4 pre valve closed
8/20/2012	4:22:14 PM	SiCl4 post valve closed
8/20/2012	4:22:14 PM	Bypass valve closed
8/20/2012	4:22:14 PM	Bubbler valve closed
8/20/2012	4:22:15 PM	Helium valve opened
8/20/2012	4:22:15 PM	Main Vac valve opened
8/20/2012	4:22:15 PM	Helium MFC set to  20.000000
8/20/2012	4:22:15 PM	H2 MFC set to  0.000000
8/20/2012	4:22:15 PM	BCl3 MFC set to  0.000000
8/20/2012	4:22:15 PM	PH3 MFC set to  0.000000
8/20/2012	4:22:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:22:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:22:15 PM	Tube furnace set to 0
8/20/2012	4:22:45 PM	Helium valve closed
8/20/2012	4:22:45 PM	H2 valve closed
8/20/2012	4:22:45 PM	BCl3 valve closed
8/20/2012	4:22:45 PM	PH3 valve closed
8/20/2012	4:22:45 PM	SiCl4 pre valve closed
8/20/2012	4:22:45 PM	SiCl4 post valve closed
8/20/2012	4:22:45 PM	Bypass valve closed
8/20/2012	4:22:45 PM	Bubbler valve closed
8/20/2012	4:22:45 PM	Main Vac valve opened
8/20/2012	4:22:45 PM	Helium MFC set to  0.000000
8/20/2012	4:22:45 PM	H2 MFC set to  0.000000
8/20/2012	4:22:45 PM	BCl3 MFC set to  0.000000
8/20/2012	4:22:45 PM	PH3 MFC set to  0.000000
8/20/2012	4:22:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:22:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:22:45 PM	Tube furnace set to 0
8/20/2012	4:23:15 PM	H2 valve closed
8/20/2012	4:23:15 PM	BCl3 valve closed
8/20/2012	4:23:15 PM	PH3 valve closed
8/20/2012	4:23:15 PM	SiCl4 pre valve closed
8/20/2012	4:23:15 PM	SiCl4 post valve closed
8/20/2012	4:23:15 PM	Bypass valve closed
8/20/2012	4:23:15 PM	Bubbler valve closed
8/20/2012	4:23:15 PM	Helium valve opened
8/20/2012	4:23:15 PM	Main Vac valve opened
8/20/2012	4:23:15 PM	Helium MFC set to  20.000000
8/20/2012	4:23:15 PM	H2 MFC set to  0.000000
8/20/2012	4:23:15 PM	BCl3 MFC set to  0.000000
8/20/2012	4:23:15 PM	PH3 MFC set to  0.000000
8/20/2012	4:23:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:23:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:23:15 PM	Tube furnace set to 0
8/20/2012	4:23:45 PM	Helium valve closed
8/20/2012	4:23:45 PM	H2 valve closed
8/20/2012	4:23:45 PM	BCl3 valve closed
8/20/2012	4:23:45 PM	PH3 valve closed
8/20/2012	4:23:45 PM	SiCl4 pre valve closed
8/20/2012	4:23:45 PM	SiCl4 post valve closed
8/20/2012	4:23:45 PM	Bypass valve closed
8/20/2012	4:23:45 PM	Bubbler valve closed
8/20/2012	4:23:45 PM	Main Vac valve opened
8/20/2012	4:23:45 PM	Helium MFC set to  0.000000
8/20/2012	4:23:45 PM	H2 MFC set to  0.000000
8/20/2012	4:23:45 PM	BCl3 MFC set to  0.000000
8/20/2012	4:23:45 PM	PH3 MFC set to  0.000000
8/20/2012	4:23:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:23:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:23:45 PM	Tube furnace set to 0
8/20/2012	4:24:15 PM	H2 valve closed
8/20/2012	4:24:15 PM	BCl3 valve closed
8/20/2012	4:24:15 PM	PH3 valve closed
8/20/2012	4:24:15 PM	SiCl4 pre valve closed
8/20/2012	4:24:15 PM	SiCl4 post valve closed
8/20/2012	4:24:15 PM	Bypass valve closed
8/20/2012	4:24:15 PM	Bubbler valve closed
8/20/2012	4:24:15 PM	Helium valve opened
8/20/2012	4:24:15 PM	Main Vac valve opened
8/20/2012	4:24:15 PM	Helium MFC set to  20.000000
8/20/2012	4:24:15 PM	H2 MFC set to  0.000000
8/20/2012	4:24:15 PM	BCl3 MFC set to  0.000000
8/20/2012	4:24:15 PM	PH3 MFC set to  0.000000
8/20/2012	4:24:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:24:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:24:16 PM	Tube furnace set to 0
8/20/2012	4:24:46 PM	Helium valve closed
8/20/2012	4:24:46 PM	H2 valve closed
8/20/2012	4:24:46 PM	BCl3 valve closed
8/20/2012	4:24:46 PM	PH3 valve closed
8/20/2012	4:24:46 PM	SiCl4 pre valve closed
8/20/2012	4:24:46 PM	SiCl4 post valve closed
8/20/2012	4:24:46 PM	Bypass valve closed
8/20/2012	4:24:46 PM	Bubbler valve closed
8/20/2012	4:24:46 PM	Main Vac valve opened
8/20/2012	4:24:46 PM	Helium MFC set to  0.000000
8/20/2012	4:24:46 PM	H2 MFC set to  0.000000
8/20/2012	4:24:46 PM	BCl3 MFC set to  0.000000
8/20/2012	4:24:46 PM	PH3 MFC set to  0.000000
8/20/2012	4:24:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:24:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:24:46 PM	Tube furnace set to 0
8/20/2012	4:24:47 PM	Run finished at 4:24 PM
8/20/2012	4:24:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	4:29:33 PM	Recipe started at 4:29 PM
8/20/2012	4:29:33 PM	Helium valve closed
8/20/2012	4:29:33 PM	H2 valve closed
8/20/2012	4:29:33 PM	BCl3 valve closed
8/20/2012	4:29:33 PM	PH3 valve closed
8/20/2012	4:29:33 PM	SiCl4 pre valve closed
8/20/2012	4:29:33 PM	SiCl4 post valve closed
8/20/2012	4:29:33 PM	Main Vac valve closed
8/20/2012	4:29:33 PM	Bypass valve closed
8/20/2012	4:29:33 PM	Bubbler valve closed
8/20/2012	4:29:33 PM	Helium MFC set to  0.000000
8/20/2012	4:29:33 PM	H2 MFC set to  0.000000
8/20/2012	4:29:33 PM	BCl3 MFC set to  0.000000
8/20/2012	4:29:33 PM	PH3 MFC set to  0.000000
8/20/2012	4:29:33 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:29:33 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:29:34 PM	Tube furnace set to 0
8/20/2012	4:29:37 PM	Helium valve closed
8/20/2012	4:29:37 PM	BCl3 valve closed
8/20/2012	4:29:37 PM	PH3 valve closed
8/20/2012	4:29:37 PM	SiCl4 pre valve closed
8/20/2012	4:29:37 PM	SiCl4 post valve closed
8/20/2012	4:29:37 PM	Main Vac valve closed
8/20/2012	4:29:37 PM	Bypass valve closed
8/20/2012	4:29:37 PM	Bubbler valve closed
8/20/2012	4:29:37 PM	H2 valve opened
8/20/2012	4:29:37 PM	Helium MFC set to  0.000000
8/20/2012	4:29:37 PM	H2 MFC set to  500.000000
8/20/2012	4:29:37 PM	BCl3 MFC set to  0.000000
8/20/2012	4:29:37 PM	PH3 MFC set to  0.000000
8/20/2012	4:29:37 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:29:37 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:29:37 PM	Tube furnace set to 0
8/20/2012	4:30:52 PM	Helium valve closed
8/20/2012	4:30:52 PM	BCl3 valve closed
8/20/2012	4:30:52 PM	PH3 valve closed
8/20/2012	4:30:52 PM	SiCl4 pre valve closed
8/20/2012	4:30:52 PM	SiCl4 post valve closed
8/20/2012	4:30:52 PM	Main Vac valve closed
8/20/2012	4:30:52 PM	Bypass valve closed
8/20/2012	4:30:52 PM	H2 valve opened
8/20/2012	4:30:52 PM	Bubbler valve opened
8/20/2012	4:30:52 PM	Helium MFC set to  0.000000
8/20/2012	4:30:52 PM	H2 MFC set to  500.000000
8/20/2012	4:30:52 PM	BCl3 MFC set to  0.000000
8/20/2012	4:30:52 PM	PH3 MFC set to  0.000000
8/20/2012	4:30:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:30:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:30:53 PM	Tube furnace set to 0
8/20/2012	4:30:54 PM	Helium valve closed
8/20/2012	4:30:54 PM	BCl3 valve closed
8/20/2012	4:30:54 PM	PH3 valve closed
8/20/2012	4:30:54 PM	SiCl4 pre valve closed
8/20/2012	4:30:54 PM	SiCl4 post valve closed
8/20/2012	4:30:54 PM	Main Vac valve closed
8/20/2012	4:30:54 PM	Bypass valve closed
8/20/2012	4:30:54 PM	H2 valve opened
8/20/2012	4:30:54 PM	Bubbler valve opened
8/20/2012	4:30:54 PM	Helium MFC set to  0.000000
8/20/2012	4:30:54 PM	H2 MFC set to  500.000000
8/20/2012	4:30:54 PM	BCl3 MFC set to  0.000000
8/20/2012	4:30:54 PM	PH3 MFC set to  0.000000
8/20/2012	4:30:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	4:30:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:30:54 PM	Tube furnace set to 1000
8/20/2012	4:50:54 PM	Helium valve closed
8/20/2012	4:50:54 PM	PH3 valve closed
8/20/2012	4:50:54 PM	Main Vac valve closed
8/20/2012	4:50:54 PM	Bypass valve closed
8/20/2012	4:50:54 PM	H2 valve opened
8/20/2012	4:50:54 PM	BCl3 valve opened
8/20/2012	4:50:54 PM	SiCl4 pre valve opened
8/20/2012	4:50:54 PM	SiCl4 post valve opened
8/20/2012	4:50:54 PM	Bubbler valve opened
8/20/2012	4:50:54 PM	Helium MFC set to  0.000000
8/20/2012	4:50:54 PM	H2 MFC set to  450.000000
8/20/2012	4:50:54 PM	BCl3 MFC set to  1.300000
8/20/2012	4:50:54 PM	PH3 MFC set to  0.000000
8/20/2012	4:50:54 PM	SiCl4 MFC set to  50.000000
8/20/2012	4:50:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	4:50:54 PM	Tube furnace set to 1000
8/20/2012	5:05:54 PM	Helium valve closed
8/20/2012	5:05:54 PM	BCl3 valve closed
8/20/2012	5:05:54 PM	PH3 valve closed
8/20/2012	5:05:54 PM	SiCl4 pre valve closed
8/20/2012	5:05:54 PM	SiCl4 post valve closed
8/20/2012	5:05:54 PM	Main Vac valve closed
8/20/2012	5:05:54 PM	Bypass valve closed
8/20/2012	5:05:54 PM	H2 valve opened
8/20/2012	5:05:54 PM	Bubbler valve opened
8/20/2012	5:05:54 PM	Helium MFC set to  0.000000
8/20/2012	5:05:54 PM	H2 MFC set to  500.000000
8/20/2012	5:05:54 PM	BCl3 MFC set to  0.000000
8/20/2012	5:05:54 PM	PH3 MFC set to  0.000000
8/20/2012	5:05:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:05:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:05:54 PM	Tube furnace set to 750
8/20/2012	5:10:54 PM	H2 valve closed
8/20/2012	5:10:54 PM	BCl3 valve closed
8/20/2012	5:10:54 PM	PH3 valve closed
8/20/2012	5:10:54 PM	SiCl4 pre valve closed
8/20/2012	5:10:54 PM	SiCl4 post valve closed
8/20/2012	5:10:54 PM	Main Vac valve closed
8/20/2012	5:10:54 PM	Bypass valve closed
8/20/2012	5:10:54 PM	Helium valve opened
8/20/2012	5:10:54 PM	Bubbler valve opened
8/20/2012	5:10:54 PM	Helium MFC set to  500.000000
8/20/2012	5:10:54 PM	H2 MFC set to  0.000000
8/20/2012	5:10:54 PM	BCl3 MFC set to  0.000000
8/20/2012	5:10:54 PM	PH3 MFC set to  0.000000
8/20/2012	5:10:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:10:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:10:55 PM	Tube furnace set to 0
8/20/2012	5:19:19 PM	Helium valve closed
8/20/2012	5:19:19 PM	H2 valve closed
8/20/2012	5:19:19 PM	BCl3 valve closed
8/20/2012	5:19:19 PM	PH3 valve closed
8/20/2012	5:19:19 PM	SiCl4 pre valve closed
8/20/2012	5:19:19 PM	SiCl4 post valve closed
8/20/2012	5:19:19 PM	Main Vac valve closed
8/20/2012	5:19:19 PM	Bypass valve closed
8/20/2012	5:19:19 PM	Bubbler valve closed
8/20/2012	5:19:19 PM	Helium MFC set to  0.000000
8/20/2012	5:19:19 PM	H2 MFC set to  0.000000
8/20/2012	5:19:19 PM	BCl3 MFC set to  0.000000
8/20/2012	5:19:19 PM	PH3 MFC set to  0.000000
8/20/2012	5:19:19 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:19:19 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:19:19 PM	Tube furnace set to 0
8/20/2012	5:19:20 PM	Run finished at 5:19 PM
8/20/2012	5:19:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	5:19:23 PM	Recipe started at 5:19 PM
8/20/2012	5:19:23 PM	Helium valve closed
8/20/2012	5:19:23 PM	H2 valve closed
8/20/2012	5:19:23 PM	BCl3 valve closed
8/20/2012	5:19:23 PM	PH3 valve closed
8/20/2012	5:19:23 PM	SiCl4 pre valve closed
8/20/2012	5:19:23 PM	SiCl4 post valve closed
8/20/2012	5:19:24 PM	Main Vac valve closed
8/20/2012	5:19:24 PM	Bypass valve closed
8/20/2012	5:19:24 PM	Bubbler valve closed
8/20/2012	5:19:24 PM	Helium MFC set to  0.000000
8/20/2012	5:19:24 PM	H2 MFC set to  0.000000
8/20/2012	5:19:24 PM	BCl3 MFC set to  0.000000
8/20/2012	5:19:24 PM	PH3 MFC set to  0.000000
8/20/2012	5:19:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:19:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:19:24 PM	Tube furnace set to 0
8/20/2012	5:19:27 PM	H2 valve closed
8/20/2012	5:19:27 PM	BCl3 valve closed
8/20/2012	5:19:27 PM	PH3 valve closed
8/20/2012	5:19:27 PM	SiCl4 pre valve closed
8/20/2012	5:19:27 PM	SiCl4 post valve closed
8/20/2012	5:19:27 PM	Main Vac valve closed
8/20/2012	5:19:27 PM	Bypass valve closed
8/20/2012	5:19:27 PM	Bubbler valve closed
8/20/2012	5:19:27 PM	Helium valve opened
8/20/2012	5:19:27 PM	Helium MFC set to  500.000000
8/20/2012	5:19:27 PM	H2 MFC set to  0.000000
8/20/2012	5:19:27 PM	BCl3 MFC set to  0.000000
8/20/2012	5:19:27 PM	PH3 MFC set to  0.000000
8/20/2012	5:19:27 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:19:27 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:19:27 PM	Tube furnace set to 0
8/20/2012	5:19:27 PM	Helium valve closed
8/20/2012	5:19:27 PM	H2 valve closed
8/20/2012	5:19:27 PM	BCl3 valve closed
8/20/2012	5:19:27 PM	PH3 valve closed
8/20/2012	5:19:27 PM	SiCl4 pre valve closed
8/20/2012	5:19:27 PM	SiCl4 post valve closed
8/20/2012	5:19:27 PM	Main Vac valve closed
8/20/2012	5:19:27 PM	Bypass valve closed
8/20/2012	5:19:27 PM	Bubbler valve closed
8/20/2012	5:19:27 PM	Helium MFC set to  0.000000
8/20/2012	5:19:27 PM	H2 MFC set to  0.000000
8/20/2012	5:19:27 PM	BCl3 MFC set to  0.000000
8/20/2012	5:19:27 PM	PH3 MFC set to  0.000000
8/20/2012	5:19:27 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:19:27 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:19:27 PM	Tube furnace set to 0
8/20/2012	5:19:28 PM	Run finished at 5:19 PM
8/20/2012	5:19:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	5:23:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	5:23:07 PM	Recipe started at 5:23 PM
8/20/2012	5:23:07 PM	Helium valve closed
8/20/2012	5:23:07 PM	H2 valve closed
8/20/2012	5:23:07 PM	BCl3 valve closed
8/20/2012	5:23:07 PM	PH3 valve closed
8/20/2012	5:23:07 PM	SiCl4 pre valve closed
8/20/2012	5:23:07 PM	SiCl4 post valve closed
8/20/2012	5:23:07 PM	Main Vac valve closed
8/20/2012	5:23:07 PM	Bubbler valve closed
8/20/2012	5:23:07 PM	Bypass valve opened
8/20/2012	5:23:07 PM	Helium MFC set to  0.000000
8/20/2012	5:23:07 PM	H2 MFC set to  0.000000
8/20/2012	5:23:07 PM	BCl3 MFC set to  0.000000
8/20/2012	5:23:07 PM	PH3 MFC set to  0.000000
8/20/2012	5:23:08 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:23:08 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:23:08 PM	Tube furnace set to 0
8/20/2012	5:24:19 PM	Helium valve closed
8/20/2012	5:24:19 PM	H2 valve closed
8/20/2012	5:24:19 PM	BCl3 valve closed
8/20/2012	5:24:19 PM	PH3 valve closed
8/20/2012	5:24:19 PM	SiCl4 pre valve closed
8/20/2012	5:24:19 PM	SiCl4 post valve closed
8/20/2012	5:24:19 PM	Main Vac valve closed
8/20/2012	5:24:19 PM	Bubbler valve closed
8/20/2012	5:24:19 PM	Bypass valve opened
8/20/2012	5:24:19 PM	Helium MFC set to  0.000000
8/20/2012	5:24:19 PM	H2 MFC set to  0.000000
8/20/2012	5:24:19 PM	BCl3 MFC set to  0.000000
8/20/2012	5:24:19 PM	PH3 MFC set to  0.000000
8/20/2012	5:24:19 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:24:19 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:24:20 PM	Tube furnace set to 0
8/20/2012	5:24:36 PM	Helium valve closed
8/20/2012	5:24:36 PM	H2 valve closed
8/20/2012	5:24:36 PM	BCl3 valve closed
8/20/2012	5:24:36 PM	PH3 valve closed
8/20/2012	5:24:36 PM	SiCl4 pre valve closed
8/20/2012	5:24:36 PM	SiCl4 post valve closed
8/20/2012	5:24:36 PM	Bypass valve closed
8/20/2012	5:24:36 PM	Bubbler valve closed
8/20/2012	5:24:36 PM	Main Vac valve opened
8/20/2012	5:24:36 PM	Helium MFC set to  0.000000
8/20/2012	5:24:36 PM	H2 MFC set to  0.000000
8/20/2012	5:24:36 PM	BCl3 MFC set to  0.000000
8/20/2012	5:24:36 PM	PH3 MFC set to  0.000000
8/20/2012	5:24:36 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:24:36 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:24:36 PM	Tube furnace set to 0
8/20/2012	5:24:37 PM	Run finished at 5:24 PM
8/20/2012	5:24:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	5:43:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	5:43:48 PM	Recipe started at 5:43 PM
8/20/2012	5:43:48 PM	Helium valve closed
8/20/2012	5:43:48 PM	H2 valve closed
8/20/2012	5:43:48 PM	BCl3 valve closed
8/20/2012	5:43:48 PM	PH3 valve closed
8/20/2012	5:43:48 PM	SiCl4 pre valve closed
8/20/2012	5:43:48 PM	SiCl4 post valve closed
8/20/2012	5:43:48 PM	Main Vac valve closed
8/20/2012	5:43:48 PM	Bubbler valve closed
8/20/2012	5:43:48 PM	Bypass valve opened
8/20/2012	5:43:48 PM	Helium MFC set to  0.000000
8/20/2012	5:43:48 PM	H2 MFC set to  0.000000
8/20/2012	5:43:48 PM	BCl3 MFC set to  0.000000
8/20/2012	5:43:48 PM	PH3 MFC set to  0.000000
8/20/2012	5:43:48 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:43:48 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:43:48 PM	Tube furnace set to 0
8/20/2012	5:43:48 PM	Helium valve closed
8/20/2012	5:43:48 PM	H2 valve closed
8/20/2012	5:43:48 PM	BCl3 valve closed
8/20/2012	5:43:48 PM	PH3 valve closed
8/20/2012	5:43:48 PM	SiCl4 pre valve closed
8/20/2012	5:43:48 PM	SiCl4 post valve closed
8/20/2012	5:43:48 PM	Main Vac valve closed
8/20/2012	5:43:48 PM	Bubbler valve closed
8/20/2012	5:43:48 PM	Bypass valve opened
8/20/2012	5:43:48 PM	Helium MFC set to  0.000000
8/20/2012	5:43:48 PM	H2 MFC set to  0.000000
8/20/2012	5:43:48 PM	BCl3 MFC set to  0.000000
8/20/2012	5:43:48 PM	PH3 MFC set to  0.000000
8/20/2012	5:43:48 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:43:48 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:43:48 PM	Tube furnace set to 0
8/20/2012	5:43:50 PM	Helium valve closed
8/20/2012	5:43:50 PM	H2 valve closed
8/20/2012	5:43:50 PM	BCl3 valve closed
8/20/2012	5:43:50 PM	PH3 valve closed
8/20/2012	5:43:50 PM	SiCl4 pre valve closed
8/20/2012	5:43:50 PM	SiCl4 post valve closed
8/20/2012	5:43:50 PM	Bypass valve closed
8/20/2012	5:43:50 PM	Bubbler valve closed
8/20/2012	5:43:50 PM	Main Vac valve opened
8/20/2012	5:43:50 PM	Helium MFC set to  0.000000
8/20/2012	5:43:50 PM	H2 MFC set to  0.000000
8/20/2012	5:43:50 PM	BCl3 MFC set to  0.000000
8/20/2012	5:43:50 PM	PH3 MFC set to  0.000000
8/20/2012	5:43:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:43:50 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:43:50 PM	Tube furnace set to 0
8/20/2012	5:44:20 PM	H2 valve closed
8/20/2012	5:44:20 PM	BCl3 valve closed
8/20/2012	5:44:20 PM	PH3 valve closed
8/20/2012	5:44:20 PM	SiCl4 pre valve closed
8/20/2012	5:44:20 PM	SiCl4 post valve closed
8/20/2012	5:44:20 PM	Bypass valve closed
8/20/2012	5:44:20 PM	Bubbler valve closed
8/20/2012	5:44:20 PM	Helium valve opened
8/20/2012	5:44:20 PM	Main Vac valve opened
8/20/2012	5:44:20 PM	Helium MFC set to  20.000000
8/20/2012	5:44:20 PM	H2 MFC set to  0.000000
8/20/2012	5:44:20 PM	BCl3 MFC set to  0.000000
8/20/2012	5:44:20 PM	PH3 MFC set to  0.000000
8/20/2012	5:44:20 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:44:20 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:44:20 PM	Tube furnace set to 0
8/20/2012	5:44:50 PM	Helium valve closed
8/20/2012	5:44:50 PM	H2 valve closed
8/20/2012	5:44:50 PM	BCl3 valve closed
8/20/2012	5:44:50 PM	PH3 valve closed
8/20/2012	5:44:50 PM	SiCl4 pre valve closed
8/20/2012	5:44:50 PM	SiCl4 post valve closed
8/20/2012	5:44:50 PM	Bypass valve closed
8/20/2012	5:44:50 PM	Bubbler valve closed
8/20/2012	5:44:50 PM	Main Vac valve opened
8/20/2012	5:44:50 PM	Helium MFC set to  0.000000
8/20/2012	5:44:50 PM	H2 MFC set to  0.000000
8/20/2012	5:44:50 PM	BCl3 MFC set to  0.000000
8/20/2012	5:44:50 PM	PH3 MFC set to  0.000000
8/20/2012	5:44:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:44:50 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:44:50 PM	Tube furnace set to 0
8/20/2012	5:45:20 PM	H2 valve closed
8/20/2012	5:45:20 PM	BCl3 valve closed
8/20/2012	5:45:20 PM	PH3 valve closed
8/20/2012	5:45:20 PM	SiCl4 pre valve closed
8/20/2012	5:45:20 PM	SiCl4 post valve closed
8/20/2012	5:45:20 PM	Bypass valve closed
8/20/2012	5:45:20 PM	Bubbler valve closed
8/20/2012	5:45:20 PM	Helium valve opened
8/20/2012	5:45:20 PM	Main Vac valve opened
8/20/2012	5:45:20 PM	Helium MFC set to  20.000000
8/20/2012	5:45:20 PM	H2 MFC set to  0.000000
8/20/2012	5:45:20 PM	BCl3 MFC set to  0.000000
8/20/2012	5:45:20 PM	PH3 MFC set to  0.000000
8/20/2012	5:45:20 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:45:21 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:45:21 PM	Tube furnace set to 0
8/20/2012	5:45:51 PM	Helium valve closed
8/20/2012	5:45:51 PM	H2 valve closed
8/20/2012	5:45:51 PM	BCl3 valve closed
8/20/2012	5:45:51 PM	PH3 valve closed
8/20/2012	5:45:51 PM	SiCl4 pre valve closed
8/20/2012	5:45:51 PM	SiCl4 post valve closed
8/20/2012	5:45:51 PM	Bypass valve closed
8/20/2012	5:45:51 PM	Bubbler valve closed
8/20/2012	5:45:51 PM	Main Vac valve opened
8/20/2012	5:45:51 PM	Helium MFC set to  0.000000
8/20/2012	5:45:51 PM	H2 MFC set to  0.000000
8/20/2012	5:45:51 PM	BCl3 MFC set to  0.000000
8/20/2012	5:45:51 PM	PH3 MFC set to  0.000000
8/20/2012	5:45:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:45:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:45:51 PM	Tube furnace set to 0
8/20/2012	5:46:21 PM	H2 valve closed
8/20/2012	5:46:21 PM	BCl3 valve closed
8/20/2012	5:46:21 PM	PH3 valve closed
8/20/2012	5:46:21 PM	SiCl4 pre valve closed
8/20/2012	5:46:21 PM	SiCl4 post valve closed
8/20/2012	5:46:21 PM	Bypass valve closed
8/20/2012	5:46:21 PM	Bubbler valve closed
8/20/2012	5:46:21 PM	Helium valve opened
8/20/2012	5:46:21 PM	Main Vac valve opened
8/20/2012	5:46:21 PM	Helium MFC set to  20.000000
8/20/2012	5:46:21 PM	H2 MFC set to  0.000000
8/20/2012	5:46:21 PM	BCl3 MFC set to  0.000000
8/20/2012	5:46:21 PM	PH3 MFC set to  0.000000
8/20/2012	5:46:21 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:46:21 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:46:21 PM	Tube furnace set to 0
8/20/2012	5:46:51 PM	Helium valve closed
8/20/2012	5:46:51 PM	H2 valve closed
8/20/2012	5:46:51 PM	BCl3 valve closed
8/20/2012	5:46:51 PM	PH3 valve closed
8/20/2012	5:46:51 PM	SiCl4 pre valve closed
8/20/2012	5:46:51 PM	SiCl4 post valve closed
8/20/2012	5:46:51 PM	Bypass valve closed
8/20/2012	5:46:51 PM	Bubbler valve closed
8/20/2012	5:46:51 PM	Main Vac valve opened
8/20/2012	5:46:51 PM	Helium MFC set to  0.000000
8/20/2012	5:46:51 PM	H2 MFC set to  0.000000
8/20/2012	5:46:51 PM	BCl3 MFC set to  0.000000
8/20/2012	5:46:51 PM	PH3 MFC set to  0.000000
8/20/2012	5:46:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:46:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:46:51 PM	Tube furnace set to 0
8/20/2012	5:47:21 PM	H2 valve closed
8/20/2012	5:47:21 PM	BCl3 valve closed
8/20/2012	5:47:21 PM	PH3 valve closed
8/20/2012	5:47:21 PM	SiCl4 pre valve closed
8/20/2012	5:47:21 PM	SiCl4 post valve closed
8/20/2012	5:47:21 PM	Bypass valve closed
8/20/2012	5:47:21 PM	Bubbler valve closed
8/20/2012	5:47:21 PM	Helium valve opened
8/20/2012	5:47:21 PM	Main Vac valve opened
8/20/2012	5:47:21 PM	Helium MFC set to  20.000000
8/20/2012	5:47:21 PM	H2 MFC set to  0.000000
8/20/2012	5:47:21 PM	BCl3 MFC set to  0.000000
8/20/2012	5:47:21 PM	PH3 MFC set to  0.000000
8/20/2012	5:47:21 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:47:21 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:47:22 PM	Tube furnace set to 0
8/20/2012	5:47:52 PM	Helium valve closed
8/20/2012	5:47:52 PM	H2 valve closed
8/20/2012	5:47:52 PM	BCl3 valve closed
8/20/2012	5:47:52 PM	PH3 valve closed
8/20/2012	5:47:52 PM	SiCl4 pre valve closed
8/20/2012	5:47:52 PM	SiCl4 post valve closed
8/20/2012	5:47:52 PM	Bypass valve closed
8/20/2012	5:47:52 PM	Bubbler valve closed
8/20/2012	5:47:52 PM	Main Vac valve opened
8/20/2012	5:47:52 PM	Helium MFC set to  0.000000
8/20/2012	5:47:52 PM	H2 MFC set to  0.000000
8/20/2012	5:47:52 PM	BCl3 MFC set to  0.000000
8/20/2012	5:47:52 PM	PH3 MFC set to  0.000000
8/20/2012	5:47:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:47:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:47:52 PM	Tube furnace set to 0
8/20/2012	5:48:22 PM	H2 valve closed
8/20/2012	5:48:22 PM	BCl3 valve closed
8/20/2012	5:48:22 PM	PH3 valve closed
8/20/2012	5:48:22 PM	SiCl4 pre valve closed
8/20/2012	5:48:22 PM	SiCl4 post valve closed
8/20/2012	5:48:22 PM	Bypass valve closed
8/20/2012	5:48:22 PM	Bubbler valve closed
8/20/2012	5:48:22 PM	Helium valve opened
8/20/2012	5:48:22 PM	Main Vac valve opened
8/20/2012	5:48:22 PM	Helium MFC set to  20.000000
8/20/2012	5:48:22 PM	H2 MFC set to  0.000000
8/20/2012	5:48:22 PM	BCl3 MFC set to  0.000000
8/20/2012	5:48:22 PM	PH3 MFC set to  0.000000
8/20/2012	5:48:22 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:48:22 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:48:22 PM	Tube furnace set to 0
8/20/2012	5:48:52 PM	Helium valve closed
8/20/2012	5:48:52 PM	H2 valve closed
8/20/2012	5:48:52 PM	BCl3 valve closed
8/20/2012	5:48:52 PM	PH3 valve closed
8/20/2012	5:48:52 PM	SiCl4 pre valve closed
8/20/2012	5:48:52 PM	SiCl4 post valve closed
8/20/2012	5:48:52 PM	Bypass valve closed
8/20/2012	5:48:52 PM	Bubbler valve closed
8/20/2012	5:48:52 PM	Main Vac valve opened
8/20/2012	5:48:52 PM	Helium MFC set to  0.000000
8/20/2012	5:48:52 PM	H2 MFC set to  0.000000
8/20/2012	5:48:52 PM	BCl3 MFC set to  0.000000
8/20/2012	5:48:52 PM	PH3 MFC set to  0.000000
8/20/2012	5:48:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:48:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:48:52 PM	Tube furnace set to 0
8/20/2012	5:49:22 PM	H2 valve closed
8/20/2012	5:49:22 PM	BCl3 valve closed
8/20/2012	5:49:22 PM	PH3 valve closed
8/20/2012	5:49:22 PM	SiCl4 pre valve closed
8/20/2012	5:49:22 PM	SiCl4 post valve closed
8/20/2012	5:49:22 PM	Bypass valve closed
8/20/2012	5:49:22 PM	Bubbler valve closed
8/20/2012	5:49:22 PM	Helium valve opened
8/20/2012	5:49:22 PM	Main Vac valve opened
8/20/2012	5:49:22 PM	Helium MFC set to  20.000000
8/20/2012	5:49:22 PM	H2 MFC set to  0.000000
8/20/2012	5:49:22 PM	BCl3 MFC set to  0.000000
8/20/2012	5:49:22 PM	PH3 MFC set to  0.000000
8/20/2012	5:49:22 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:49:22 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:49:23 PM	Tube furnace set to 0
8/20/2012	5:49:53 PM	Helium valve closed
8/20/2012	5:49:53 PM	H2 valve closed
8/20/2012	5:49:53 PM	BCl3 valve closed
8/20/2012	5:49:53 PM	PH3 valve closed
8/20/2012	5:49:53 PM	SiCl4 pre valve closed
8/20/2012	5:49:53 PM	SiCl4 post valve closed
8/20/2012	5:49:53 PM	Bypass valve closed
8/20/2012	5:49:53 PM	Bubbler valve closed
8/20/2012	5:49:53 PM	Main Vac valve opened
8/20/2012	5:49:53 PM	Helium MFC set to  0.000000
8/20/2012	5:49:53 PM	H2 MFC set to  0.000000
8/20/2012	5:49:53 PM	BCl3 MFC set to  0.000000
8/20/2012	5:49:53 PM	PH3 MFC set to  0.000000
8/20/2012	5:49:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:49:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:49:53 PM	Tube furnace set to 0
8/20/2012	5:50:23 PM	H2 valve closed
8/20/2012	5:50:23 PM	BCl3 valve closed
8/20/2012	5:50:23 PM	PH3 valve closed
8/20/2012	5:50:23 PM	SiCl4 pre valve closed
8/20/2012	5:50:23 PM	SiCl4 post valve closed
8/20/2012	5:50:23 PM	Bypass valve closed
8/20/2012	5:50:23 PM	Bubbler valve closed
8/20/2012	5:50:23 PM	Helium valve opened
8/20/2012	5:50:23 PM	Main Vac valve opened
8/20/2012	5:50:23 PM	Helium MFC set to  20.000000
8/20/2012	5:50:23 PM	H2 MFC set to  0.000000
8/20/2012	5:50:23 PM	BCl3 MFC set to  0.000000
8/20/2012	5:50:23 PM	PH3 MFC set to  0.000000
8/20/2012	5:50:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:50:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:50:23 PM	Tube furnace set to 0
8/20/2012	5:50:53 PM	Helium valve closed
8/20/2012	5:50:53 PM	H2 valve closed
8/20/2012	5:50:53 PM	BCl3 valve closed
8/20/2012	5:50:53 PM	PH3 valve closed
8/20/2012	5:50:53 PM	SiCl4 pre valve closed
8/20/2012	5:50:53 PM	SiCl4 post valve closed
8/20/2012	5:50:53 PM	Bypass valve closed
8/20/2012	5:50:53 PM	Bubbler valve closed
8/20/2012	5:50:53 PM	Main Vac valve opened
8/20/2012	5:50:53 PM	Helium MFC set to  0.000000
8/20/2012	5:50:53 PM	H2 MFC set to  0.000000
8/20/2012	5:50:53 PM	BCl3 MFC set to  0.000000
8/20/2012	5:50:53 PM	PH3 MFC set to  0.000000
8/20/2012	5:50:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:50:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:50:53 PM	Tube furnace set to 0
8/20/2012	5:51:23 PM	H2 valve closed
8/20/2012	5:51:23 PM	BCl3 valve closed
8/20/2012	5:51:23 PM	PH3 valve closed
8/20/2012	5:51:23 PM	SiCl4 pre valve closed
8/20/2012	5:51:23 PM	SiCl4 post valve closed
8/20/2012	5:51:23 PM	Bypass valve closed
8/20/2012	5:51:23 PM	Bubbler valve closed
8/20/2012	5:51:23 PM	Helium valve opened
8/20/2012	5:51:23 PM	Main Vac valve opened
8/20/2012	5:51:23 PM	Helium MFC set to  20.000000
8/20/2012	5:51:23 PM	H2 MFC set to  0.000000
8/20/2012	5:51:23 PM	BCl3 MFC set to  0.000000
8/20/2012	5:51:23 PM	PH3 MFC set to  0.000000
8/20/2012	5:51:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:51:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:51:23 PM	Tube furnace set to 0
8/20/2012	5:51:54 PM	Helium valve closed
8/20/2012	5:51:54 PM	H2 valve closed
8/20/2012	5:51:54 PM	BCl3 valve closed
8/20/2012	5:51:54 PM	PH3 valve closed
8/20/2012	5:51:54 PM	SiCl4 pre valve closed
8/20/2012	5:51:54 PM	SiCl4 post valve closed
8/20/2012	5:51:54 PM	Bypass valve closed
8/20/2012	5:51:54 PM	Bubbler valve closed
8/20/2012	5:51:54 PM	Main Vac valve opened
8/20/2012	5:51:54 PM	Helium MFC set to  0.000000
8/20/2012	5:51:54 PM	H2 MFC set to  0.000000
8/20/2012	5:51:54 PM	BCl3 MFC set to  0.000000
8/20/2012	5:51:54 PM	PH3 MFC set to  0.000000
8/20/2012	5:51:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:51:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:51:54 PM	Tube furnace set to 0
8/20/2012	5:52:24 PM	H2 valve closed
8/20/2012	5:52:24 PM	BCl3 valve closed
8/20/2012	5:52:24 PM	PH3 valve closed
8/20/2012	5:52:24 PM	SiCl4 pre valve closed
8/20/2012	5:52:24 PM	SiCl4 post valve closed
8/20/2012	5:52:24 PM	Bypass valve closed
8/20/2012	5:52:24 PM	Bubbler valve closed
8/20/2012	5:52:24 PM	Helium valve opened
8/20/2012	5:52:24 PM	Main Vac valve opened
8/20/2012	5:52:24 PM	Helium MFC set to  20.000000
8/20/2012	5:52:24 PM	H2 MFC set to  0.000000
8/20/2012	5:52:24 PM	BCl3 MFC set to  0.000000
8/20/2012	5:52:24 PM	PH3 MFC set to  0.000000
8/20/2012	5:52:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:52:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:52:24 PM	Tube furnace set to 0
8/20/2012	5:52:54 PM	Helium valve closed
8/20/2012	5:52:54 PM	H2 valve closed
8/20/2012	5:52:54 PM	BCl3 valve closed
8/20/2012	5:52:54 PM	PH3 valve closed
8/20/2012	5:52:54 PM	SiCl4 pre valve closed
8/20/2012	5:52:54 PM	SiCl4 post valve closed
8/20/2012	5:52:54 PM	Bypass valve closed
8/20/2012	5:52:54 PM	Bubbler valve closed
8/20/2012	5:52:54 PM	Main Vac valve opened
8/20/2012	5:52:54 PM	Helium MFC set to  0.000000
8/20/2012	5:52:54 PM	H2 MFC set to  0.000000
8/20/2012	5:52:54 PM	BCl3 MFC set to  0.000000
8/20/2012	5:52:54 PM	PH3 MFC set to  0.000000
8/20/2012	5:52:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:52:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:52:54 PM	Tube furnace set to 0
8/20/2012	5:53:24 PM	H2 valve closed
8/20/2012	5:53:24 PM	BCl3 valve closed
8/20/2012	5:53:24 PM	PH3 valve closed
8/20/2012	5:53:24 PM	SiCl4 pre valve closed
8/20/2012	5:53:24 PM	SiCl4 post valve closed
8/20/2012	5:53:24 PM	Bypass valve closed
8/20/2012	5:53:24 PM	Bubbler valve closed
8/20/2012	5:53:24 PM	Helium valve opened
8/20/2012	5:53:24 PM	Main Vac valve opened
8/20/2012	5:53:24 PM	Helium MFC set to  20.000000
8/20/2012	5:53:24 PM	H2 MFC set to  0.000000
8/20/2012	5:53:24 PM	BCl3 MFC set to  0.000000
8/20/2012	5:53:24 PM	PH3 MFC set to  0.000000
8/20/2012	5:53:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:53:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:53:24 PM	Tube furnace set to 0
8/20/2012	5:53:54 PM	Helium valve closed
8/20/2012	5:53:54 PM	H2 valve closed
8/20/2012	5:53:54 PM	BCl3 valve closed
8/20/2012	5:53:54 PM	PH3 valve closed
8/20/2012	5:53:54 PM	SiCl4 pre valve closed
8/20/2012	5:53:54 PM	SiCl4 post valve closed
8/20/2012	5:53:54 PM	Bypass valve closed
8/20/2012	5:53:54 PM	Bubbler valve closed
8/20/2012	5:53:54 PM	Main Vac valve opened
8/20/2012	5:53:54 PM	Helium MFC set to  0.000000
8/20/2012	5:53:55 PM	H2 MFC set to  0.000000
8/20/2012	5:53:55 PM	BCl3 MFC set to  0.000000
8/20/2012	5:53:55 PM	PH3 MFC set to  0.000000
8/20/2012	5:53:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:53:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:53:55 PM	Tube furnace set to 0
8/20/2012	5:53:56 PM	Run finished at 5:53 PM
8/20/2012	5:53:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/20/2012	5:55:46 PM	Recipe started at 5:55 PM
8/20/2012	5:55:46 PM	Helium valve closed
8/20/2012	5:55:46 PM	H2 valve closed
8/20/2012	5:55:46 PM	BCl3 valve closed
8/20/2012	5:55:46 PM	PH3 valve closed
8/20/2012	5:55:46 PM	SiCl4 pre valve closed
8/20/2012	5:55:46 PM	SiCl4 post valve closed
8/20/2012	5:55:46 PM	Main Vac valve closed
8/20/2012	5:55:46 PM	Bypass valve closed
8/20/2012	5:55:46 PM	Bubbler valve closed
8/20/2012	5:55:46 PM	Helium MFC set to  0.000000
8/20/2012	5:55:46 PM	H2 MFC set to  0.000000
8/20/2012	5:55:46 PM	BCl3 MFC set to  0.000000
8/20/2012	5:55:46 PM	PH3 MFC set to  0.000000
8/20/2012	5:55:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:55:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:55:47 PM	Tube furnace set to 0
8/20/2012	5:55:50 PM	Helium valve closed
8/20/2012	5:55:50 PM	BCl3 valve closed
8/20/2012	5:55:50 PM	PH3 valve closed
8/20/2012	5:55:50 PM	SiCl4 pre valve closed
8/20/2012	5:55:50 PM	SiCl4 post valve closed
8/20/2012	5:55:50 PM	Main Vac valve closed
8/20/2012	5:55:50 PM	Bypass valve closed
8/20/2012	5:55:50 PM	Bubbler valve closed
8/20/2012	5:55:50 PM	H2 valve opened
8/20/2012	5:55:50 PM	Helium MFC set to  0.000000
8/20/2012	5:55:50 PM	H2 MFC set to  500.000000
8/20/2012	5:55:50 PM	BCl3 MFC set to  0.000000
8/20/2012	5:55:50 PM	PH3 MFC set to  0.000000
8/20/2012	5:55:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:55:50 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:55:50 PM	Tube furnace set to 0
8/20/2012	5:57:05 PM	Helium valve closed
8/20/2012	5:57:05 PM	BCl3 valve closed
8/20/2012	5:57:05 PM	PH3 valve closed
8/20/2012	5:57:05 PM	SiCl4 pre valve closed
8/20/2012	5:57:05 PM	SiCl4 post valve closed
8/20/2012	5:57:05 PM	Main Vac valve closed
8/20/2012	5:57:05 PM	Bypass valve closed
8/20/2012	5:57:05 PM	H2 valve opened
8/20/2012	5:57:05 PM	Bubbler valve opened
8/20/2012	5:57:05 PM	Helium MFC set to  0.000000
8/20/2012	5:57:05 PM	H2 MFC set to  500.000000
8/20/2012	5:57:05 PM	BCl3 MFC set to  0.000000
8/20/2012	5:57:05 PM	PH3 MFC set to  0.000000
8/20/2012	5:57:05 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:57:05 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:57:05 PM	Tube furnace set to 0
8/20/2012	5:57:06 PM	Helium valve closed
8/20/2012	5:57:06 PM	BCl3 valve closed
8/20/2012	5:57:06 PM	PH3 valve closed
8/20/2012	5:57:06 PM	SiCl4 pre valve closed
8/20/2012	5:57:06 PM	SiCl4 post valve closed
8/20/2012	5:57:06 PM	Main Vac valve closed
8/20/2012	5:57:06 PM	Bypass valve closed
8/20/2012	5:57:06 PM	H2 valve opened
8/20/2012	5:57:06 PM	Bubbler valve opened
8/20/2012	5:57:06 PM	Helium MFC set to  0.000000
8/20/2012	5:57:06 PM	H2 MFC set to  500.000000
8/20/2012	5:57:06 PM	BCl3 MFC set to  0.000000
8/20/2012	5:57:06 PM	PH3 MFC set to  0.000000
8/20/2012	5:57:06 PM	SiCl4 MFC set to  0.000000
8/20/2012	5:57:06 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	5:57:06 PM	Tube furnace set to 1000
8/20/2012	6:17:06 PM	Helium valve closed
8/20/2012	6:17:06 PM	PH3 valve closed
8/20/2012	6:17:06 PM	Main Vac valve closed
8/20/2012	6:17:06 PM	Bypass valve closed
8/20/2012	6:17:06 PM	H2 valve opened
8/20/2012	6:17:06 PM	BCl3 valve opened
8/20/2012	6:17:06 PM	SiCl4 pre valve opened
8/20/2012	6:17:06 PM	SiCl4 post valve opened
8/20/2012	6:17:06 PM	Bubbler valve opened
8/20/2012	6:17:06 PM	Helium MFC set to  0.000000
8/20/2012	6:17:06 PM	H2 MFC set to  450.000000
8/20/2012	6:17:06 PM	BCl3 MFC set to  1.300000
8/20/2012	6:17:06 PM	PH3 MFC set to  0.000000
8/20/2012	6:17:06 PM	SiCl4 MFC set to  50.000000
8/20/2012	6:17:06 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:17:06 PM	Tube furnace set to 1000
8/20/2012	6:32:06 PM	Helium valve closed
8/20/2012	6:32:06 PM	BCl3 valve closed
8/20/2012	6:32:06 PM	PH3 valve closed
8/20/2012	6:32:06 PM	SiCl4 pre valve closed
8/20/2012	6:32:06 PM	SiCl4 post valve closed
8/20/2012	6:32:06 PM	Main Vac valve closed
8/20/2012	6:32:06 PM	Bypass valve closed
8/20/2012	6:32:06 PM	H2 valve opened
8/20/2012	6:32:06 PM	Bubbler valve opened
8/20/2012	6:32:06 PM	Helium MFC set to  0.000000
8/20/2012	6:32:06 PM	H2 MFC set to  500.000000
8/20/2012	6:32:06 PM	BCl3 MFC set to  0.000000
8/20/2012	6:32:06 PM	PH3 MFC set to  0.000000
8/20/2012	6:32:06 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:32:06 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:32:06 PM	Tube furnace set to 750
8/20/2012	6:37:06 PM	H2 valve closed
8/20/2012	6:37:06 PM	BCl3 valve closed
8/20/2012	6:37:06 PM	PH3 valve closed
8/20/2012	6:37:06 PM	SiCl4 pre valve closed
8/20/2012	6:37:06 PM	SiCl4 post valve closed
8/20/2012	6:37:06 PM	Main Vac valve closed
8/20/2012	6:37:06 PM	Bypass valve closed
8/20/2012	6:37:06 PM	Helium valve opened
8/20/2012	6:37:06 PM	Bubbler valve opened
8/20/2012	6:37:06 PM	Helium MFC set to  500.000000
8/20/2012	6:37:06 PM	H2 MFC set to  0.000000
8/20/2012	6:37:06 PM	BCl3 MFC set to  0.000000
8/20/2012	6:37:06 PM	PH3 MFC set to  0.000000
8/20/2012	6:37:06 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:37:06 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:37:07 PM	Tube furnace set to 0
8/20/2012	6:48:28 PM	Helium valve closed
8/20/2012	6:48:28 PM	H2 valve closed
8/20/2012	6:48:28 PM	BCl3 valve closed
8/20/2012	6:48:28 PM	PH3 valve closed
8/20/2012	6:48:28 PM	SiCl4 pre valve closed
8/20/2012	6:48:28 PM	SiCl4 post valve closed
8/20/2012	6:48:28 PM	Main Vac valve closed
8/20/2012	6:48:28 PM	Bypass valve closed
8/20/2012	6:48:28 PM	Bubbler valve closed
8/20/2012	6:48:28 PM	Helium MFC set to  0.000000
8/20/2012	6:48:28 PM	H2 MFC set to  0.000000
8/20/2012	6:48:28 PM	BCl3 MFC set to  0.000000
8/20/2012	6:48:28 PM	PH3 MFC set to  0.000000
8/20/2012	6:48:28 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:48:28 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:48:29 PM	Tube furnace set to 0
8/20/2012	6:48:30 PM	Run finished at 6:48 PM
8/20/2012	6:48:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	6:48:38 PM	Recipe started at 6:48 PM
8/20/2012	6:48:38 PM	Helium valve closed
8/20/2012	6:48:38 PM	H2 valve closed
8/20/2012	6:48:38 PM	BCl3 valve closed
8/20/2012	6:48:38 PM	PH3 valve closed
8/20/2012	6:48:38 PM	SiCl4 pre valve closed
8/20/2012	6:48:38 PM	SiCl4 post valve closed
8/20/2012	6:48:38 PM	Main Vac valve closed
8/20/2012	6:48:38 PM	Bypass valve closed
8/20/2012	6:48:38 PM	Bubbler valve closed
8/20/2012	6:48:38 PM	Helium MFC set to  0.000000
8/20/2012	6:48:38 PM	H2 MFC set to  0.000000
8/20/2012	6:48:38 PM	BCl3 MFC set to  0.000000
8/20/2012	6:48:38 PM	PH3 MFC set to  0.000000
8/20/2012	6:48:38 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:48:38 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:48:39 PM	Tube furnace set to 0
8/20/2012	6:48:42 PM	H2 valve closed
8/20/2012	6:48:42 PM	BCl3 valve closed
8/20/2012	6:48:42 PM	PH3 valve closed
8/20/2012	6:48:42 PM	SiCl4 pre valve closed
8/20/2012	6:48:42 PM	SiCl4 post valve closed
8/20/2012	6:48:42 PM	Main Vac valve closed
8/20/2012	6:48:42 PM	Bypass valve closed
8/20/2012	6:48:42 PM	Bubbler valve closed
8/20/2012	6:48:42 PM	Helium valve opened
8/20/2012	6:48:42 PM	Helium MFC set to  500.000000
8/20/2012	6:48:42 PM	H2 MFC set to  0.000000
8/20/2012	6:48:42 PM	BCl3 MFC set to  0.000000
8/20/2012	6:48:42 PM	PH3 MFC set to  0.000000
8/20/2012	6:48:42 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:48:42 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:48:42 PM	Tube furnace set to 0
8/20/2012	6:48:42 PM	Helium valve closed
8/20/2012	6:48:42 PM	H2 valve closed
8/20/2012	6:48:42 PM	BCl3 valve closed
8/20/2012	6:48:42 PM	PH3 valve closed
8/20/2012	6:48:42 PM	SiCl4 pre valve closed
8/20/2012	6:48:42 PM	SiCl4 post valve closed
8/20/2012	6:48:42 PM	Main Vac valve closed
8/20/2012	6:48:42 PM	Bypass valve closed
8/20/2012	6:48:42 PM	Bubbler valve closed
8/20/2012	6:48:42 PM	Helium MFC set to  0.000000
8/20/2012	6:48:42 PM	H2 MFC set to  0.000000
8/20/2012	6:48:42 PM	BCl3 MFC set to  0.000000
8/20/2012	6:48:42 PM	PH3 MFC set to  0.000000
8/20/2012	6:48:42 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:48:42 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:48:42 PM	Tube furnace set to 0
8/20/2012	6:48:43 PM	Run finished at 6:48 PM
8/20/2012	6:48:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	6:53:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	6:53:25 PM	Recipe started at 6:53 PM
8/20/2012	6:53:25 PM	Helium valve closed
8/20/2012	6:53:25 PM	H2 valve closed
8/20/2012	6:53:25 PM	BCl3 valve closed
8/20/2012	6:53:25 PM	PH3 valve closed
8/20/2012	6:53:25 PM	SiCl4 pre valve closed
8/20/2012	6:53:25 PM	SiCl4 post valve closed
8/20/2012	6:53:25 PM	Main Vac valve closed
8/20/2012	6:53:25 PM	Bubbler valve closed
8/20/2012	6:53:25 PM	Bypass valve opened
8/20/2012	6:53:25 PM	Helium MFC set to  0.000000
8/20/2012	6:53:25 PM	H2 MFC set to  0.000000
8/20/2012	6:53:25 PM	BCl3 MFC set to  0.000000
8/20/2012	6:53:25 PM	PH3 MFC set to  0.000000
8/20/2012	6:53:25 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:53:25 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:53:25 PM	Tube furnace set to 0
8/20/2012	6:54:47 PM	Helium valve closed
8/20/2012	6:54:47 PM	H2 valve closed
8/20/2012	6:54:47 PM	BCl3 valve closed
8/20/2012	6:54:47 PM	PH3 valve closed
8/20/2012	6:54:47 PM	SiCl4 pre valve closed
8/20/2012	6:54:47 PM	SiCl4 post valve closed
8/20/2012	6:54:47 PM	Main Vac valve closed
8/20/2012	6:54:47 PM	Bubbler valve closed
8/20/2012	6:54:47 PM	Bypass valve opened
8/20/2012	6:54:47 PM	Helium MFC set to  0.000000
8/20/2012	6:54:47 PM	H2 MFC set to  0.000000
8/20/2012	6:54:47 PM	BCl3 MFC set to  0.000000
8/20/2012	6:54:47 PM	PH3 MFC set to  0.000000
8/20/2012	6:54:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:54:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:54:47 PM	Tube furnace set to 0
8/20/2012	6:55:47 PM	Helium valve closed
8/20/2012	6:55:47 PM	H2 valve closed
8/20/2012	6:55:47 PM	BCl3 valve closed
8/20/2012	6:55:47 PM	PH3 valve closed
8/20/2012	6:55:47 PM	SiCl4 pre valve closed
8/20/2012	6:55:47 PM	SiCl4 post valve closed
8/20/2012	6:55:47 PM	Bypass valve closed
8/20/2012	6:55:47 PM	Bubbler valve closed
8/20/2012	6:55:47 PM	Main Vac valve opened
8/20/2012	6:55:47 PM	Helium MFC set to  0.000000
8/20/2012	6:55:47 PM	H2 MFC set to  0.000000
8/20/2012	6:55:47 PM	BCl3 MFC set to  0.000000
8/20/2012	6:55:47 PM	PH3 MFC set to  0.000000
8/20/2012	6:55:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	6:55:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	6:55:47 PM	Tube furnace set to 0
8/20/2012	6:55:48 PM	Run finished at 6:55 PM
8/20/2012	6:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	7:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	7:25:16 PM	Recipe started at 7:25 PM
8/20/2012	7:25:16 PM	Helium valve closed
8/20/2012	7:25:16 PM	H2 valve closed
8/20/2012	7:25:16 PM	BCl3 valve closed
8/20/2012	7:25:16 PM	PH3 valve closed
8/20/2012	7:25:16 PM	SiCl4 pre valve closed
8/20/2012	7:25:16 PM	SiCl4 post valve closed
8/20/2012	7:25:16 PM	Main Vac valve closed
8/20/2012	7:25:16 PM	Bypass valve closed
8/20/2012	7:25:16 PM	Bubbler valve closed
8/20/2012	7:25:16 PM	Helium MFC set to  0.000000
8/20/2012	7:25:16 PM	H2 MFC set to  0.000000
8/20/2012	7:25:16 PM	BCl3 MFC set to  0.000000
8/20/2012	7:25:16 PM	PH3 MFC set to  0.000000
8/20/2012	7:25:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:25:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:25:16 PM	Tube furnace set to 0
8/20/2012	7:25:19 PM	H2 valve closed
8/20/2012	7:25:19 PM	BCl3 valve closed
8/20/2012	7:25:19 PM	PH3 valve closed
8/20/2012	7:25:19 PM	SiCl4 pre valve closed
8/20/2012	7:25:19 PM	SiCl4 post valve closed
8/20/2012	7:25:19 PM	Main Vac valve closed
8/20/2012	7:25:19 PM	Bypass valve closed
8/20/2012	7:25:19 PM	Bubbler valve closed
8/20/2012	7:25:19 PM	Helium valve opened
8/20/2012	7:25:19 PM	Helium MFC set to  500.000000
8/20/2012	7:25:19 PM	H2 MFC set to  0.000000
8/20/2012	7:25:19 PM	BCl3 MFC set to  0.000000
8/20/2012	7:25:19 PM	PH3 MFC set to  0.000000
8/20/2012	7:25:19 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:25:19 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:25:19 PM	Tube furnace set to 0
8/20/2012	7:26:31 PM	Helium valve closed
8/20/2012	7:26:31 PM	H2 valve closed
8/20/2012	7:26:31 PM	BCl3 valve closed
8/20/2012	7:26:31 PM	PH3 valve closed
8/20/2012	7:26:31 PM	SiCl4 pre valve closed
8/20/2012	7:26:31 PM	SiCl4 post valve closed
8/20/2012	7:26:31 PM	Main Vac valve closed
8/20/2012	7:26:31 PM	Bypass valve closed
8/20/2012	7:26:31 PM	Bubbler valve closed
8/20/2012	7:26:31 PM	Helium MFC set to  0.000000
8/20/2012	7:26:31 PM	H2 MFC set to  0.000000
8/20/2012	7:26:31 PM	BCl3 MFC set to  0.000000
8/20/2012	7:26:31 PM	PH3 MFC set to  0.000000
8/20/2012	7:26:31 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:26:31 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:26:31 PM	Tube furnace set to 0
8/20/2012	7:26:32 PM	Run finished at 7:26 PM
8/20/2012	7:26:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	7:33:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	7:33:02 PM	Recipe started at 7:33 PM
8/20/2012	7:33:02 PM	Helium valve closed
8/20/2012	7:33:02 PM	H2 valve closed
8/20/2012	7:33:02 PM	BCl3 valve closed
8/20/2012	7:33:02 PM	PH3 valve closed
8/20/2012	7:33:02 PM	SiCl4 pre valve closed
8/20/2012	7:33:02 PM	SiCl4 post valve closed
8/20/2012	7:33:02 PM	Main Vac valve closed
8/20/2012	7:33:02 PM	Bubbler valve closed
8/20/2012	7:33:02 PM	Bypass valve opened
8/20/2012	7:33:02 PM	Helium MFC set to  0.000000
8/20/2012	7:33:02 PM	H2 MFC set to  0.000000
8/20/2012	7:33:02 PM	BCl3 MFC set to  0.000000
8/20/2012	7:33:02 PM	PH3 MFC set to  0.000000
8/20/2012	7:33:02 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:33:02 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:33:02 PM	Tube furnace set to 0
8/20/2012	7:34:23 PM	Helium valve closed
8/20/2012	7:34:23 PM	H2 valve closed
8/20/2012	7:34:23 PM	BCl3 valve closed
8/20/2012	7:34:23 PM	PH3 valve closed
8/20/2012	7:34:23 PM	SiCl4 pre valve closed
8/20/2012	7:34:23 PM	SiCl4 post valve closed
8/20/2012	7:34:23 PM	Main Vac valve closed
8/20/2012	7:34:23 PM	Bubbler valve closed
8/20/2012	7:34:23 PM	Bypass valve opened
8/20/2012	7:34:23 PM	Helium MFC set to  0.000000
8/20/2012	7:34:23 PM	H2 MFC set to  0.000000
8/20/2012	7:34:23 PM	BCl3 MFC set to  0.000000
8/20/2012	7:34:23 PM	PH3 MFC set to  0.000000
8/20/2012	7:34:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:34:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:34:23 PM	Tube furnace set to 0
8/20/2012	7:35:23 PM	Helium valve closed
8/20/2012	7:35:23 PM	H2 valve closed
8/20/2012	7:35:23 PM	BCl3 valve closed
8/20/2012	7:35:23 PM	PH3 valve closed
8/20/2012	7:35:23 PM	SiCl4 pre valve closed
8/20/2012	7:35:23 PM	SiCl4 post valve closed
8/20/2012	7:35:23 PM	Bypass valve closed
8/20/2012	7:35:23 PM	Bubbler valve closed
8/20/2012	7:35:23 PM	Main Vac valve opened
8/20/2012	7:35:23 PM	Helium MFC set to  0.000000
8/20/2012	7:35:23 PM	H2 MFC set to  0.000000
8/20/2012	7:35:23 PM	BCl3 MFC set to  0.000000
8/20/2012	7:35:23 PM	PH3 MFC set to  0.000000
8/20/2012	7:35:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:35:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:35:23 PM	Tube furnace set to 0
8/20/2012	7:35:24 PM	Run finished at 7:35 PM
8/20/2012	7:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	7:44:16 PM	Tube furnace set to 150
8/20/2012	7:45:01 PM	Helium MFC set to  10.000000
8/20/2012	7:45:02 PM	Helium valve opened
8/20/2012	7:46:08 PM	Helium valve closed
8/20/2012	7:47:27 PM	Helium MFC set to  0.000000
8/20/2012	7:54:19 PM	Main Vac valve closed
8/20/2012	7:54:32 PM	Main Vac valve opened
8/20/2012	7:55:32 PM	Recipe started at 7:55 PM
8/20/2012	7:55:32 PM	Helium valve closed
8/20/2012	7:55:32 PM	H2 valve closed
8/20/2012	7:55:32 PM	BCl3 valve closed
8/20/2012	7:55:32 PM	PH3 valve closed
8/20/2012	7:55:32 PM	SiCl4 pre valve closed
8/20/2012	7:55:32 PM	SiCl4 post valve closed
8/20/2012	7:55:32 PM	Main Vac valve closed
8/20/2012	7:55:32 PM	Bubbler valve closed
8/20/2012	7:55:32 PM	Bypass valve opened
8/20/2012	7:55:32 PM	Helium MFC set to  0.000000
8/20/2012	7:55:32 PM	H2 MFC set to  0.000000
8/20/2012	7:55:32 PM	BCl3 MFC set to  0.000000
8/20/2012	7:55:32 PM	PH3 MFC set to  0.000000
8/20/2012	7:55:32 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:55:32 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:55:32 PM	Tube furnace set to 150
8/20/2012	7:55:33 PM	Helium valve closed
8/20/2012	7:55:33 PM	H2 valve closed
8/20/2012	7:55:33 PM	BCl3 valve closed
8/20/2012	7:55:33 PM	PH3 valve closed
8/20/2012	7:55:33 PM	SiCl4 pre valve closed
8/20/2012	7:55:33 PM	SiCl4 post valve closed
8/20/2012	7:55:33 PM	Main Vac valve closed
8/20/2012	7:55:33 PM	Bubbler valve closed
8/20/2012	7:55:33 PM	Bypass valve opened
8/20/2012	7:55:33 PM	Helium MFC set to  0.000000
8/20/2012	7:55:33 PM	H2 MFC set to  0.000000
8/20/2012	7:55:33 PM	BCl3 MFC set to  0.000000
8/20/2012	7:55:33 PM	PH3 MFC set to  0.000000
8/20/2012	7:55:33 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:55:33 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:55:33 PM	Tube furnace set to 150
8/20/2012	7:55:37 PM	Helium valve closed
8/20/2012	7:55:37 PM	H2 valve closed
8/20/2012	7:55:37 PM	BCl3 valve closed
8/20/2012	7:55:37 PM	PH3 valve closed
8/20/2012	7:55:38 PM	SiCl4 pre valve closed
8/20/2012	7:55:38 PM	SiCl4 post valve closed
8/20/2012	7:55:38 PM	Bypass valve closed
8/20/2012	7:55:38 PM	Bubbler valve closed
8/20/2012	7:55:38 PM	Main Vac valve opened
8/20/2012	7:55:38 PM	Helium MFC set to  0.000000
8/20/2012	7:55:38 PM	H2 MFC set to  0.000000
8/20/2012	7:55:38 PM	BCl3 MFC set to  0.000000
8/20/2012	7:55:38 PM	PH3 MFC set to  0.000000
8/20/2012	7:55:38 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:55:38 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:55:38 PM	Tube furnace set to 150
8/20/2012	7:55:43 PM	H2 valve closed
8/20/2012	7:55:43 PM	BCl3 valve closed
8/20/2012	7:55:43 PM	PH3 valve closed
8/20/2012	7:55:43 PM	SiCl4 pre valve closed
8/20/2012	7:55:43 PM	SiCl4 post valve closed
8/20/2012	7:55:43 PM	Bypass valve closed
8/20/2012	7:55:43 PM	Bubbler valve closed
8/20/2012	7:55:43 PM	Helium valve opened
8/20/2012	7:55:43 PM	Main Vac valve opened
8/20/2012	7:55:43 PM	Helium MFC set to  20.000000
8/20/2012	7:55:43 PM	H2 MFC set to  0.000000
8/20/2012	7:55:43 PM	BCl3 MFC set to  0.000000
8/20/2012	7:55:43 PM	PH3 MFC set to  0.000000
8/20/2012	7:55:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:55:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:55:43 PM	Tube furnace set to 150
8/20/2012	7:56:13 PM	Helium valve closed
8/20/2012	7:56:13 PM	H2 valve closed
8/20/2012	7:56:13 PM	BCl3 valve closed
8/20/2012	7:56:13 PM	PH3 valve closed
8/20/2012	7:56:13 PM	SiCl4 pre valve closed
8/20/2012	7:56:13 PM	SiCl4 post valve closed
8/20/2012	7:56:13 PM	Bypass valve closed
8/20/2012	7:56:13 PM	Bubbler valve closed
8/20/2012	7:56:13 PM	Main Vac valve opened
8/20/2012	7:56:13 PM	Helium MFC set to  0.000000
8/20/2012	7:56:13 PM	H2 MFC set to  0.000000
8/20/2012	7:56:13 PM	BCl3 MFC set to  0.000000
8/20/2012	7:56:13 PM	PH3 MFC set to  0.000000
8/20/2012	7:56:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:56:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:56:13 PM	Tube furnace set to 150
8/20/2012	7:56:43 PM	H2 valve closed
8/20/2012	7:56:43 PM	BCl3 valve closed
8/20/2012	7:56:43 PM	PH3 valve closed
8/20/2012	7:56:43 PM	SiCl4 pre valve closed
8/20/2012	7:56:43 PM	SiCl4 post valve closed
8/20/2012	7:56:43 PM	Bypass valve closed
8/20/2012	7:56:43 PM	Bubbler valve closed
8/20/2012	7:56:43 PM	Helium valve opened
8/20/2012	7:56:43 PM	Main Vac valve opened
8/20/2012	7:56:43 PM	Helium MFC set to  20.000000
8/20/2012	7:56:43 PM	H2 MFC set to  0.000000
8/20/2012	7:56:43 PM	BCl3 MFC set to  0.000000
8/20/2012	7:56:43 PM	PH3 MFC set to  0.000000
8/20/2012	7:56:43 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:56:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:56:43 PM	Tube furnace set to 150
8/20/2012	7:57:13 PM	Helium valve closed
8/20/2012	7:57:13 PM	H2 valve closed
8/20/2012	7:57:13 PM	BCl3 valve closed
8/20/2012	7:57:13 PM	PH3 valve closed
8/20/2012	7:57:13 PM	SiCl4 pre valve closed
8/20/2012	7:57:13 PM	SiCl4 post valve closed
8/20/2012	7:57:13 PM	Bypass valve closed
8/20/2012	7:57:13 PM	Bubbler valve closed
8/20/2012	7:57:13 PM	Main Vac valve opened
8/20/2012	7:57:13 PM	Helium MFC set to  0.000000
8/20/2012	7:57:13 PM	H2 MFC set to  0.000000
8/20/2012	7:57:13 PM	BCl3 MFC set to  0.000000
8/20/2012	7:57:13 PM	PH3 MFC set to  0.000000
8/20/2012	7:57:13 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:57:13 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:57:14 PM	Tube furnace set to 150
8/20/2012	7:57:44 PM	H2 valve closed
8/20/2012	7:57:44 PM	BCl3 valve closed
8/20/2012	7:57:44 PM	PH3 valve closed
8/20/2012	7:57:44 PM	SiCl4 pre valve closed
8/20/2012	7:57:44 PM	SiCl4 post valve closed
8/20/2012	7:57:44 PM	Bypass valve closed
8/20/2012	7:57:44 PM	Bubbler valve closed
8/20/2012	7:57:44 PM	Helium valve opened
8/20/2012	7:57:44 PM	Main Vac valve opened
8/20/2012	7:57:44 PM	Helium MFC set to  20.000000
8/20/2012	7:57:44 PM	H2 MFC set to  0.000000
8/20/2012	7:57:44 PM	BCl3 MFC set to  0.000000
8/20/2012	7:57:44 PM	PH3 MFC set to  0.000000
8/20/2012	7:57:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:57:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:57:44 PM	Tube furnace set to 150
8/20/2012	7:58:14 PM	Helium valve closed
8/20/2012	7:58:14 PM	H2 valve closed
8/20/2012	7:58:14 PM	BCl3 valve closed
8/20/2012	7:58:14 PM	PH3 valve closed
8/20/2012	7:58:14 PM	SiCl4 pre valve closed
8/20/2012	7:58:14 PM	SiCl4 post valve closed
8/20/2012	7:58:14 PM	Bypass valve closed
8/20/2012	7:58:14 PM	Bubbler valve closed
8/20/2012	7:58:14 PM	Main Vac valve opened
8/20/2012	7:58:14 PM	Helium MFC set to  0.000000
8/20/2012	7:58:14 PM	H2 MFC set to  0.000000
8/20/2012	7:58:14 PM	BCl3 MFC set to  0.000000
8/20/2012	7:58:14 PM	PH3 MFC set to  0.000000
8/20/2012	7:58:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:58:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:58:14 PM	Tube furnace set to 150
8/20/2012	7:58:44 PM	H2 valve closed
8/20/2012	7:58:44 PM	BCl3 valve closed
8/20/2012	7:58:44 PM	PH3 valve closed
8/20/2012	7:58:44 PM	SiCl4 pre valve closed
8/20/2012	7:58:44 PM	SiCl4 post valve closed
8/20/2012	7:58:44 PM	Bypass valve closed
8/20/2012	7:58:44 PM	Bubbler valve closed
8/20/2012	7:58:44 PM	Helium valve opened
8/20/2012	7:58:44 PM	Main Vac valve opened
8/20/2012	7:58:44 PM	Helium MFC set to  20.000000
8/20/2012	7:58:44 PM	H2 MFC set to  0.000000
8/20/2012	7:58:44 PM	BCl3 MFC set to  0.000000
8/20/2012	7:58:44 PM	PH3 MFC set to  0.000000
8/20/2012	7:58:44 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:58:44 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:58:44 PM	Tube furnace set to 150
8/20/2012	7:59:14 PM	Helium valve closed
8/20/2012	7:59:14 PM	H2 valve closed
8/20/2012	7:59:14 PM	BCl3 valve closed
8/20/2012	7:59:14 PM	PH3 valve closed
8/20/2012	7:59:14 PM	SiCl4 pre valve closed
8/20/2012	7:59:14 PM	SiCl4 post valve closed
8/20/2012	7:59:14 PM	Bypass valve closed
8/20/2012	7:59:14 PM	Bubbler valve closed
8/20/2012	7:59:14 PM	Main Vac valve opened
8/20/2012	7:59:14 PM	Helium MFC set to  0.000000
8/20/2012	7:59:14 PM	H2 MFC set to  0.000000
8/20/2012	7:59:14 PM	BCl3 MFC set to  0.000000
8/20/2012	7:59:14 PM	PH3 MFC set to  0.000000
8/20/2012	7:59:14 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:59:14 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:59:15 PM	Tube furnace set to 150
8/20/2012	7:59:45 PM	H2 valve closed
8/20/2012	7:59:45 PM	BCl3 valve closed
8/20/2012	7:59:45 PM	PH3 valve closed
8/20/2012	7:59:45 PM	SiCl4 pre valve closed
8/20/2012	7:59:45 PM	SiCl4 post valve closed
8/20/2012	7:59:45 PM	Bypass valve closed
8/20/2012	7:59:45 PM	Bubbler valve closed
8/20/2012	7:59:45 PM	Helium valve opened
8/20/2012	7:59:45 PM	Main Vac valve opened
8/20/2012	7:59:45 PM	Helium MFC set to  20.000000
8/20/2012	7:59:45 PM	H2 MFC set to  0.000000
8/20/2012	7:59:45 PM	BCl3 MFC set to  0.000000
8/20/2012	7:59:45 PM	PH3 MFC set to  0.000000
8/20/2012	7:59:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	7:59:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	7:59:45 PM	Tube furnace set to 150
8/20/2012	8:00:15 PM	Helium valve closed
8/20/2012	8:00:15 PM	H2 valve closed
8/20/2012	8:00:15 PM	BCl3 valve closed
8/20/2012	8:00:15 PM	PH3 valve closed
8/20/2012	8:00:15 PM	SiCl4 pre valve closed
8/20/2012	8:00:15 PM	SiCl4 post valve closed
8/20/2012	8:00:15 PM	Bypass valve closed
8/20/2012	8:00:15 PM	Bubbler valve closed
8/20/2012	8:00:15 PM	Main Vac valve opened
8/20/2012	8:00:15 PM	Helium MFC set to  0.000000
8/20/2012	8:00:15 PM	H2 MFC set to  0.000000
8/20/2012	8:00:15 PM	BCl3 MFC set to  0.000000
8/20/2012	8:00:15 PM	PH3 MFC set to  0.000000
8/20/2012	8:00:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:00:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:00:15 PM	Tube furnace set to 150
8/20/2012	8:00:45 PM	H2 valve closed
8/20/2012	8:00:45 PM	BCl3 valve closed
8/20/2012	8:00:45 PM	PH3 valve closed
8/20/2012	8:00:45 PM	SiCl4 pre valve closed
8/20/2012	8:00:45 PM	SiCl4 post valve closed
8/20/2012	8:00:45 PM	Bypass valve closed
8/20/2012	8:00:45 PM	Bubbler valve closed
8/20/2012	8:00:45 PM	Helium valve opened
8/20/2012	8:00:45 PM	Main Vac valve opened
8/20/2012	8:00:45 PM	Helium MFC set to  20.000000
8/20/2012	8:00:45 PM	H2 MFC set to  0.000000
8/20/2012	8:00:45 PM	BCl3 MFC set to  0.000000
8/20/2012	8:00:45 PM	PH3 MFC set to  0.000000
8/20/2012	8:00:45 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:00:45 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:00:45 PM	Tube furnace set to 150
8/20/2012	8:01:15 PM	Helium valve closed
8/20/2012	8:01:15 PM	H2 valve closed
8/20/2012	8:01:15 PM	BCl3 valve closed
8/20/2012	8:01:15 PM	PH3 valve closed
8/20/2012	8:01:15 PM	SiCl4 pre valve closed
8/20/2012	8:01:15 PM	SiCl4 post valve closed
8/20/2012	8:01:15 PM	Bypass valve closed
8/20/2012	8:01:15 PM	Bubbler valve closed
8/20/2012	8:01:15 PM	Main Vac valve opened
8/20/2012	8:01:15 PM	Helium MFC set to  0.000000
8/20/2012	8:01:15 PM	H2 MFC set to  0.000000
8/20/2012	8:01:15 PM	BCl3 MFC set to  0.000000
8/20/2012	8:01:15 PM	PH3 MFC set to  0.000000
8/20/2012	8:01:15 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:01:15 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:01:16 PM	Tube furnace set to 150
8/20/2012	8:01:46 PM	H2 valve closed
8/20/2012	8:01:46 PM	BCl3 valve closed
8/20/2012	8:01:46 PM	PH3 valve closed
8/20/2012	8:01:46 PM	SiCl4 pre valve closed
8/20/2012	8:01:46 PM	SiCl4 post valve closed
8/20/2012	8:01:46 PM	Bypass valve closed
8/20/2012	8:01:46 PM	Bubbler valve closed
8/20/2012	8:01:46 PM	Helium valve opened
8/20/2012	8:01:46 PM	Main Vac valve opened
8/20/2012	8:01:46 PM	Helium MFC set to  20.000000
8/20/2012	8:01:46 PM	H2 MFC set to  0.000000
8/20/2012	8:01:46 PM	BCl3 MFC set to  0.000000
8/20/2012	8:01:46 PM	PH3 MFC set to  0.000000
8/20/2012	8:01:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:01:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:01:46 PM	Tube furnace set to 150
8/20/2012	8:02:16 PM	Helium valve closed
8/20/2012	8:02:16 PM	H2 valve closed
8/20/2012	8:02:16 PM	BCl3 valve closed
8/20/2012	8:02:16 PM	PH3 valve closed
8/20/2012	8:02:16 PM	SiCl4 pre valve closed
8/20/2012	8:02:16 PM	SiCl4 post valve closed
8/20/2012	8:02:16 PM	Bypass valve closed
8/20/2012	8:02:16 PM	Bubbler valve closed
8/20/2012	8:02:16 PM	Main Vac valve opened
8/20/2012	8:02:16 PM	Helium MFC set to  0.000000
8/20/2012	8:02:16 PM	H2 MFC set to  0.000000
8/20/2012	8:02:16 PM	BCl3 MFC set to  0.000000
8/20/2012	8:02:16 PM	PH3 MFC set to  0.000000
8/20/2012	8:02:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:02:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:02:16 PM	Tube furnace set to 150
8/20/2012	8:02:46 PM	H2 valve closed
8/20/2012	8:02:46 PM	BCl3 valve closed
8/20/2012	8:02:46 PM	PH3 valve closed
8/20/2012	8:02:46 PM	SiCl4 pre valve closed
8/20/2012	8:02:46 PM	SiCl4 post valve closed
8/20/2012	8:02:46 PM	Bypass valve closed
8/20/2012	8:02:46 PM	Bubbler valve closed
8/20/2012	8:02:46 PM	Helium valve opened
8/20/2012	8:02:46 PM	Main Vac valve opened
8/20/2012	8:02:46 PM	Helium MFC set to  20.000000
8/20/2012	8:02:46 PM	H2 MFC set to  0.000000
8/20/2012	8:02:46 PM	BCl3 MFC set to  0.000000
8/20/2012	8:02:46 PM	PH3 MFC set to  0.000000
8/20/2012	8:02:46 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:02:46 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:02:46 PM	Tube furnace set to 150
8/20/2012	8:03:16 PM	Helium valve closed
8/20/2012	8:03:16 PM	H2 valve closed
8/20/2012	8:03:16 PM	BCl3 valve closed
8/20/2012	8:03:16 PM	PH3 valve closed
8/20/2012	8:03:16 PM	SiCl4 pre valve closed
8/20/2012	8:03:16 PM	SiCl4 post valve closed
8/20/2012	8:03:16 PM	Bypass valve closed
8/20/2012	8:03:16 PM	Bubbler valve closed
8/20/2012	8:03:16 PM	Main Vac valve opened
8/20/2012	8:03:16 PM	Helium MFC set to  0.000000
8/20/2012	8:03:16 PM	H2 MFC set to  0.000000
8/20/2012	8:03:16 PM	BCl3 MFC set to  0.000000
8/20/2012	8:03:16 PM	PH3 MFC set to  0.000000
8/20/2012	8:03:16 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:03:16 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:03:16 PM	Tube furnace set to 150
8/20/2012	8:03:46 PM	H2 valve closed
8/20/2012	8:03:47 PM	BCl3 valve closed
8/20/2012	8:03:47 PM	PH3 valve closed
8/20/2012	8:03:47 PM	SiCl4 pre valve closed
8/20/2012	8:03:47 PM	SiCl4 post valve closed
8/20/2012	8:03:47 PM	Bypass valve closed
8/20/2012	8:03:47 PM	Bubbler valve closed
8/20/2012	8:03:47 PM	Helium valve opened
8/20/2012	8:03:47 PM	Main Vac valve opened
8/20/2012	8:03:47 PM	Helium MFC set to  20.000000
8/20/2012	8:03:47 PM	H2 MFC set to  0.000000
8/20/2012	8:03:47 PM	BCl3 MFC set to  0.000000
8/20/2012	8:03:47 PM	PH3 MFC set to  0.000000
8/20/2012	8:03:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:03:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:03:47 PM	Tube furnace set to 150
8/20/2012	8:04:17 PM	Helium valve closed
8/20/2012	8:04:17 PM	H2 valve closed
8/20/2012	8:04:17 PM	BCl3 valve closed
8/20/2012	8:04:17 PM	PH3 valve closed
8/20/2012	8:04:17 PM	SiCl4 pre valve closed
8/20/2012	8:04:17 PM	SiCl4 post valve closed
8/20/2012	8:04:17 PM	Bypass valve closed
8/20/2012	8:04:17 PM	Bubbler valve closed
8/20/2012	8:04:17 PM	Main Vac valve opened
8/20/2012	8:04:17 PM	Helium MFC set to  0.000000
8/20/2012	8:04:17 PM	H2 MFC set to  0.000000
8/20/2012	8:04:17 PM	BCl3 MFC set to  0.000000
8/20/2012	8:04:17 PM	PH3 MFC set to  0.000000
8/20/2012	8:04:17 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:04:17 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:04:17 PM	Tube furnace set to 150
8/20/2012	8:04:47 PM	H2 valve closed
8/20/2012	8:04:47 PM	BCl3 valve closed
8/20/2012	8:04:47 PM	PH3 valve closed
8/20/2012	8:04:47 PM	SiCl4 pre valve closed
8/20/2012	8:04:47 PM	SiCl4 post valve closed
8/20/2012	8:04:47 PM	Bypass valve closed
8/20/2012	8:04:47 PM	Bubbler valve closed
8/20/2012	8:04:47 PM	Helium valve opened
8/20/2012	8:04:47 PM	Main Vac valve opened
8/20/2012	8:04:47 PM	Helium MFC set to  20.000000
8/20/2012	8:04:47 PM	H2 MFC set to  0.000000
8/20/2012	8:04:47 PM	BCl3 MFC set to  0.000000
8/20/2012	8:04:47 PM	PH3 MFC set to  0.000000
8/20/2012	8:04:47 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:04:47 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:04:47 PM	Tube furnace set to 150
8/20/2012	8:05:17 PM	Helium valve closed
8/20/2012	8:05:17 PM	H2 valve closed
8/20/2012	8:05:17 PM	BCl3 valve closed
8/20/2012	8:05:17 PM	PH3 valve closed
8/20/2012	8:05:17 PM	SiCl4 pre valve closed
8/20/2012	8:05:17 PM	SiCl4 post valve closed
8/20/2012	8:05:17 PM	Bypass valve closed
8/20/2012	8:05:17 PM	Bubbler valve closed
8/20/2012	8:05:17 PM	Main Vac valve opened
8/20/2012	8:05:17 PM	Helium MFC set to  0.000000
8/20/2012	8:05:17 PM	H2 MFC set to  0.000000
8/20/2012	8:05:17 PM	BCl3 MFC set to  0.000000
8/20/2012	8:05:17 PM	PH3 MFC set to  0.000000
8/20/2012	8:05:17 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:05:17 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:05:17 PM	Tube furnace set to 150
8/20/2012	8:05:18 PM	Run finished at 8:05 PM
8/20/2012	8:16:55 PM	Main Vac valve closed
8/20/2012	8:17:09 PM	Main Vac valve opened
8/20/2012	8:20:34 PM	Recipe started at 8:20 PM
8/20/2012	8:20:34 PM	Helium valve closed
8/20/2012	8:20:34 PM	H2 valve closed
8/20/2012	8:20:34 PM	BCl3 valve closed
8/20/2012	8:20:34 PM	PH3 valve closed
8/20/2012	8:20:34 PM	SiCl4 pre valve closed
8/20/2012	8:20:34 PM	SiCl4 post valve closed
8/20/2012	8:20:34 PM	Main Vac valve closed
8/20/2012	8:20:34 PM	Bypass valve closed
8/20/2012	8:20:34 PM	Bubbler valve closed
8/20/2012	8:20:34 PM	Helium MFC set to  0.000000
8/20/2012	8:20:34 PM	H2 MFC set to  0.000000
8/20/2012	8:20:34 PM	BCl3 MFC set to  0.000000
8/20/2012	8:20:34 PM	PH3 MFC set to  0.000000
8/20/2012	8:20:34 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:20:34 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:20:34 PM	Tube furnace set to 0
8/20/2012	8:20:37 PM	Helium valve closed
8/20/2012	8:20:37 PM	BCl3 valve closed
8/20/2012	8:20:37 PM	PH3 valve closed
8/20/2012	8:20:37 PM	SiCl4 pre valve closed
8/20/2012	8:20:37 PM	SiCl4 post valve closed
8/20/2012	8:20:37 PM	Main Vac valve closed
8/20/2012	8:20:37 PM	Bypass valve closed
8/20/2012	8:20:37 PM	Bubbler valve closed
8/20/2012	8:20:37 PM	H2 valve opened
8/20/2012	8:20:37 PM	Helium MFC set to  0.000000
8/20/2012	8:20:37 PM	H2 MFC set to  500.000000
8/20/2012	8:20:37 PM	BCl3 MFC set to  0.000000
8/20/2012	8:20:37 PM	PH3 MFC set to  0.000000
8/20/2012	8:20:37 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:20:37 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:20:38 PM	Tube furnace set to 50
8/20/2012	8:21:50 PM	Helium valve closed
8/20/2012	8:21:50 PM	BCl3 valve closed
8/20/2012	8:21:50 PM	PH3 valve closed
8/20/2012	8:21:50 PM	SiCl4 pre valve closed
8/20/2012	8:21:50 PM	SiCl4 post valve closed
8/20/2012	8:21:50 PM	Main Vac valve closed
8/20/2012	8:21:50 PM	Bypass valve closed
8/20/2012	8:21:50 PM	H2 valve opened
8/20/2012	8:21:50 PM	Bubbler valve opened
8/20/2012	8:21:50 PM	Helium MFC set to  0.000000
8/20/2012	8:21:50 PM	H2 MFC set to  500.000000
8/20/2012	8:21:50 PM	BCl3 MFC set to  0.000000
8/20/2012	8:21:50 PM	PH3 MFC set to  0.000000
8/20/2012	8:21:50 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:21:50 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:21:50 PM	Tube furnace set to 50
8/20/2012	8:21:51 PM	Helium valve closed
8/20/2012	8:21:51 PM	BCl3 valve closed
8/20/2012	8:21:51 PM	PH3 valve closed
8/20/2012	8:21:51 PM	SiCl4 pre valve closed
8/20/2012	8:21:51 PM	SiCl4 post valve closed
8/20/2012	8:21:51 PM	Main Vac valve closed
8/20/2012	8:21:51 PM	Bypass valve closed
8/20/2012	8:21:51 PM	H2 valve opened
8/20/2012	8:21:51 PM	Bubbler valve opened
8/20/2012	8:21:51 PM	Helium MFC set to  0.000000
8/20/2012	8:21:51 PM	H2 MFC set to  450.000000
8/20/2012	8:21:51 PM	BCl3 MFC set to  0.000000
8/20/2012	8:21:51 PM	PH3 MFC set to  0.000000
8/20/2012	8:21:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:21:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:21:52 PM	Tube furnace set to 1000
8/20/2012	8:41:52 PM	Helium valve closed
8/20/2012	8:41:52 PM	PH3 valve closed
8/20/2012	8:41:52 PM	Main Vac valve closed
8/20/2012	8:41:52 PM	Bypass valve closed
8/20/2012	8:41:52 PM	H2 valve opened
8/20/2012	8:41:52 PM	BCl3 valve opened
8/20/2012	8:41:52 PM	SiCl4 pre valve opened
8/20/2012	8:41:52 PM	SiCl4 post valve opened
8/20/2012	8:41:52 PM	Bubbler valve opened
8/20/2012	8:41:52 PM	Helium MFC set to  0.000000
8/20/2012	8:41:52 PM	H2 MFC set to  450.000000
8/20/2012	8:41:52 PM	BCl3 MFC set to  1.200000
8/20/2012	8:41:52 PM	PH3 MFC set to  0.000000
8/20/2012	8:41:52 PM	SiCl4 MFC set to  50.000000
8/20/2012	8:41:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:41:52 PM	Tube furnace set to 1000
8/20/2012	8:56:52 PM	Helium valve closed
8/20/2012	8:56:52 PM	BCl3 valve closed
8/20/2012	8:56:52 PM	PH3 valve closed
8/20/2012	8:56:52 PM	SiCl4 pre valve closed
8/20/2012	8:56:52 PM	SiCl4 post valve closed
8/20/2012	8:56:52 PM	Main Vac valve closed
8/20/2012	8:56:52 PM	Bypass valve closed
8/20/2012	8:56:52 PM	H2 valve opened
8/20/2012	8:56:52 PM	Bubbler valve opened
8/20/2012	8:56:52 PM	Helium MFC set to  0.000000
8/20/2012	8:56:52 PM	H2 MFC set to  500.000000
8/20/2012	8:56:52 PM	BCl3 MFC set to  0.000000
8/20/2012	8:56:52 PM	PH3 MFC set to  0.000000
8/20/2012	8:56:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:56:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:56:52 PM	Tube furnace set to 750
8/20/2012	8:57:52 PM	H2 valve closed
8/20/2012	8:57:52 PM	BCl3 valve closed
8/20/2012	8:57:52 PM	PH3 valve closed
8/20/2012	8:57:52 PM	SiCl4 pre valve closed
8/20/2012	8:57:52 PM	SiCl4 post valve closed
8/20/2012	8:57:52 PM	Main Vac valve closed
8/20/2012	8:57:52 PM	Bypass valve closed
8/20/2012	8:57:52 PM	Helium valve opened
8/20/2012	8:57:52 PM	Bubbler valve opened
8/20/2012	8:57:52 PM	Helium MFC set to  400.000000
8/20/2012	8:57:52 PM	H2 MFC set to  0.000000
8/20/2012	8:57:52 PM	BCl3 MFC set to  0.000000
8/20/2012	8:57:52 PM	PH3 MFC set to  0.000000
8/20/2012	8:57:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	8:57:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	8:57:52 PM	Tube furnace set to 0
8/20/2012	9:22:52 PM	Helium valve closed
8/20/2012	9:22:52 PM	H2 valve closed
8/20/2012	9:22:52 PM	BCl3 valve closed
8/20/2012	9:22:52 PM	PH3 valve closed
8/20/2012	9:22:52 PM	SiCl4 pre valve closed
8/20/2012	9:22:52 PM	SiCl4 post valve closed
8/20/2012	9:22:52 PM	Main Vac valve closed
8/20/2012	9:22:52 PM	Bypass valve closed
8/20/2012	9:22:52 PM	Bubbler valve closed
8/20/2012	9:22:52 PM	Helium MFC set to  0.000000
8/20/2012	9:22:52 PM	H2 MFC set to  0.000000
8/20/2012	9:22:52 PM	BCl3 MFC set to  0.000000
8/20/2012	9:22:52 PM	PH3 MFC set to  0.000000
8/20/2012	9:22:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:22:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:22:53 PM	Tube furnace set to 50
8/20/2012	9:27:53 PM	Helium valve closed
8/20/2012	9:27:53 PM	H2 valve closed
8/20/2012	9:27:53 PM	BCl3 valve closed
8/20/2012	9:27:53 PM	PH3 valve closed
8/20/2012	9:27:53 PM	SiCl4 pre valve closed
8/20/2012	9:27:53 PM	SiCl4 post valve closed
8/20/2012	9:27:53 PM	Main Vac valve closed
8/20/2012	9:27:53 PM	Bubbler valve closed
8/20/2012	9:27:53 PM	Bypass valve opened
8/20/2012	9:27:53 PM	Helium MFC set to  0.000000
8/20/2012	9:27:53 PM	H2 MFC set to  0.000000
8/20/2012	9:27:53 PM	BCl3 MFC set to  0.000000
8/20/2012	9:27:53 PM	PH3 MFC set to  0.000000
8/20/2012	9:27:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:27:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:27:53 PM	Tube furnace set to 0
8/20/2012	9:28:55 PM	Helium valve closed
8/20/2012	9:28:55 PM	H2 valve closed
8/20/2012	9:28:55 PM	BCl3 valve closed
8/20/2012	9:28:55 PM	PH3 valve closed
8/20/2012	9:28:55 PM	SiCl4 pre valve closed
8/20/2012	9:28:55 PM	SiCl4 post valve closed
8/20/2012	9:28:55 PM	Main Vac valve closed
8/20/2012	9:28:55 PM	Bubbler valve closed
8/20/2012	9:28:55 PM	Bypass valve opened
8/20/2012	9:28:55 PM	Helium MFC set to  0.000000
8/20/2012	9:28:55 PM	H2 MFC set to  0.000000
8/20/2012	9:28:55 PM	BCl3 MFC set to  0.000000
8/20/2012	9:28:55 PM	PH3 MFC set to  0.000000
8/20/2012	9:28:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:28:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:28:55 PM	Tube furnace set to 0
8/20/2012	9:29:55 PM	Helium valve closed
8/20/2012	9:29:55 PM	H2 valve closed
8/20/2012	9:29:55 PM	BCl3 valve closed
8/20/2012	9:29:55 PM	PH3 valve closed
8/20/2012	9:29:55 PM	SiCl4 pre valve closed
8/20/2012	9:29:55 PM	SiCl4 post valve closed
8/20/2012	9:29:55 PM	Bypass valve closed
8/20/2012	9:29:55 PM	Bubbler valve closed
8/20/2012	9:29:55 PM	Main Vac valve opened
8/20/2012	9:29:55 PM	Helium MFC set to  0.000000
8/20/2012	9:29:55 PM	H2 MFC set to  0.000000
8/20/2012	9:29:55 PM	BCl3 MFC set to  0.000000
8/20/2012	9:29:55 PM	PH3 MFC set to  0.000000
8/20/2012	9:29:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:29:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:29:55 PM	Tube furnace set to 0
8/20/2012	9:29:56 PM	Run finished at 9:29 PM
8/20/2012	9:39:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	9:39:33 PM	Recipe started at 9:39 PM
8/20/2012	9:39:33 PM	Helium valve closed
8/20/2012	9:39:33 PM	H2 valve closed
8/20/2012	9:39:33 PM	BCl3 valve closed
8/20/2012	9:39:33 PM	PH3 valve closed
8/20/2012	9:39:33 PM	SiCl4 pre valve closed
8/20/2012	9:39:33 PM	SiCl4 post valve closed
8/20/2012	9:39:33 PM	Main Vac valve closed
8/20/2012	9:39:33 PM	Bypass valve closed
8/20/2012	9:39:33 PM	Bubbler valve closed
8/20/2012	9:39:33 PM	Helium MFC set to  0.000000
8/20/2012	9:39:33 PM	H2 MFC set to  0.000000
8/20/2012	9:39:33 PM	BCl3 MFC set to  0.000000
8/20/2012	9:39:33 PM	PH3 MFC set to  0.000000
8/20/2012	9:39:33 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:39:33 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:39:33 PM	Tube furnace set to 0
8/20/2012	9:39:36 PM	H2 valve closed
8/20/2012	9:39:36 PM	BCl3 valve closed
8/20/2012	9:39:36 PM	PH3 valve closed
8/20/2012	9:39:36 PM	SiCl4 pre valve closed
8/20/2012	9:39:36 PM	SiCl4 post valve closed
8/20/2012	9:39:36 PM	Main Vac valve closed
8/20/2012	9:39:36 PM	Bypass valve closed
8/20/2012	9:39:36 PM	Bubbler valve closed
8/20/2012	9:39:36 PM	Helium valve opened
8/20/2012	9:39:36 PM	Helium MFC set to  500.000000
8/20/2012	9:39:36 PM	H2 MFC set to  0.000000
8/20/2012	9:39:36 PM	BCl3 MFC set to  0.000000
8/20/2012	9:39:36 PM	PH3 MFC set to  0.000000
8/20/2012	9:39:36 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:39:36 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:39:37 PM	Tube furnace set to 0
8/20/2012	9:40:48 PM	Helium valve closed
8/20/2012	9:40:48 PM	H2 valve closed
8/20/2012	9:40:48 PM	BCl3 valve closed
8/20/2012	9:40:48 PM	PH3 valve closed
8/20/2012	9:40:48 PM	SiCl4 pre valve closed
8/20/2012	9:40:48 PM	SiCl4 post valve closed
8/20/2012	9:40:48 PM	Main Vac valve closed
8/20/2012	9:40:48 PM	Bypass valve closed
8/20/2012	9:40:48 PM	Bubbler valve closed
8/20/2012	9:40:48 PM	Helium MFC set to  0.000000
8/20/2012	9:40:48 PM	H2 MFC set to  0.000000
8/20/2012	9:40:48 PM	BCl3 MFC set to  0.000000
8/20/2012	9:40:48 PM	PH3 MFC set to  0.000000
8/20/2012	9:40:48 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:40:48 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:40:49 PM	Tube furnace set to 0
8/20/2012	9:40:50 PM	Run finished at 9:40 PM
8/20/2012	9:40:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2012	9:47:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	9:47:38 PM	Recipe started at 9:47 PM
8/20/2012	9:47:38 PM	Helium valve closed
8/20/2012	9:47:38 PM	H2 valve closed
8/20/2012	9:47:38 PM	BCl3 valve closed
8/20/2012	9:47:38 PM	PH3 valve closed
8/20/2012	9:47:38 PM	SiCl4 pre valve closed
8/20/2012	9:47:38 PM	SiCl4 post valve closed
8/20/2012	9:47:38 PM	Main Vac valve closed
8/20/2012	9:47:38 PM	Bubbler valve closed
8/20/2012	9:47:38 PM	Bypass valve opened
8/20/2012	9:47:38 PM	Helium MFC set to  0.000000
8/20/2012	9:47:38 PM	H2 MFC set to  0.000000
8/20/2012	9:47:38 PM	BCl3 MFC set to  0.000000
8/20/2012	9:47:38 PM	PH3 MFC set to  0.000000
8/20/2012	9:47:38 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:47:38 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:47:38 PM	Tube furnace set to 0
8/20/2012	9:48:59 PM	Helium valve closed
8/20/2012	9:48:59 PM	H2 valve closed
8/20/2012	9:48:59 PM	BCl3 valve closed
8/20/2012	9:48:59 PM	PH3 valve closed
8/20/2012	9:48:59 PM	SiCl4 pre valve closed
8/20/2012	9:48:59 PM	SiCl4 post valve closed
8/20/2012	9:48:59 PM	Main Vac valve closed
8/20/2012	9:48:59 PM	Bubbler valve closed
8/20/2012	9:48:59 PM	Bypass valve opened
8/20/2012	9:48:59 PM	Helium MFC set to  0.000000
8/20/2012	9:48:59 PM	H2 MFC set to  0.000000
8/20/2012	9:48:59 PM	BCl3 MFC set to  0.000000
8/20/2012	9:48:59 PM	PH3 MFC set to  0.000000
8/20/2012	9:48:59 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:48:59 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:48:59 PM	Tube furnace set to 0
8/20/2012	9:49:59 PM	Helium valve closed
8/20/2012	9:49:59 PM	H2 valve closed
8/20/2012	9:49:59 PM	BCl3 valve closed
8/20/2012	9:49:59 PM	PH3 valve closed
8/20/2012	9:49:59 PM	SiCl4 pre valve closed
8/20/2012	9:49:59 PM	SiCl4 post valve closed
8/20/2012	9:49:59 PM	Bypass valve closed
8/20/2012	9:49:59 PM	Bubbler valve closed
8/20/2012	9:49:59 PM	Main Vac valve opened
8/20/2012	9:49:59 PM	Helium MFC set to  0.000000
8/20/2012	9:49:59 PM	H2 MFC set to  0.000000
8/20/2012	9:49:59 PM	BCl3 MFC set to  0.000000
8/20/2012	9:49:59 PM	PH3 MFC set to  0.000000
8/20/2012	9:49:59 PM	SiCl4 MFC set to  0.000000
8/20/2012	9:49:59 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	9:50:00 PM	Tube furnace set to 0
8/20/2012	9:50:01 PM	Run finished at 9:50 PM
8/20/2012	9:50:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2012	10:07:54 PM	Recipe started at 10:07 PM
8/20/2012	10:07:54 PM	Helium valve closed
8/20/2012	10:07:54 PM	H2 valve closed
8/20/2012	10:07:54 PM	BCl3 valve closed
8/20/2012	10:07:54 PM	PH3 valve closed
8/20/2012	10:07:54 PM	SiCl4 pre valve closed
8/20/2012	10:07:54 PM	SiCl4 post valve closed
8/20/2012	10:07:54 PM	Main Vac valve closed
8/20/2012	10:07:54 PM	Bubbler valve closed
8/20/2012	10:07:54 PM	Bypass valve opened
8/20/2012	10:07:54 PM	Helium MFC set to  0.000000
8/20/2012	10:07:54 PM	H2 MFC set to  0.000000
8/20/2012	10:07:54 PM	BCl3 MFC set to  0.000000
8/20/2012	10:07:54 PM	PH3 MFC set to  0.000000
8/20/2012	10:07:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:07:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:07:54 PM	Tube furnace set to 150
8/20/2012	10:07:55 PM	Helium valve closed
8/20/2012	10:07:55 PM	H2 valve closed
8/20/2012	10:07:55 PM	BCl3 valve closed
8/20/2012	10:07:55 PM	PH3 valve closed
8/20/2012	10:07:55 PM	SiCl4 pre valve closed
8/20/2012	10:07:55 PM	SiCl4 post valve closed
8/20/2012	10:07:55 PM	Main Vac valve closed
8/20/2012	10:07:55 PM	Bubbler valve closed
8/20/2012	10:07:55 PM	Bypass valve opened
8/20/2012	10:07:55 PM	Helium MFC set to  0.000000
8/20/2012	10:07:55 PM	H2 MFC set to  0.000000
8/20/2012	10:07:55 PM	BCl3 MFC set to  0.000000
8/20/2012	10:07:55 PM	PH3 MFC set to  0.000000
8/20/2012	10:07:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:07:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:07:55 PM	Tube furnace set to 150
8/20/2012	10:08:21 PM	Helium valve closed
8/20/2012	10:08:21 PM	H2 valve closed
8/20/2012	10:08:21 PM	BCl3 valve closed
8/20/2012	10:08:21 PM	PH3 valve closed
8/20/2012	10:08:21 PM	SiCl4 pre valve closed
8/20/2012	10:08:21 PM	SiCl4 post valve closed
8/20/2012	10:08:21 PM	Bypass valve closed
8/20/2012	10:08:21 PM	Bubbler valve closed
8/20/2012	10:08:21 PM	Main Vac valve opened
8/20/2012	10:08:21 PM	Helium MFC set to  0.000000
8/20/2012	10:08:21 PM	H2 MFC set to  0.000000
8/20/2012	10:08:21 PM	BCl3 MFC set to  0.000000
8/20/2012	10:08:21 PM	PH3 MFC set to  0.000000
8/20/2012	10:08:21 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:08:21 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:08:21 PM	Tube furnace set to 150
8/20/2012	10:08:51 PM	H2 valve closed
8/20/2012	10:08:51 PM	BCl3 valve closed
8/20/2012	10:08:51 PM	PH3 valve closed
8/20/2012	10:08:51 PM	SiCl4 pre valve closed
8/20/2012	10:08:51 PM	SiCl4 post valve closed
8/20/2012	10:08:51 PM	Bypass valve closed
8/20/2012	10:08:51 PM	Bubbler valve closed
8/20/2012	10:08:51 PM	Helium valve opened
8/20/2012	10:08:51 PM	Main Vac valve opened
8/20/2012	10:08:51 PM	Helium MFC set to  20.000000
8/20/2012	10:08:51 PM	H2 MFC set to  0.000000
8/20/2012	10:08:51 PM	BCl3 MFC set to  0.000000
8/20/2012	10:08:51 PM	PH3 MFC set to  0.000000
8/20/2012	10:08:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:08:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:08:51 PM	Tube furnace set to 150
8/20/2012	10:09:21 PM	Helium valve closed
8/20/2012	10:09:21 PM	H2 valve closed
8/20/2012	10:09:21 PM	BCl3 valve closed
8/20/2012	10:09:21 PM	PH3 valve closed
8/20/2012	10:09:21 PM	SiCl4 pre valve closed
8/20/2012	10:09:21 PM	SiCl4 post valve closed
8/20/2012	10:09:21 PM	Bypass valve closed
8/20/2012	10:09:21 PM	Bubbler valve closed
8/20/2012	10:09:21 PM	Main Vac valve opened
8/20/2012	10:09:21 PM	Helium MFC set to  0.000000
8/20/2012	10:09:21 PM	H2 MFC set to  0.000000
8/20/2012	10:09:21 PM	BCl3 MFC set to  0.000000
8/20/2012	10:09:21 PM	PH3 MFC set to  0.000000
8/20/2012	10:09:21 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:09:21 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:09:22 PM	Tube furnace set to 150
8/20/2012	10:09:52 PM	H2 valve closed
8/20/2012	10:09:52 PM	BCl3 valve closed
8/20/2012	10:09:52 PM	PH3 valve closed
8/20/2012	10:09:52 PM	SiCl4 pre valve closed
8/20/2012	10:09:52 PM	SiCl4 post valve closed
8/20/2012	10:09:52 PM	Bypass valve closed
8/20/2012	10:09:52 PM	Bubbler valve closed
8/20/2012	10:09:52 PM	Helium valve opened
8/20/2012	10:09:52 PM	Main Vac valve opened
8/20/2012	10:09:52 PM	Helium MFC set to  20.000000
8/20/2012	10:09:52 PM	H2 MFC set to  0.000000
8/20/2012	10:09:52 PM	BCl3 MFC set to  0.000000
8/20/2012	10:09:52 PM	PH3 MFC set to  0.000000
8/20/2012	10:09:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:09:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:09:52 PM	Tube furnace set to 150
8/20/2012	10:10:22 PM	Helium valve closed
8/20/2012	10:10:22 PM	H2 valve closed
8/20/2012	10:10:22 PM	BCl3 valve closed
8/20/2012	10:10:22 PM	PH3 valve closed
8/20/2012	10:10:22 PM	SiCl4 pre valve closed
8/20/2012	10:10:22 PM	SiCl4 post valve closed
8/20/2012	10:10:22 PM	Bypass valve closed
8/20/2012	10:10:22 PM	Bubbler valve closed
8/20/2012	10:10:22 PM	Main Vac valve opened
8/20/2012	10:10:22 PM	Helium MFC set to  0.000000
8/20/2012	10:10:22 PM	H2 MFC set to  0.000000
8/20/2012	10:10:22 PM	BCl3 MFC set to  0.000000
8/20/2012	10:10:22 PM	PH3 MFC set to  0.000000
8/20/2012	10:10:22 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:10:22 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:10:22 PM	Tube furnace set to 150
8/20/2012	10:10:52 PM	H2 valve closed
8/20/2012	10:10:52 PM	BCl3 valve closed
8/20/2012	10:10:52 PM	PH3 valve closed
8/20/2012	10:10:52 PM	SiCl4 pre valve closed
8/20/2012	10:10:52 PM	SiCl4 post valve closed
8/20/2012	10:10:52 PM	Bypass valve closed
8/20/2012	10:10:52 PM	Bubbler valve closed
8/20/2012	10:10:52 PM	Helium valve opened
8/20/2012	10:10:52 PM	Main Vac valve opened
8/20/2012	10:10:52 PM	Helium MFC set to  20.000000
8/20/2012	10:10:52 PM	H2 MFC set to  0.000000
8/20/2012	10:10:52 PM	BCl3 MFC set to  0.000000
8/20/2012	10:10:52 PM	PH3 MFC set to  0.000000
8/20/2012	10:10:52 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:10:52 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:10:52 PM	Tube furnace set to 150
8/20/2012	10:11:22 PM	Helium valve closed
8/20/2012	10:11:22 PM	H2 valve closed
8/20/2012	10:11:22 PM	BCl3 valve closed
8/20/2012	10:11:22 PM	PH3 valve closed
8/20/2012	10:11:22 PM	SiCl4 pre valve closed
8/20/2012	10:11:22 PM	SiCl4 post valve closed
8/20/2012	10:11:22 PM	Bypass valve closed
8/20/2012	10:11:22 PM	Bubbler valve closed
8/20/2012	10:11:22 PM	Main Vac valve opened
8/20/2012	10:11:22 PM	Helium MFC set to  0.000000
8/20/2012	10:11:22 PM	H2 MFC set to  0.000000
8/20/2012	10:11:22 PM	BCl3 MFC set to  0.000000
8/20/2012	10:11:22 PM	PH3 MFC set to  0.000000
8/20/2012	10:11:22 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:11:22 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:11:23 PM	Tube furnace set to 150
8/20/2012	10:11:53 PM	H2 valve closed
8/20/2012	10:11:53 PM	BCl3 valve closed
8/20/2012	10:11:53 PM	PH3 valve closed
8/20/2012	10:11:53 PM	SiCl4 pre valve closed
8/20/2012	10:11:53 PM	SiCl4 post valve closed
8/20/2012	10:11:53 PM	Bypass valve closed
8/20/2012	10:11:53 PM	Bubbler valve closed
8/20/2012	10:11:53 PM	Helium valve opened
8/20/2012	10:11:53 PM	Main Vac valve opened
8/20/2012	10:11:53 PM	Helium MFC set to  20.000000
8/20/2012	10:11:53 PM	H2 MFC set to  0.000000
8/20/2012	10:11:53 PM	BCl3 MFC set to  0.000000
8/20/2012	10:11:53 PM	PH3 MFC set to  0.000000
8/20/2012	10:11:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:11:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:11:53 PM	Tube furnace set to 150
8/20/2012	10:12:23 PM	Helium valve closed
8/20/2012	10:12:23 PM	H2 valve closed
8/20/2012	10:12:23 PM	BCl3 valve closed
8/20/2012	10:12:23 PM	PH3 valve closed
8/20/2012	10:12:23 PM	SiCl4 pre valve closed
8/20/2012	10:12:23 PM	SiCl4 post valve closed
8/20/2012	10:12:23 PM	Bypass valve closed
8/20/2012	10:12:23 PM	Bubbler valve closed
8/20/2012	10:12:23 PM	Main Vac valve opened
8/20/2012	10:12:23 PM	Helium MFC set to  0.000000
8/20/2012	10:12:23 PM	H2 MFC set to  0.000000
8/20/2012	10:12:23 PM	BCl3 MFC set to  0.000000
8/20/2012	10:12:23 PM	PH3 MFC set to  0.000000
8/20/2012	10:12:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:12:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:12:23 PM	Tube furnace set to 150
8/20/2012	10:12:53 PM	H2 valve closed
8/20/2012	10:12:53 PM	BCl3 valve closed
8/20/2012	10:12:53 PM	PH3 valve closed
8/20/2012	10:12:53 PM	SiCl4 pre valve closed
8/20/2012	10:12:53 PM	SiCl4 post valve closed
8/20/2012	10:12:53 PM	Bypass valve closed
8/20/2012	10:12:53 PM	Bubbler valve closed
8/20/2012	10:12:53 PM	Helium valve opened
8/20/2012	10:12:53 PM	Main Vac valve opened
8/20/2012	10:12:53 PM	Helium MFC set to  20.000000
8/20/2012	10:12:53 PM	H2 MFC set to  0.000000
8/20/2012	10:12:53 PM	BCl3 MFC set to  0.000000
8/20/2012	10:12:53 PM	PH3 MFC set to  0.000000
8/20/2012	10:12:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:12:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:12:53 PM	Tube furnace set to 150
8/20/2012	10:13:23 PM	Helium valve closed
8/20/2012	10:13:23 PM	H2 valve closed
8/20/2012	10:13:23 PM	BCl3 valve closed
8/20/2012	10:13:23 PM	PH3 valve closed
8/20/2012	10:13:23 PM	SiCl4 pre valve closed
8/20/2012	10:13:23 PM	SiCl4 post valve closed
8/20/2012	10:13:23 PM	Bypass valve closed
8/20/2012	10:13:23 PM	Bubbler valve closed
8/20/2012	10:13:23 PM	Main Vac valve opened
8/20/2012	10:13:23 PM	Helium MFC set to  0.000000
8/20/2012	10:13:23 PM	H2 MFC set to  0.000000
8/20/2012	10:13:23 PM	BCl3 MFC set to  0.000000
8/20/2012	10:13:23 PM	PH3 MFC set to  0.000000
8/20/2012	10:13:23 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:13:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:13:24 PM	Tube furnace set to 150
8/20/2012	10:13:54 PM	H2 valve closed
8/20/2012	10:13:54 PM	BCl3 valve closed
8/20/2012	10:13:54 PM	PH3 valve closed
8/20/2012	10:13:54 PM	SiCl4 pre valve closed
8/20/2012	10:13:54 PM	SiCl4 post valve closed
8/20/2012	10:13:54 PM	Bypass valve closed
8/20/2012	10:13:54 PM	Bubbler valve closed
8/20/2012	10:13:54 PM	Helium valve opened
8/20/2012	10:13:54 PM	Main Vac valve opened
8/20/2012	10:13:54 PM	Helium MFC set to  20.000000
8/20/2012	10:13:54 PM	H2 MFC set to  0.000000
8/20/2012	10:13:54 PM	BCl3 MFC set to  0.000000
8/20/2012	10:13:54 PM	PH3 MFC set to  0.000000
8/20/2012	10:13:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:13:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:13:54 PM	Tube furnace set to 150
8/20/2012	10:14:24 PM	Helium valve closed
8/20/2012	10:14:24 PM	H2 valve closed
8/20/2012	10:14:24 PM	BCl3 valve closed
8/20/2012	10:14:24 PM	PH3 valve closed
8/20/2012	10:14:24 PM	SiCl4 pre valve closed
8/20/2012	10:14:24 PM	SiCl4 post valve closed
8/20/2012	10:14:24 PM	Bypass valve closed
8/20/2012	10:14:24 PM	Bubbler valve closed
8/20/2012	10:14:24 PM	Main Vac valve opened
8/20/2012	10:14:24 PM	Helium MFC set to  0.000000
8/20/2012	10:14:24 PM	H2 MFC set to  0.000000
8/20/2012	10:14:24 PM	BCl3 MFC set to  0.000000
8/20/2012	10:14:24 PM	PH3 MFC set to  0.000000
8/20/2012	10:14:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:14:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:14:24 PM	Tube furnace set to 150
8/20/2012	10:14:54 PM	H2 valve closed
8/20/2012	10:14:54 PM	BCl3 valve closed
8/20/2012	10:14:54 PM	PH3 valve closed
8/20/2012	10:14:54 PM	SiCl4 pre valve closed
8/20/2012	10:14:54 PM	SiCl4 post valve closed
8/20/2012	10:14:54 PM	Bypass valve closed
8/20/2012	10:14:54 PM	Bubbler valve closed
8/20/2012	10:14:54 PM	Helium valve opened
8/20/2012	10:14:54 PM	Main Vac valve opened
8/20/2012	10:14:54 PM	Helium MFC set to  20.000000
8/20/2012	10:14:54 PM	H2 MFC set to  0.000000
8/20/2012	10:14:54 PM	BCl3 MFC set to  0.000000
8/20/2012	10:14:54 PM	PH3 MFC set to  0.000000
8/20/2012	10:14:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:14:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:14:54 PM	Tube furnace set to 150
8/20/2012	10:15:24 PM	Helium valve closed
8/20/2012	10:15:24 PM	H2 valve closed
8/20/2012	10:15:24 PM	BCl3 valve closed
8/20/2012	10:15:24 PM	PH3 valve closed
8/20/2012	10:15:24 PM	SiCl4 pre valve closed
8/20/2012	10:15:24 PM	SiCl4 post valve closed
8/20/2012	10:15:24 PM	Bypass valve closed
8/20/2012	10:15:24 PM	Bubbler valve closed
8/20/2012	10:15:24 PM	Main Vac valve opened
8/20/2012	10:15:24 PM	Helium MFC set to  0.000000
8/20/2012	10:15:24 PM	H2 MFC set to  0.000000
8/20/2012	10:15:24 PM	BCl3 MFC set to  0.000000
8/20/2012	10:15:24 PM	PH3 MFC set to  0.000000
8/20/2012	10:15:24 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:15:24 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:15:24 PM	Tube furnace set to 150
8/20/2012	10:15:54 PM	H2 valve closed
8/20/2012	10:15:54 PM	BCl3 valve closed
8/20/2012	10:15:54 PM	PH3 valve closed
8/20/2012	10:15:54 PM	SiCl4 pre valve closed
8/20/2012	10:15:54 PM	SiCl4 post valve closed
8/20/2012	10:15:54 PM	Bypass valve closed
8/20/2012	10:15:54 PM	Bubbler valve closed
8/20/2012	10:15:55 PM	Helium valve opened
8/20/2012	10:15:55 PM	Main Vac valve opened
8/20/2012	10:15:55 PM	Helium MFC set to  20.000000
8/20/2012	10:15:55 PM	H2 MFC set to  0.000000
8/20/2012	10:15:55 PM	BCl3 MFC set to  0.000000
8/20/2012	10:15:55 PM	PH3 MFC set to  0.000000
8/20/2012	10:15:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:15:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:15:55 PM	Tube furnace set to 150
8/20/2012	10:16:25 PM	Helium valve closed
8/20/2012	10:16:25 PM	H2 valve closed
8/20/2012	10:16:25 PM	BCl3 valve closed
8/20/2012	10:16:25 PM	PH3 valve closed
8/20/2012	10:16:25 PM	SiCl4 pre valve closed
8/20/2012	10:16:25 PM	SiCl4 post valve closed
8/20/2012	10:16:25 PM	Bypass valve closed
8/20/2012	10:16:25 PM	Bubbler valve closed
8/20/2012	10:16:25 PM	Main Vac valve opened
8/20/2012	10:16:25 PM	Helium MFC set to  0.000000
8/20/2012	10:16:25 PM	H2 MFC set to  0.000000
8/20/2012	10:16:25 PM	BCl3 MFC set to  0.000000
8/20/2012	10:16:25 PM	PH3 MFC set to  0.000000
8/20/2012	10:16:25 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:16:25 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:16:25 PM	Tube furnace set to 150
8/20/2012	10:16:55 PM	H2 valve closed
8/20/2012	10:16:55 PM	BCl3 valve closed
8/20/2012	10:16:55 PM	PH3 valve closed
8/20/2012	10:16:55 PM	SiCl4 pre valve closed
8/20/2012	10:16:55 PM	SiCl4 post valve closed
8/20/2012	10:16:55 PM	Bypass valve closed
8/20/2012	10:16:55 PM	Bubbler valve closed
8/20/2012	10:16:55 PM	Helium valve opened
8/20/2012	10:16:55 PM	Main Vac valve opened
8/20/2012	10:16:55 PM	Helium MFC set to  20.000000
8/20/2012	10:16:55 PM	H2 MFC set to  0.000000
8/20/2012	10:16:55 PM	BCl3 MFC set to  0.000000
8/20/2012	10:16:55 PM	PH3 MFC set to  0.000000
8/20/2012	10:16:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:16:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:16:55 PM	Tube furnace set to 150
8/20/2012	10:17:25 PM	Helium valve closed
8/20/2012	10:17:25 PM	H2 valve closed
8/20/2012	10:17:25 PM	BCl3 valve closed
8/20/2012	10:17:25 PM	PH3 valve closed
8/20/2012	10:17:25 PM	SiCl4 pre valve closed
8/20/2012	10:17:25 PM	SiCl4 post valve closed
8/20/2012	10:17:25 PM	Bypass valve closed
8/20/2012	10:17:25 PM	Bubbler valve closed
8/20/2012	10:17:25 PM	Main Vac valve opened
8/20/2012	10:17:25 PM	Helium MFC set to  0.000000
8/20/2012	10:17:25 PM	H2 MFC set to  0.000000
8/20/2012	10:17:25 PM	BCl3 MFC set to  0.000000
8/20/2012	10:17:25 PM	PH3 MFC set to  0.000000
8/20/2012	10:17:25 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:17:25 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:17:25 PM	Tube furnace set to 150
8/20/2012	10:17:55 PM	H2 valve closed
8/20/2012	10:17:55 PM	BCl3 valve closed
8/20/2012	10:17:55 PM	PH3 valve closed
8/20/2012	10:17:55 PM	SiCl4 pre valve closed
8/20/2012	10:17:55 PM	SiCl4 post valve closed
8/20/2012	10:17:55 PM	Bypass valve closed
8/20/2012	10:17:55 PM	Bubbler valve closed
8/20/2012	10:17:55 PM	Helium valve opened
8/20/2012	10:17:55 PM	Main Vac valve opened
8/20/2012	10:17:55 PM	Helium MFC set to  20.000000
8/20/2012	10:17:55 PM	H2 MFC set to  0.000000
8/20/2012	10:17:55 PM	BCl3 MFC set to  0.000000
8/20/2012	10:17:55 PM	PH3 MFC set to  0.000000
8/20/2012	10:17:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:17:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:17:56 PM	Tube furnace set to 150
8/20/2012	10:18:26 PM	Helium valve closed
8/20/2012	10:18:26 PM	H2 valve closed
8/20/2012	10:18:26 PM	BCl3 valve closed
8/20/2012	10:18:26 PM	PH3 valve closed
8/20/2012	10:18:26 PM	SiCl4 pre valve closed
8/20/2012	10:18:26 PM	SiCl4 post valve closed
8/20/2012	10:18:26 PM	Bypass valve closed
8/20/2012	10:18:26 PM	Bubbler valve closed
8/20/2012	10:18:26 PM	Main Vac valve opened
8/20/2012	10:18:26 PM	Helium MFC set to  0.000000
8/20/2012	10:18:26 PM	H2 MFC set to  0.000000
8/20/2012	10:18:26 PM	BCl3 MFC set to  0.000000
8/20/2012	10:18:26 PM	PH3 MFC set to  0.000000
8/20/2012	10:18:26 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:18:26 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:18:26 PM	Tube furnace set to 150
8/20/2012	10:18:27 PM	Run finished at 10:18 PM
8/20/2012	10:36:19 PM	Main Vac valve closed
8/20/2012	10:36:31 PM	Main Vac valve opened
8/20/2012	10:37:35 PM	Recipe started at 10:37 PM
8/20/2012	10:37:35 PM	Helium valve closed
8/20/2012	10:37:35 PM	H2 valve closed
8/20/2012	10:37:35 PM	BCl3 valve closed
8/20/2012	10:37:35 PM	PH3 valve closed
8/20/2012	10:37:35 PM	SiCl4 pre valve closed
8/20/2012	10:37:35 PM	SiCl4 post valve closed
8/20/2012	10:37:35 PM	Main Vac valve closed
8/20/2012	10:37:35 PM	Bypass valve closed
8/20/2012	10:37:35 PM	Bubbler valve closed
8/20/2012	10:37:35 PM	Helium MFC set to  0.000000
8/20/2012	10:37:35 PM	H2 MFC set to  0.000000
8/20/2012	10:37:35 PM	BCl3 MFC set to  0.000000
8/20/2012	10:37:35 PM	PH3 MFC set to  0.000000
8/20/2012	10:37:35 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:37:35 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:37:36 PM	Tube furnace set to 0
8/20/2012	10:37:39 PM	Helium valve closed
8/20/2012	10:37:39 PM	BCl3 valve closed
8/20/2012	10:37:39 PM	PH3 valve closed
8/20/2012	10:37:39 PM	SiCl4 pre valve closed
8/20/2012	10:37:39 PM	SiCl4 post valve closed
8/20/2012	10:37:39 PM	Main Vac valve closed
8/20/2012	10:37:39 PM	Bypass valve closed
8/20/2012	10:37:39 PM	Bubbler valve closed
8/20/2012	10:37:39 PM	H2 valve opened
8/20/2012	10:37:39 PM	Helium MFC set to  0.000000
8/20/2012	10:37:39 PM	H2 MFC set to  500.000000
8/20/2012	10:37:39 PM	BCl3 MFC set to  0.000000
8/20/2012	10:37:39 PM	PH3 MFC set to  0.000000
8/20/2012	10:37:39 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:37:39 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:37:39 PM	Tube furnace set to 50
8/20/2012	10:38:51 PM	Helium valve closed
8/20/2012	10:38:51 PM	BCl3 valve closed
8/20/2012	10:38:51 PM	PH3 valve closed
8/20/2012	10:38:51 PM	SiCl4 pre valve closed
8/20/2012	10:38:51 PM	SiCl4 post valve closed
8/20/2012	10:38:51 PM	Main Vac valve closed
8/20/2012	10:38:51 PM	Bypass valve closed
8/20/2012	10:38:51 PM	H2 valve opened
8/20/2012	10:38:51 PM	Bubbler valve opened
8/20/2012	10:38:51 PM	Helium MFC set to  0.000000
8/20/2012	10:38:51 PM	H2 MFC set to  500.000000
8/20/2012	10:38:51 PM	BCl3 MFC set to  0.000000
8/20/2012	10:38:51 PM	PH3 MFC set to  0.000000
8/20/2012	10:38:51 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:38:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:38:52 PM	Tube furnace set to 50
8/20/2012	10:38:53 PM	Helium valve closed
8/20/2012	10:38:53 PM	BCl3 valve closed
8/20/2012	10:38:53 PM	PH3 valve closed
8/20/2012	10:38:53 PM	SiCl4 pre valve closed
8/20/2012	10:38:53 PM	SiCl4 post valve closed
8/20/2012	10:38:53 PM	Main Vac valve closed
8/20/2012	10:38:53 PM	Bypass valve closed
8/20/2012	10:38:53 PM	H2 valve opened
8/20/2012	10:38:53 PM	Bubbler valve opened
8/20/2012	10:38:53 PM	Helium MFC set to  0.000000
8/20/2012	10:38:53 PM	H2 MFC set to  450.000000
8/20/2012	10:38:53 PM	BCl3 MFC set to  0.000000
8/20/2012	10:38:53 PM	PH3 MFC set to  0.000000
8/20/2012	10:38:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	10:38:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:38:53 PM	Tube furnace set to 1000
8/20/2012	10:58:53 PM	Helium valve closed
8/20/2012	10:58:53 PM	PH3 valve closed
8/20/2012	10:58:53 PM	Main Vac valve closed
8/20/2012	10:58:53 PM	Bypass valve closed
8/20/2012	10:58:53 PM	H2 valve opened
8/20/2012	10:58:53 PM	BCl3 valve opened
8/20/2012	10:58:53 PM	SiCl4 pre valve opened
8/20/2012	10:58:53 PM	SiCl4 post valve opened
8/20/2012	10:58:53 PM	Bubbler valve opened
8/20/2012	10:58:53 PM	Helium MFC set to  0.000000
8/20/2012	10:58:53 PM	H2 MFC set to  450.000000
8/20/2012	10:58:53 PM	BCl3 MFC set to  1.200000
8/20/2012	10:58:53 PM	PH3 MFC set to  0.000000
8/20/2012	10:58:53 PM	SiCl4 MFC set to  50.000000
8/20/2012	10:58:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	10:58:53 PM	Tube furnace set to 1000
8/20/2012	11:13:53 PM	Helium valve closed
8/20/2012	11:13:53 PM	BCl3 valve closed
8/20/2012	11:13:53 PM	PH3 valve closed
8/20/2012	11:13:53 PM	SiCl4 pre valve closed
8/20/2012	11:13:53 PM	SiCl4 post valve closed
8/20/2012	11:13:53 PM	Main Vac valve closed
8/20/2012	11:13:53 PM	Bypass valve closed
8/20/2012	11:13:53 PM	H2 valve opened
8/20/2012	11:13:53 PM	Bubbler valve opened
8/20/2012	11:13:53 PM	Helium MFC set to  0.000000
8/20/2012	11:13:53 PM	H2 MFC set to  500.000000
8/20/2012	11:13:53 PM	BCl3 MFC set to  0.000000
8/20/2012	11:13:53 PM	PH3 MFC set to  0.000000
8/20/2012	11:13:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:13:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:13:53 PM	Tube furnace set to 750
8/20/2012	11:23:53 PM	H2 valve closed
8/20/2012	11:23:53 PM	BCl3 valve closed
8/20/2012	11:23:53 PM	PH3 valve closed
8/20/2012	11:23:53 PM	SiCl4 pre valve closed
8/20/2012	11:23:53 PM	SiCl4 post valve closed
8/20/2012	11:23:53 PM	Main Vac valve closed
8/20/2012	11:23:53 PM	Bypass valve closed
8/20/2012	11:23:53 PM	Helium valve opened
8/20/2012	11:23:53 PM	Bubbler valve opened
8/20/2012	11:23:53 PM	Helium MFC set to  400.000000
8/20/2012	11:23:53 PM	H2 MFC set to  0.000000
8/20/2012	11:23:53 PM	BCl3 MFC set to  0.000000
8/20/2012	11:23:53 PM	PH3 MFC set to  0.000000
8/20/2012	11:23:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:23:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:23:53 PM	Tube furnace set to 0
8/20/2012	11:48:53 PM	Helium valve closed
8/20/2012	11:48:53 PM	H2 valve closed
8/20/2012	11:48:53 PM	BCl3 valve closed
8/20/2012	11:48:53 PM	PH3 valve closed
8/20/2012	11:48:53 PM	SiCl4 pre valve closed
8/20/2012	11:48:53 PM	SiCl4 post valve closed
8/20/2012	11:48:53 PM	Main Vac valve closed
8/20/2012	11:48:53 PM	Bypass valve closed
8/20/2012	11:48:53 PM	Bubbler valve closed
8/20/2012	11:48:53 PM	Helium MFC set to  0.000000
8/20/2012	11:48:53 PM	H2 MFC set to  0.000000
8/20/2012	11:48:53 PM	BCl3 MFC set to  0.000000
8/20/2012	11:48:53 PM	PH3 MFC set to  0.000000
8/20/2012	11:48:53 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:48:53 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:48:54 PM	Tube furnace set to 50
8/20/2012	11:53:54 PM	Helium valve closed
8/20/2012	11:53:54 PM	H2 valve closed
8/20/2012	11:53:54 PM	BCl3 valve closed
8/20/2012	11:53:54 PM	PH3 valve closed
8/20/2012	11:53:54 PM	SiCl4 pre valve closed
8/20/2012	11:53:54 PM	SiCl4 post valve closed
8/20/2012	11:53:54 PM	Main Vac valve closed
8/20/2012	11:53:54 PM	Bubbler valve closed
8/20/2012	11:53:54 PM	Bypass valve opened
8/20/2012	11:53:54 PM	Helium MFC set to  0.000000
8/20/2012	11:53:54 PM	H2 MFC set to  0.000000
8/20/2012	11:53:54 PM	BCl3 MFC set to  0.000000
8/20/2012	11:53:54 PM	PH3 MFC set to  0.000000
8/20/2012	11:53:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:53:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:53:54 PM	Tube furnace set to 0
8/20/2012	11:54:54 PM	Helium valve closed
8/20/2012	11:54:54 PM	H2 valve closed
8/20/2012	11:54:54 PM	BCl3 valve closed
8/20/2012	11:54:54 PM	PH3 valve closed
8/20/2012	11:54:54 PM	SiCl4 pre valve closed
8/20/2012	11:54:54 PM	SiCl4 post valve closed
8/20/2012	11:54:54 PM	Main Vac valve closed
8/20/2012	11:54:54 PM	Bubbler valve closed
8/20/2012	11:54:54 PM	Bypass valve opened
8/20/2012	11:54:54 PM	Helium MFC set to  0.000000
8/20/2012	11:54:54 PM	H2 MFC set to  0.000000
8/20/2012	11:54:54 PM	BCl3 MFC set to  0.000000
8/20/2012	11:54:54 PM	PH3 MFC set to  0.000000
8/20/2012	11:54:54 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:54:54 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:54:55 PM	Tube furnace set to 0
8/20/2012	11:55:55 PM	Helium valve closed
8/20/2012	11:55:55 PM	H2 valve closed
8/20/2012	11:55:55 PM	BCl3 valve closed
8/20/2012	11:55:55 PM	PH3 valve closed
8/20/2012	11:55:55 PM	SiCl4 pre valve closed
8/20/2012	11:55:55 PM	SiCl4 post valve closed
8/20/2012	11:55:55 PM	Bypass valve closed
8/20/2012	11:55:55 PM	Bubbler valve closed
8/20/2012	11:55:55 PM	Main Vac valve opened
8/20/2012	11:55:55 PM	Helium MFC set to  0.000000
8/20/2012	11:55:55 PM	H2 MFC set to  0.000000
8/20/2012	11:55:55 PM	BCl3 MFC set to  0.000000
8/20/2012	11:55:55 PM	PH3 MFC set to  0.000000
8/20/2012	11:55:55 PM	SiCl4 MFC set to  0.000000
8/20/2012	11:55:55 PM	Bypass solenoid MFC set to  0.000000
8/20/2012	11:55:55 PM	Tube furnace set to 0
8/20/2012	11:55:56 PM	Run finished at 11:55 PM
